Experiment management system, method and medium

    公开(公告)号:US06984198B2

    公开(公告)日:2006-01-10

    申请号:US09928474

    申请日:2001-08-14

    IPC分类号: G01R31/26

    摘要: Systems, methods and mediums are provided for automating experiments within an automated environment without the need to disassociate the test subject (e.g., the semiconductor chip or chips) from that environment. An “experiment” may be a pre-planned deviation of an established (e.g., pre-defined) process utilizing the automated environment.A computer-implemented method, system and computer-readable medium for managing experiments, such as those relating to semiconductor technology. An experiment order includes some deviation from a base process capable of operating in an automated environment. An approval of the experiment order is obtained from a distribution list of users, while permitting the users to attach documents to the experiment order or perhaps modify the experiment. The experiment order is translated into processing data suitable for implementation by said automated environment, and stored. The experiment is caused to be executed in conjunction with at least some portion of said base process via the automated environment according to the processing data.

    Dynamic subject information generation in message services of distributed object systems in a semiconductor assembly line facility
    3.
    发明授权
    Dynamic subject information generation in message services of distributed object systems in a semiconductor assembly line facility 失效
    在半导体装配线设备中的分布式对象系统的消息服务中的动态主题信息生成

    公开(公告)号:US07188142B2

    公开(公告)日:2007-03-06

    申请号:US09725908

    申请日:2000-11-30

    IPC分类号: G06F15/16

    摘要: A system, method and medium of sending messages in a distributed data processing network is described, and contemplates receiving a message that includes subject information that is generated based on one or more pre-selected portions as the message is generated. A message delivery system in a client-server environment is also described. The message delivery system includes a server configured to receive a message that includes subject information that is generated based on one or more pre-selected portions as the message is created and configured to forward the message based on the subject information.

    摘要翻译: 描述了在分布式数据处理网络中发送消息的系统,方法和介质,并且考虑在生成消息时接收包括基于一个或多个预选部分生成的主题信息的消息。 还描述了客户端 - 服务器环境中的消息传递系统。 消息传送系统包括被配置为接收消息的服务器,该消息包括基于一个或多个预先选择的部分生成的主题信息,因为消息被创建并被配置为基于主题信息转发消息。

    Configuration based engineering data collection (EDC) for manufacturing lines
    4.
    发明授权
    Configuration based engineering data collection (EDC) for manufacturing lines 有权
    用于生产线的基于配置的工程数据采集(EDC)

    公开(公告)号:US08266540B2

    公开(公告)日:2012-09-11

    申请号:US12103647

    申请日:2008-04-15

    IPC分类号: G06F3/048

    摘要: Methods and systems for integrating manufacturing equipment with factory automation software. In one embodiment, an equipment integrator (EI) has a user interface to facilitate user input of configuration information to provide an adaptable interface between a manufacturing tool and a manufacturing execution system (MES) that is operable over a plurality of manufacturing tools. The user configurable interface of the EI is adaptable so that tool-independent MES data collection requests may be satisfied by tool-specific data publication through the EI. In a further embodiment, data collected by the EI from a particular manufacturing tool is mapped to the MES without tool-specific interface coding. During processing, the configurable EI may fill a request from the MES for manufacturing data by collecting a data from the manufacturing tool, identifying data based on the configuration information and returning data satisfying a data keying criterion defined in the MES.

    摘要翻译: 将制造设备与工厂自动化软件集成的方法和系统。 在一个实施例中,设备集成器(EI)具有用户界面,以便于用户输入配置信息以在制造工具和可在多个制造工具上操作的制造执行系统(MES)之间提供适应性界面。 EI的用户可配置接口是适应性的,以便通过EI通过工具特定的数据发布来满足与工具无关的MES数据收集请求。 在另一个实施例中,来自特定制造工具的EI收集的数据被映射到MES,而不需要特定于工具的接口编码。 在处理期间,可配置EI可以通过从制造工具收集数据来填写来自MES的用于制造数据的请求,基于配置信息识别数据,并返回满足MES中定义的数据密钥标准的数据。

    Generic interface builder
    5.
    发明授权
    Generic interface builder 失效
    通用界面构建器

    公开(公告)号:US06708074B1

    公开(公告)日:2004-03-16

    申请号:US09637620

    申请日:2000-08-11

    IPC分类号: G06F1900

    摘要: Generic interface adapter builder software generates an interface adapter to tie tools into a centralized manufacturing execution system. As contemplated by embodiments of the present invention, the interface adapter allows a tool in a semiconductor manufacturing assembly to communicate with other hardware and software in the centralized manufacturing execution system in accordance with a standard protocol and be operable from a common view graphical user interface. The generic interface builder software uses a classification of the type library and desired parameters for a particular tool to generate the interface adapter that maps the interface methods of the tool to the interface of the manufacturing execution system and handles long running service request support. In one aspect of the invention, the tool to be integrated into the manufacturing assembly may be a material control system. As contemplated by embodiments of the present invention, the material control system uses COM-based interface methods, and may optionally include a COM-based protocol converter, and may expose its interface methods via a type library.

    摘要翻译: 通用接口适配器构建器软件生成一个接口适配器,将工具绑定到集中的制造执行系统中。 如本发明的实施例所设想的,接口适配器允许半导体制造组件中的工具根据标准协议与集中制造执行系统中的其他硬件和软件通信,并且可以从公共视图图形用户界面操作。 通用接口构建器软件使用类型库的分类和特定工具的期望参数来生成将工具的接口方法映射到制造执行系统的接口并处理长时间运行的服务请求支持的接口适配器。 在本发明的一个方面,要集成到制造组件中的工具可以是材料控制系统。 如本发明的实施例所预期的,材料控制系统使用基于COM的接口方法,并且可以可选地包括基于COM的协议转换器,并且可以通过类型库公开其接口方法。