公开(公告)号：US20120216833A1

公开(公告)日：2012-08-30

申请号：US13034386

申请日：2011-02-24

申请人： Jiansheng Wang ,  Barbara Stanczyk ,  Wendell Boyd, JR. ,  Kevin A. Papke ,  Joseph F. Sommers ,  David Do

发明人： Jiansheng Wang ,  Barbara Stanczyk ,  Wendell Boyd, JR. ,  Kevin A. Papke ,  Joseph F. Sommers ,  David Do

IPC分类号： B08B3/00

CPC分类号： H01L21/67051 ,  B08B3/102 ,  B08B3/14 ,  H01L21/67288 ,  H01L21/67724

摘要： Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.

摘要翻译： 本发明的实施例一般涉及用于非原位清洁腔室部件的方法和装置。 更具体地说，本发明的实施例一般涉及用于在半导体处理室中使用的腔室部件的非原位清洁期间的端点检测的方法和装置。 在一个实施例中，提供了一种用于清洁设置在具有清洁流体的衬套中的部件的系统。 该系统包括便携式推车，由便携式手推车携带的液体颗粒计数器（LPC），LPC被配置为可拆卸地联接到通过衬套形成的流体出口端口，LPC可操作以对离开管线的冲洗液进行采样;以及泵 由便携式手推车携带并且被配置为以可拆卸的方式流体地连接到衬套，所述泵可操作以使冲洗液再循环通过衬套。