公开(公告)号：US20070023719A1

公开(公告)日：2007-02-01

申请号：US11493376

申请日：2006-07-26

申请人： Mark Shannon ,  Byunghoon Bae ,  Richard Masel

发明人： Mark Shannon ,  Byunghoon Bae ,  Richard Masel

IPC分类号： F16K31/02

CPC分类号： F16K31/025 ,  F16K99/0001 ,  F16K99/0005 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084

摘要： A bi-directional electrostatic microvalve includes a membrane electrode that is controlled by application of voltage to fixed electrodes disposed on either side of the membrane electrode. Dielectric insulating layers separate the electrodes. One of the fixed electrodes defines a microcavity. Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.

摘要翻译： 双向静电微型阀包括通过向设置在膜电极的两侧的固定电极施加电压来控制的膜电极。 绝缘层将电极分开。 固定电极之一限定微腔。 形成在电极中的微流体通道为微腔提供流体。 限定在微腔中的中心衬垫使第二电极的一部分靠近膜电极，以提供快速致动，同时微腔降低膜电极的膜挤压压力。 在优选的实施方案中，微型阀，低表面能和低表面电荷捕获涂层，例如由交联的碳二氟化物单体制成的碳氟化合物膜或由氟碳封端的硅烷醇化合物涂层制成的表面单层涂覆电极，低体积电荷捕获电介质层限制电荷 捕捉等问题，增加设备的使用寿命。

公开(公告)号：US20130276512A1

公开(公告)日：2013-10-24

申请号：US13801949

申请日：2013-03-13

申请人： Byunghoon Bae ,  Jihyung Kim ,  Mark A. Shannon ,  Taekyu Kang

发明人： Byunghoon Bae ,  Jihyung Kim ,  Mark A. Shannon ,  Taekyu Kang

IPC分类号： G01N30/02

CPC分类号： G01N30/02 ,  G01N30/68 ,  G01N2030/0095 ,  G01N30/6095

摘要： A portable gas analyzer comprising an integrated micro-flame ionization detector (micro-FID), a micro-gas chromatograph (micro-GC), an electrolyzer, and a flame-shaped electrode are provided. The components of the portable gas analyzer can be integrated into a single “lunchbox” sized housing with all the peripherals required to operate the micro-GC/FID without an external power and gas supply.

摘要翻译： 提供了一种携带式气体分析仪，其包括集成微火焰离子化检测器（micro-FID），微气相色谱仪（micro-GC），电解器和火焰形电极。 便携式气体分析仪的组件可以集成到单个“饭盒”尺寸的外壳中，而无需外部电源和气体供应即可操作微型GC / FID所需的所有外围设备。

公开(公告)号：US20080149869A1

公开(公告)日：2008-06-26

申请号：US11797197

申请日：2007-05-01

申请人： Mark A. Shannon ,  Byunghoon Bae ,  Richard I. Masel

发明人： Mark A. Shannon ,  Byunghoon Bae ,  Richard I. Masel

IPC分类号： F16K31/02

CPC分类号： F16K99/0001 ,  B33Y80/00 ,  F16K31/02 ,  F16K99/0015 ,  F16K99/0051

摘要： A bi-directional electrostatic microvalve includes a membrane electrode that is controlled by application of voltage to fixed electrodes disposed on either side of the membrane electrode. Dielectric insulating layers separate the electrodes. One of the fixed electrodes defines a microcavity. Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.

摘要翻译： 双向静电微型阀包括通过向设置在膜电极的两侧的固定电极施加电压来控制的膜电极。 绝缘层将电极分开。 固定电极之一限定微腔。 形成在电极中的微流体通道为微腔提供流体。 限定在微腔中的中心衬垫使第二电极的一部分靠近膜电极，以提供快速致动，同时微腔降低膜电极的膜挤压压力。 在优选的实施方案中，微型阀，低表面能和低表面电荷捕获涂层，例如由交联的碳二氟化物单体制成的碳氟化合物膜或由氟碳封端的硅烷醇化合物涂层制成的表面单层涂覆电极，低体积电荷捕获电介质层限制电荷 捕捉等问题，增加设备的使用寿命。

公开(公告)号：US08628055B2

公开(公告)日：2014-01-14

申请号：US11797197

申请日：2007-05-01

申请人： Mark A. Shannon ,  Byunghoon Bae ,  Richard I. Masel

发明人： Mark A. Shannon ,  Byunghoon Bae ,  Richard I. Masel

IPC分类号： F16K31/02

CPC分类号： F16K99/0001 ,  B33Y80/00 ,  F16K31/02 ,  F16K99/0015 ,  F16K99/0051

摘要： A bi-directional electrostatic microvalve includes a membrane electrode that is controlled by application of voltage to fixed electrodes disposed on either side of the membrane electrode. Dielectric insulating layers separate the electrodes. One of the fixed electrodes defines a microcavity. Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.

摘要翻译： 双向静电微型阀包括通过向设置在膜电极的两侧的固定电极施加电压来控制的膜电极。 绝缘层将电极分开。 固定电极之一限定微腔。 形成在电极中的微流体通道为微腔提供流体。 限定在微腔中的中心衬垫使第二电极的一部分靠近膜电极，以提供快速致动，同时微腔降低膜电极的膜挤压压力。 在优选的实施方案中，微型阀，低表面能和低表面电荷捕获涂层，例如由交联的碳二氟化物单体制成的碳氟化合物膜或由氟碳封端的硅烷醇化合物涂层制成的表面单层涂覆电极，低体积电荷捕获电介质层限制电荷 捕捉等问题，增加设备的使用寿命。