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公开(公告)号：US07312154B2
公开(公告)日：2007-12-25
申请号：US11314060
申请日：2005-12-20
申请人： Jeffrey Scott Cites , Charles Michael Darcangelo , Steven Joseph Gregorski , Richard Orr Maschmeyer , Mark Andrew Stocker , John Christopher Thomas
发明人： Jeffrey Scott Cites , Charles Michael Darcangelo , Steven Joseph Gregorski , Richard Orr Maschmeyer , Mark Andrew Stocker , John Christopher Thomas
IPC分类号： H01L21/461
CPC分类号： B24B49/12 , B24B37/013 , H01L21/30625 , H01L22/26
摘要： A method of polishing a semiconductor layer formed on a transparent substrate is described, the method including measuring the thickness of the semiconductor from the substrate side of the semiconductor layer simultaneously with the polishing, and using the thickness measurement to modify the polishing.
摘要翻译： 对在透明基板上形成的半导体层进行研磨的方法进行说明，该方法包括：在与抛光同时从半导体层的基板侧测量半导体的厚度，并使用厚度测量来改变抛光。
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公开(公告)号：US20110318994A1
公开(公告)日：2011-12-29
申请号：US13112498
申请日：2011-05-20
申请人： Charles Michael Darcangelo , Steven Edward DeMartino , Joseph Fabian Ellison , Richard A. Nasca , Aric Bruce Shorey , David Alan Tammaro , John Christopher Thomas
发明人： Charles Michael Darcangelo , Steven Edward DeMartino , Joseph Fabian Ellison , Richard A. Nasca , Aric Bruce Shorey , David Alan Tammaro , John Christopher Thomas
CPC分类号： B24B1/005 , B24B9/065 , B24B31/112
摘要： A method of preparing an edge-strengthened article comprises polishing of an edge of an article having a first edge strength using magnetorheological finishing, wherein after the polishing the article has a second edge strength and the second edge strength is greater than the first edge strength.
摘要翻译： 一种制备边缘强化制品的方法包括使用磁流变精加工对具有第一边缘强度的制品的边缘进行抛光，其中在抛光之后，制品具有第二边缘强度并且第二边缘强度大于第一边缘强度。
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公开(公告)号：US20120009854A1
公开(公告)日：2012-01-12
申请号：US13169499
申请日：2011-06-27
申请人： Charles Michael Darcangelo , Steven Edward DeMartino , Aric Bruce Shorey , Daniel Duane Strong , David Alan Tammaro , Butchi Reddy Vaddi
发明人： Charles Michael Darcangelo , Steven Edward DeMartino , Aric Bruce Shorey , Daniel Duane Strong , David Alan Tammaro , Butchi Reddy Vaddi
IPC分类号： B24B41/06
CPC分类号： B24B31/112 , B24B1/005 , B24B9/065 , B24B21/002 , B24B29/00 , B24B37/00
摘要： An edge finishing apparatus includes a surface, a fluid delivery device configured to deliver at least one magnetorheological polishing fluid (MPF) ribbon to the at least one well, at least one magnet placed adjacent to the surface to selectively apply a magnetic field in a vicinity of the surface, and at least one holder placed in opposing relation to the surface, the at least one holder being configured to support at least one article such that an edge of the at least one article can be selectively immersed in the MPF ribbon delivered to the at least one well.
摘要翻译： 边缘整理装置包括表面，流体输送装置，其构造成将至少一个磁流变抛光流体（MPF）带输送到至少一个阱，至少一个磁体，其邻近表面放置，以选择性地在附近施加磁场 的至少一个保持器，所述至少一个保持器被配置为支撑至少一个物品，使得所述至少一个物品的边缘可以选择性地浸入被输送到所述至少一个物品的所述MPF带中 至少一口井。
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公开(公告)号：US09102030B2
公开(公告)日：2015-08-11
申请号：US13169499
申请日：2011-06-27
申请人： Charles Michael Darcangelo , Steven Edward DeMartino , Aric Bruce Shorey , Daniel Duane Strong , David Alan Tammaro , Butchi Reddy Vaddi
发明人： Charles Michael Darcangelo , Steven Edward DeMartino , Aric Bruce Shorey , Daniel Duane Strong , David Alan Tammaro , Butchi Reddy Vaddi
CPC分类号： B24B31/112 , B24B1/005 , B24B9/065 , B24B21/002 , B24B29/00 , B24B37/00
摘要： An edge finishing apparatus includes a surface, a fluid delivery device configured to deliver at least one magnetorheological polishing fluid (MPF) ribbon to the at least one well, at least one magnet placed adjacent to the surface to selectively apply a magnetic field in a vicinity of the surface, and at least one holder placed in opposing relation to the surface, the at least one holder being configured to support at least one article such that an edge of the at least one article can be selectively immersed in the MPF ribbon delivered to the at least one well.
摘要翻译： 边缘整理装置包括表面，流体输送装置，其构造成将至少一个磁流变抛光流体（MPF）带输送到至少一个阱，至少一个磁体，其邻近表面放置，以选择性地在附近施加磁场 的至少一个保持器，所述至少一个保持器被配置为支撑至少一个物品，使得所述至少一个物品的边缘可以选择性地浸入被输送到所述至少一个物品的所述MPF带中 至少一口井。
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公开(公告)号：US08974268B2
公开(公告)日：2015-03-10
申请号：US13112498
申请日：2011-05-20
申请人： Charles Michael Darcangelo , Steven Edward DeMartino , Joseph Fabian Ellison , Richard A Nasca , Aric Bruce Shorey , David Alan Tammaro , John Christopher Thomas
发明人： Charles Michael Darcangelo , Steven Edward DeMartino , Joseph Fabian Ellison , Richard A Nasca , Aric Bruce Shorey , David Alan Tammaro , John Christopher Thomas
CPC分类号： B24B1/005 , B24B9/065 , B24B31/112
摘要： A method of preparing an edge-strengthened article comprises polishing of an edge of an article having a first edge strength using magnetorheological finishing, wherein after the polishing the article has a second edge strength and the second edge strength is greater than the first edge strength.
摘要翻译： 一种制备边缘强化制品的方法包括使用磁流变精加工对具有第一边缘强度的制品的边缘进行抛光，其中在抛光之后，制品具有第二边缘强度并且第二边缘强度大于第一边缘强度。
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