公开(公告)号：US20080002556A1

公开(公告)日：2008-01-03

申请号：US11802947

申请日：2007-05-29

申请人： Chih-Kung Lee ,  Liang-Bin Yu ,  Jiunn-Woei Liaw ,  Ding-Zheng Lin ,  Jyi-Tyan Yeh ,  Yu-Tsung Chiu ,  Chun-Ti Chen ,  Chyan-Chi Wu ,  Chau-Shioung Yeh ,  You-Chia Chang ,  Kuo-Tung Huang ,  Yi-Chun Chen ,  Yeong-Feng Wang

发明人： Chih-Kung Lee ,  Liang-Bin Yu ,  Jiunn-Woei Liaw ,  Ding-Zheng Lin ,  Jyi-Tyan Yeh ,  Yu-Tsung Chiu ,  Chun-Ti Chen ,  Chyan-Chi Wu ,  Chau-Shioung Yeh ,  You-Chia Chang ,  Kuo-Tung Huang ,  Yi-Chun Chen ,  Yeong-Feng Wang

IPC分类号： G11B7/135

CPC分类号： G03F7/70383 ,  G01Q60/22 ,  G01Q80/00 ,  G02B27/58 ,  G11B7/1387

摘要： The present invention provides an optical head with a single or multiple sub-wavelength light beams, which can be used in arenas such as photolithography, optical storage, optical microscopy, to name a few. The present invention includes a transparent substrate, a thin film, and a surface structure with sub-wavelength surface profile. The incident light transmits through the transparent substrate, forms a surface plasma wave along the sub-wavelength aperture located within the thin film, and finally re-emits through spatial coupling with the sub-wavelength profile of the surface structure. As the coupled re-emitting light beam or light beams can maintain the waist less than that of the diffraction limit for a few micrometers out of the surface with sub-wavelength profile in many cases, this invention can have applications ranging from micro or nano manufacturing, metrology, and manipulation by using light beams with waist smaller than the diffraction limit.

摘要翻译： 本发明提供了具有单个或多个亚波长光束的光学头，其可以用于诸如光刻，光学存储，光学显微镜等领域。 本发明包括透明基板，薄膜和具有亚波长表面轮廓的表面结构。 入射光透过透明基板，沿着位于薄膜内的亚波长孔径形成表面等离子体波，最后通过与表面结构的亚波长分布的空间耦合重新发射。 由于耦合的再发射光束或光束在许多情况下可以使具有亚波长分布的表面中几微米的衍射极限的腰部能够保持较小的范围，所以本发明可以具有从微或纳米制造的应用 ，计量和使用腰围小于衍射极限的光束进行操纵。

公开(公告)号：US20080304397A1

公开(公告)日：2008-12-11

申请号：US11960725

申请日：2007-12-20

申请人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

发明人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

IPC分类号： G11B7/135

CPC分类号： G03F7/70383 ,  G11B7/1387 ,  G11B7/261

摘要： A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.

摘要翻译： 提供了一种微光学头，其提供亚波长聚焦点和非常长的焦深。 光头包括透明基板，不透明膜和至少一个亚波长环形通道。 相干光透过支撑光头并透过合适设计的亚波长环形通道的透明基板，可以克服衍射极限，有效提高透射能量。 透射光在光学头后方一定距离后会聚，形成保持非常长的距离而不发散的亚波长标度光束。

公开(公告)号：US07792006B2

公开(公告)日：2010-09-07

申请号：US11802947

申请日：2007-05-29

申请人： Chih King Lee ,  Liang Bin Yu ,  Jiunn Woei Liaw ,  Ding Zheng Lin ,  Jyi Tyan Yeh ,  Yu Tsung Chiu ,  Chun Ti Chen ,  Chyan Chi Wu ,  Chau Shioung Yeh ,  You Chia Chang ,  Kuo Tung Huang ,  Yi Chun Chen ,  Yeong Feng Wang

发明人： Chih King Lee ,  Liang Bin Yu ,  Jiunn Woei Liaw ,  Ding Zheng Lin ,  Jyi Tyan Yeh ,  Yu Tsung Chiu ,  Chun Ti Chen ,  Chyan Chi Wu ,  Chau Shioung Yeh ,  You Chia Chang ,  Kuo Tung Huang ,  Yi Chun Chen ,  Yeong Feng Wang

IPC分类号： G11B7/00

CPC分类号： G03F7/70383 ,  G01Q60/22 ,  G01Q80/00 ,  G02B27/58 ,  G11B7/1387

摘要： The present invention provides an optical head with a single or multiple sub-wavelength light beams, which can be used in arenas such as photolithography, optical storage, optical microscopy, to name a few. The present invention includes a transparent substrate, a thin film, and a surface structure with sub-wavelength surface profile. The incident light transmits through the transparent substrate, forms a surface plasma wave along the sub-wavelength aperture located within the thin film, and finally re-emits through spatial coupling with the sub-wavelength profile of the surface structure. As the coupled re-emitting light beam or light beams can maintain the waist less than that of the diffraction limit for a few micrometers out of the surface with sub-wavelength profile in many cases, this invention can have applications ranging from micro or nano manufacturing, metrology, and manipulation by using light beams with waist smaller than the diffraction limit.

摘要翻译： 本发明提供了具有单个或多个亚波长光束的光学头，其可以用于诸如光刻，光学存储，光学显微镜等领域。 本发明包括透明基板，薄膜和具有亚波长表面轮廓的表面结构。 入射光透过透明基板，沿着位于薄膜内的亚波长孔径形成表面等离子体波，最后通过与表面结构的亚波长分布的空间耦合重新发射。 由于耦合的再发射光束或光束在许多情况下可以使具有亚波长分布的表面中几微米的衍射极限的腰部能够保持较小的范围，所以本发明可以具有从微或纳米制造的应用 ，计量和使用腰围小于衍射极限的光束进行操纵。

公开(公告)号：US07957250B2

公开(公告)日：2011-06-07

申请号：US11960725

申请日：2007-12-20

申请人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

发明人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

IPC分类号： G11B7/00

CPC分类号： G03F7/70383 ,  G11B7/1387 ,  G11B7/261

摘要： A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.

摘要翻译： 提供了一种微光学头，其提供亚波长聚焦点和非常长的焦深。 光头包括透明基板，不透明膜和至少一个亚波长环形通道。 相干光透过支撑光头并透过合适设计的亚波长环形通道的透明基板，可以克服衍射极限，有效提高透射能量。 透射光在光学头后方一定距离后会聚，形成保持非常长的距离而不发散的亚波长标度光束。

公开(公告)号：US07288776B2

公开(公告)日：2007-10-30

申请号：US10874236

申请日：2004-06-24

申请人： Chih Kung Lee ,  Liang Bin Yu ,  Jiunn Woei Liaw ,  Ding Zheng Lin ,  Jyi Tyan Yeh ,  Yu Tsung Chiu ,  Chun Ti Chen ,  Chyan Chi Wu ,  Chau Shioung Yeh ,  You Chia Chang ,  Kuo Tung Huang ,  Yi Chun Chen ,  Yeong Feng Wang

发明人： Chih Kung Lee ,  Liang Bin Yu ,  Jiunn Woei Liaw ,  Ding Zheng Lin ,  Jyi Tyan Yeh ,  Yu Tsung Chiu ,  Chun Ti Chen ,  Chyan Chi Wu ,  Chau Shioung Yeh ,  You Chia Chang ,  Kuo Tung Huang ,  Yi Chun Chen ,  Yeong Feng Wang

IPC分类号： G21G4/00

CPC分类号： G03F7/70383 ,  G01Q60/22 ,  G01Q80/00 ,  G02B27/58 ,  G11B7/1387

摘要： The present invention provides an optical head with a single or multiple sub-wavelength light beams, which can be used in arenas such as photolithography, optical storage, optical microscopy, to name a few. The present invention includes a transparent substrate, a thin film, and a surface structure with sub-wavelength surface profile. The incident light transmits through the transparent substrate, forms a surface plasma wave along the sub-wavelength aperture located within the thin film, and finally re-emits through spatial coupling with the sub-wavelength profile of the surface structure. As the coupled re-emitting light beam or light beams can maintain the waist less than that of the diffraction limit for a few micrometers out of the surface with sub-wavelength profile in many cases, this invention can have applications ranging from micro or nano manufacturing, metrology, and manipulation by using light beams with waist smaller than the diffraction limit.

摘要翻译： 本发明提供了具有单个或多个亚波长光束的光学头，其可以用于诸如光刻，光学存储，光学显微镜等领域。 本发明包括透明基板，薄膜和具有亚波长表面轮廓的表面结构。 入射光透过透明基板，沿着位于薄膜内的亚波长孔径形成表面等离子体波，最后通过与表面结构的亚波长分布的空间耦合重新发射。 由于耦合的再发射光束或光束在许多情况下可以使具有亚波长分布的表面中几微米的衍射极限的腰部能够保持较小的范围，所以本发明可以具有从微或纳米制造的应用 ，计量和使用腰围小于衍射极限的光束进行操纵。