摘要:
A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.
摘要:
A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.
摘要:
The present invention provides an optical head with a single or multiple sub-wavelength light beams, which can be used in arenas such as photolithography, optical storage, optical microscopy, to name a few. The present invention includes a transparent substrate, a thin film, and a surface structure with sub-wavelength surface profile. The incident light transmits through the transparent substrate, forms a surface plasma wave along the sub-wavelength aperture located within the thin film, and finally re-emits through spatial coupling with the sub-wavelength profile of the surface structure. As the coupled re-emitting light beam or light beams can maintain the waist less than that of the diffraction limit for a few micrometers out of the surface with sub-wavelength profile in many cases, this invention can have applications ranging from micro or nano manufacturing, metrology, and manipulation by using light beams with waist smaller than the diffraction limit.
摘要:
An optical etching device for laser machining is provided and includes a laser light source and an optical head. The laser light source emits an incident beam. The optical head includes a transparent substrate, an opaque film and a sub-wavelength annular channel. The laser energy tolerance of the transparent substrate ranges from 8 J/cm2 to 12 J/cm2. The opaque film has a first surface and a second surface opposite to the first surface. The transparent substrate is adhered to the first surface. The sub-wavelength annular channel is formed in the opaque film and extends from the first surface to the second surface so that the incident beam from the transparent substrate generates a surface plasma wave on the opaque film.
摘要翻译:提供了一种用于激光加工的光刻蚀装置,包括激光光源和光头。 激光光源发射入射光束。 光头包括透明基板,不透明膜和亚波长环形通道。 透明基板的激光能量容差为8J / cm 2〜12J / cm 2。 不透明膜具有与第一表面相对的第一表面和第二表面。 透明基板粘附到第一表面。 亚波长环形通道形成在不透明膜中并且从第一表面延伸到第二表面,使得来自透明基板的入射光束在不透明膜上产生表面等离子体波。
摘要:
An actuator and a method for using the same are provided. The actuator includes a flexible element and a photoelectric layer. The flexible element includes an elastic layer or a piezoelectric layer. The photoelectric layer is disposed on a side of the flexible element. An electrical characteristic of the photoelectric layer is determined according to an irradiation condition of the photoelectric layer.
摘要:
An actuator and a method for using the same are provided. The actuator includes a flexible element and a photoelectric layer. The flexible element includes an elastic layer or a piezoelectric layer. The photoelectric layer is disposed on a side of the flexible element. An electrical characteristic of the photoelectric layer is determined according to an irradiation condition of the photoelectric layer.
摘要:
Disclosed is an optical head, including a hollow micro-pipe and a stuffing member, the micro-pipe having a diameter-extended portion and a diameter-diminishing portion adapted allowing the incident light to transmit from the diameter-extended portion to the diameter-diminishing portion to emerge from its tip, and the stuffing member being disposed inside of the micro-pipe compared to prior techniques. The optical head of the invention is easier to be made, and it has a better focus for achieving optical exposure of sub-wave length focal spot and deep depth of focus.
摘要:
Disclosed is an optical head, including a hollow micro-pipe and a stuffing member, the micro-pipe having a diameter-extended portion and a diameter-diminishing portion adapted allowing the incident light to transmit from the diameter-extended portion to the diameter-diminishing portion to emerge from its tip, and the stuffing member being disposed inside of the micro-pipe compared to prior techniques. The optical head of the invention is easier to be made, and it has a better focus for achieving optical exposure of sub-wave length focal spot and deep depth of focus.
摘要:
The invention discloses a micro-sensor for sensing a chemical substance. The micro-sensor according to the invention includes a substrate, a micro-cantilever, an electrode structure, and a measuring device. The micro-cantilever is formed on the substrate and has a capturing surface for capturing chemical substances. The electrode structure is for supplying an electrical field. The electrical field is disposed so as to assist the capturing surface in capturing chemical substances. The measuring device, coupled to the micro-cantilever, is for measuring a variation on a mechanical property of the micro-cantilever induced by the captured chemical substance and interpreting the variation on the mechanical property of the micro-cantilever into information relative to the chemical substance.
摘要:
Surface plasmon resonance (SPR) sensing technique which provides high specificity and accuracy has been an important method for molecular sensing technology. In the past, in order to affix 45 nm gold film onto glass or silicon substrate, several nanometers of chromium (Cr) or titanium (Ti) has been used as adhesive layer for the attachment of Au film. However, the existence of Cr or Ti thin film deteriorates the performance of SPR sensor due to their characteristic optical absorption. Our experimental results have confirmed the uses of conducting metal oxide, specifically, ITO and Zinc Oxide (ZnO) can be used to replace Cr or Ti for better performance in terms of SPR resonant properties (resonant angle and HMBW) and sensitivity enhancement for 3 to 15 times than traditional ones. It would contribute significantly to the SPR applications in both biosensors and gas sensors.