NANOWIRE FABRICATION METHOD AND SEMICONDUCTOR ELEMENT USING NANOWIRE FABRICATED THEREBY
    1.
    发明申请
    NANOWIRE FABRICATION METHOD AND SEMICONDUCTOR ELEMENT USING NANOWIRE FABRICATED THEREBY 有权
    纳米制造方法和使用纳米复合材料制成的半导体元件

    公开(公告)号:US20120146161A1

    公开(公告)日:2012-06-14

    申请号:US13017777

    申请日:2011-01-31

    摘要: The present invention discloses a nanowire fabrication method and a semiconductor element using a nanowire fabricated thereby. The method of the present invention comprises steps: providing a substrate; sequentially depositing a silicon dioxide layer and a silicon nitride layer on the substrate; forming a patterned photoresist layer on the silicon nitride layer; using the patterned photoresist layer as a mask to etch the silicon nitride layer and the silicon dioxide layer with the substrate partly etched away to form a protrusion; removing the patterned photoresist layer to form an isolation layer; removing the silicon nitride and the silicon dioxide layer, sequentially depositing a dielectric layer and a polysilicon layer; and anisotropically etching the polysilicon layer to form nanowires on a region of the dielectric layer, which is around sidewalls of the protrusion.

    摘要翻译: 本发明公开了一种纳米线制造方法和使用由其制造的纳米线的半导体元件。 本发明的方法包括以下步骤:提供基底; 在基板上依次沉积二氧化硅层和氮化硅层; 在所述氮化硅层上形成图案化的光致抗蚀剂层; 使用图案化的光致抗蚀剂层作为掩模来蚀刻氮化硅层和二氧化硅层,其中衬底被部分蚀刻掉以形成突起; 去除图案化的光致抗蚀剂层以形成隔离层; 去除氮化硅和二氧化硅层,依次沉积介电层和多晶硅层; 并且各向异性地蚀刻多晶硅层以在介电层的位于突起的侧壁周围的区域上形成纳米线。

    Holder for electronic apparatus
    2.
    发明授权
    Holder for electronic apparatus 失效
    电子仪器持有人

    公开(公告)号:US07583499B2

    公开(公告)日:2009-09-01

    申请号:US11768200

    申请日:2007-06-26

    IPC分类号: G06F1/16

    摘要: The invention provides a holder having a main body, a fixing module and an actuating module. Both the fixing module and the actuating module are positioned on the main body. When the actuating module moves along a first direction, the fixing module is driven from either a release state or a fixed state to another state along a second direction different from the first direction. The invention further provides a holder applied to an electronic apparatus. The holder has a main body and a detachable base. The detachable base is positioned on the main body, and has a base cover and a circuit board. The base cover has a connecting part. The circuit board is covered by the base cover, and has a plurality of pins for connecting to a connecting port of the electronic apparatus.

    摘要翻译: 本发明提供一种具有主体,固定模块和致动模块的保持器。 固定模块和致动模块都位于主体上。 当致动模块沿着第一方向移动时,沿着与第一方向不同的第二方向将固定模块从释放状态或固定状态驱动到另一状态。 本发明还提供一种应用于电子设备的保持器。 支架具有主体和可拆卸的底座。 可拆卸底座位于主体上,并具有底盖和电路板。 基座盖具有连接部分。 电路板由底盖覆盖,并且具有多个用于连接到电子设备的连接端口的销。

    Method of manufacturing embedded metal-oxide-nitride-oxide-silicon memory device
    3.
    发明授权
    Method of manufacturing embedded metal-oxide-nitride-oxide-silicon memory device 有权
    嵌入式金属氧化物 - 氮化物 - 氧化物 - 硅存储器件的制造方法

    公开(公告)号:US08048747B1

    公开(公告)日:2011-11-01

    申请号:US12917690

    申请日:2010-11-02

    摘要: The present disclosure fabricates an embedded metal-oxide-nitride-oxide-silicon (MONOS) memory device. The memory device is stacked with memory layers having a low aspect ratio. The memory device can be easily fabricated with only two extra masks for saving cost. The present disclosure uses a general method for mass-producing TFT and is thus fit for fabricating NAND-type or NOR-type flash memory to be used as embedded memory in a system-on-chip.

    摘要翻译: 本公开内容制造了一种嵌入式金属氧化物 - 氮化物 - 氧化物 - 硅(MONOS)存储器件。 存储器件与具有低纵横比的存储器层叠。 存储器件可以容易地制造,只需要两个额外的掩模,以节省成本。 本公开使用用于批量生产TFT的一般方法,因此适合于制造NAND型或NOR型闪存,以用作片上系统中的嵌入式存储器。

    Nanowire fabrication method and semiconductor element using nanowire fabricated thereby
    6.
    发明授权
    Nanowire fabrication method and semiconductor element using nanowire fabricated thereby 有权
    纳米线制造方法和使用由此制造的纳米线的半导体元件

    公开(公告)号:US08405168B2

    公开(公告)日:2013-03-26

    申请号:US13017777

    申请日:2011-01-31

    IPC分类号: H01L29/78

    摘要: The present invention discloses a nanowire fabrication method and a semiconductor element using a nanowire fabricated thereby. The method of the present invention comprises steps: providing a substrate; sequentially depositing a silicon dioxide layer and a silicon nitride layer on the substrate; forming a patterned photoresist layer on the silicon nitride layer; using the patterned photoresist layer as a mask to etch the silicon nitride layer and the silicon dioxide layer with the substrate partly etched away to form a protrusion; removing the patterned photoresist layer to form an isolation layer; removing the silicon nitride and the silicon dioxide layer, sequentially depositing a dielectric layer and a polysilicon layer; and anisotropically etching the polysilicon layer to form nanowires on a region of the dielectric layer, which is around sidewalls of the protrusion.

    摘要翻译: 本发明公开了一种纳米线制造方法和使用由其制造的纳米线的半导体元件。 本发明的方法包括以下步骤:提供基底; 在基板上依次沉积二氧化硅层和氮化硅层; 在所述氮化硅层上形成图案化的光致抗蚀剂层; 使用图案化的光致抗蚀剂层作为掩模来蚀刻氮化硅层和二氧化硅层,其中衬底被部分蚀刻掉以形成突起; 去除图案化的光致抗蚀剂层以形成隔离层; 去除氮化硅和二氧化硅层,依次沉积介电层和多晶硅层; 并且各向异性地蚀刻多晶硅层以在介电层的位于突起的侧壁周围的区域上形成纳米线。

    HOLDER FOR ELECTRONIC APPARATUS
    7.
    发明申请
    HOLDER FOR ELECTRONIC APPARATUS 失效
    电子设备支架

    公开(公告)号:US20080242376A1

    公开(公告)日:2008-10-02

    申请号:US11768200

    申请日:2007-06-26

    IPC分类号: H04M1/00 B60R7/00

    摘要: The invention provides a holder having a main body, a fixing module and an actuating module. Both the fixing module and the actuating module are positioned on the main body. When the actuating module moves along a first direction, the fixing module is driven from either a release state or a fixed state to another state along a second direction different from the first direction. The invention further provides a holder applied to an electronic apparatus. The holder has a main body and a detachable base. The detachable base is positioned on the main body, and has a base cover and a circuit board. The base cover has a connecting part. The circuit board is covered by the base cover, and has a plurality of pins for connecting to a connecting port of the electronic apparatus.

    摘要翻译: 本发明提供一种具有主体,固定模块和致动模块的保持器。 固定模块和致动模块都位于主体上。 当致动模块沿着第一方向移动时,沿着与第一方向不同的第二方向将固定模块从释放状态或固定状态驱动到另一状态。 本发明还提供一种应用于电子设备的保持器。 支架具有主体和可拆卸的底座。 可拆卸底座位于主体上,并具有底盖和电路板。 基座盖具有连接部分。 电路板由底盖覆盖,并且具有多个用于连接到电子设备的连接端口的销。

    THIN FILM TRANSISTOR AND FABRICATING METHOD
    8.
    发明申请
    THIN FILM TRANSISTOR AND FABRICATING METHOD 审中-公开
    薄膜晶体管和制作方法

    公开(公告)号:US20130161755A1

    公开(公告)日:2013-06-27

    申请号:US13451390

    申请日:2012-04-19

    摘要: A thin-film transistor comprises a semiconductor panel, a dielectric layer, a semiconductor film layer, a conduct layer, a source and a drain. The semiconductor panel comprises a base, an intra-dielectric layer, at least one metal wire layer and at least one via layer. The dielectric layer is stacked on the semiconductor panel. The semiconductor film layer is stacked on the dielectric layer. The conduct layer is formed on the semiconductor film layer. The source is formed on the via of the vias that is adjacent to and connects to the gate via. The drain is formed on another via of the vias that is adjacent to and connects to the gate via. A fabricating method for a thin-film transistor with metal-gates and nano-wires is also disclosed.

    摘要翻译: 薄膜晶体管包括半导体板,电介质层,半导体膜层,导电层,源极和漏极。 半导体面板包括基底,介质内介质层,至少一个金属线层和至少一个通孔层。 电介质层堆叠在半导体面板上。 半导体膜层层叠在电介质层上。 导电层形成在半导体膜层上。 源极形成在与通孔相邻并连接到通孔的通孔的通孔上。 漏极形成在邻近并连接到栅极通孔的通孔的另一个通孔上。 还公开了一种具有金属栅极和纳米线的薄膜晶体管的制造方法。