BODY CONTACT STRUCTURE FOR A SEMICONDUCTOR DEVICE
    2.
    发明申请
    BODY CONTACT STRUCTURE FOR A SEMICONDUCTOR DEVICE 审中-公开
    半导体器件的身体接触结构

    公开(公告)号:US20120205744A1

    公开(公告)日:2012-08-16

    申请号:US13370395

    申请日:2012-02-10

    CPC classification number: H01L21/266 H01L29/66772 H01L29/78615

    Abstract: Embodiments of the invention provide SOI body-contacted transistors that can be used for high frequency analog and digital circuits. In accordance with certain embodiments of the invention, the SOI transistor gate can have an “I” shape, similar to the shape of the gate of a floating body SOI transistor. However, a body region is provided that extends perpendicular to the width direction of the gate and is contacted at an end of the extended body region. To form such a body contact structure, a source/drain implant block mask and silicide block mask are used during the formation of the source/drain regions. The source/drain implant block mask and silicide block mask can be formed on the same region, but the silicide block mask can allow for the body contact portion at the end of the extended body region to be silicided during the siliciding of the source/drain regions.

    Abstract translation: 本发明的实施例提供可用于高频模拟和数字电路的SOI体接触晶体管。 根据本发明的某些实施例,SOI晶体管栅极可以具有类似于浮体SOI晶体管的栅极的形状的“I”形状。 然而,提供了一个主体区域,其垂直于栅极的宽度方向延伸并在延伸体区域的一端接触。 为了形成这种体接触结构,在源极/漏极区域的形成期间使用源/漏注入块掩模和硅化物掩模掩模。 源极/漏极注入块掩模和硅化物掩模掩模可以形成在相同的区域上,但是硅化物掩模掩模可以允许在扩散体区域的末端处的体接触部分在源极/漏极的硅化期间被硅化 地区。

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