公开(公告)号：US20220018656A1

公开(公告)日：2022-01-20

申请号：US17377439

申请日：2021-07-16

申请人： Shih-Yao PAN ,  Chih-Yao TING ,  Chia-Hung LIN ,  Hsin-Yun CHANG

发明人： Shih-Yao PAN ,  Chih-Yao TING ,  Chia-Hung LIN ,  Hsin-Yun CHANG

IPC分类号： G01B11/30

摘要： Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.

公开(公告)号：US11841218B2

公开(公告)日：2023-12-12

申请号：US17377439

申请日：2021-07-16

申请人： Shih-Yao Pan ,  Chih-Yao Ting ,  Chia-Hung Lin ,  Hsin-Yun Chang

发明人： Shih-Yao Pan ,  Chih-Yao Ting ,  Chia-Hung Lin ,  Hsin-Yun Chang

IPC分类号： G01B11/30

CPC分类号： G01B11/303

摘要： Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.