公开(公告)号：US06825915B2

公开(公告)日：2004-11-30

申请号：US10362461

申请日：2003-02-25

申请人： Akira Yamauchi ,  Yoshiyuki Arai ,  Chisa Inaka ,  Eiji Shamoto ,  Toshimichi Moriwaki

发明人： Akira Yamauchi ,  Yoshiyuki Arai ,  Chisa Inaka ,  Eiji Shamoto ,  Toshimichi Moriwaki

IPC分类号： G03B2742

CPC分类号： H01L21/67294 ,  B23Q1/34 ,  G03F7/707 ,  G03F7/70708 ,  H01L21/67259 ,  H01L21/68

摘要： An alignment device comprising a movable table, a plurality of movable support means for movably supporting the movable table, means for reading a recognition mark, and a control means for controlling the drive of the movable support means based on information from the recognition means, wherein each movable support means comprises means having a pair of support blocks each provided to be able to contact/separate with/from the movable table and a pair of piezoelectric actuators each provided with expansible first, second and third piezoelectric elements connected to a support block and extending in each direction, and being capable of walking operation relative to the movable table by the operations of the respective piezoelectric actuators. An alignment accuracy up to a nanometer level can be attained, and the alignment device itself and therefore the entire apparatus incorporating the alignment device can be significantly reduced in thickness and size.

摘要翻译： 一种对准装置，包括可移动台，用于可移动地支撑可移动台的多个可移动支撑装置，用于读取识别标记的装置，以及用于基于来自识别装置的信息来控制可移动支撑装置的驱动的控制装置，其中 每个可移动支撑装置包括具有一对支撑块的装置，每个支撑块设置成能够与可移动工作台接触/分离;以及一对压电致动器，每个压电致动器设置有连接到支撑块的可膨胀的第一，第二和第三压电元件， 在每个方向上延伸，并且能够通过各个压电致动器的操作相对于可移动工作台行走操作。 可以达到高达纳米级的对准精度，并且对准装置本身以及因此整合对准装置的整个装置的厚度和尺寸可以显着减小。