公开(公告)号：US06825915B2

公开(公告)日：2004-11-30

申请号：US10362461

申请日：2003-02-25

申请人： Akira Yamauchi ,  Yoshiyuki Arai ,  Chisa Inaka ,  Eiji Shamoto ,  Toshimichi Moriwaki

发明人： Akira Yamauchi ,  Yoshiyuki Arai ,  Chisa Inaka ,  Eiji Shamoto ,  Toshimichi Moriwaki

IPC分类号： G03B2742

CPC分类号： H01L21/67294 ,  B23Q1/34 ,  G03F7/707 ,  G03F7/70708 ,  H01L21/67259 ,  H01L21/68

摘要： An alignment device comprising a movable table, a plurality of movable support means for movably supporting the movable table, means for reading a recognition mark, and a control means for controlling the drive of the movable support means based on information from the recognition means, wherein each movable support means comprises means having a pair of support blocks each provided to be able to contact/separate with/from the movable table and a pair of piezoelectric actuators each provided with expansible first, second and third piezoelectric elements connected to a support block and extending in each direction, and being capable of walking operation relative to the movable table by the operations of the respective piezoelectric actuators. An alignment accuracy up to a nanometer level can be attained, and the alignment device itself and therefore the entire apparatus incorporating the alignment device can be significantly reduced in thickness and size.

摘要翻译： 一种对准装置，包括可移动台，用于可移动地支撑可移动台的多个可移动支撑装置，用于读取识别标记的装置，以及用于基于来自识别装置的信息来控制可移动支撑装置的驱动的控制装置，其中 每个可移动支撑装置包括具有一对支撑块的装置，每个支撑块设置成能够与可移动工作台接触/分离;以及一对压电致动器，每个压电致动器设置有连接到支撑块的可膨胀的第一，第二和第三压电元件， 在每个方向上延伸，并且能够通过各个压电致动器的操作相对于可移动工作台行走操作。 可以达到高达纳米级的对准精度，并且对准装置本身以及因此整合对准装置的整个装置的厚度和尺寸可以显着减小。

公开(公告)号：US06821381B1

公开(公告)日：2004-11-23

申请号：US10416839

申请日：2003-05-15

申请人： Akira Yamauchi ,  Yoshiyuki Arai

发明人： Akira Yamauchi ,  Yoshiyuki Arai

IPC分类号： B30B1534

CPC分类号： B23K20/025 ,  B29C65/18 ,  B29C66/80 ,  B29C66/8122 ,  B29C66/81241 ,  B29C66/81261 ,  B29C66/81431 ,  B29C66/8181 ,  B29C66/91212 ,  B29C66/91231 ,  B29C66/91421 ,  B29K2909/02 ,  H01L24/80 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/14

摘要： A ceramic holder 2 is mounted on the lower end of a connecting block 30 of metal mounted on the lower end of a tool main body 1 of metal, such ceramic holder 2, a ceramic heater 4 and a ceramic presser 5 being sintered. In addition) the coefficient of linear expansion of the ceramic holder 2 is approximately equal to those of the ceramic heater 4 and ceramic presser 5; furthermore, the thermal conductivities of the ceramic holder 2 and ceramic presser 5 are greater as the pressure side of the ceramic presser 5 as seen from the ceramic heater 4 is approached and are smaller as the attaching surface side of the ceramic holder 2 is approached.

摘要翻译： 安装在金属的工具主体1的下端上的金属的连接块30的下端，陶瓷保持架2，陶瓷保持架2，陶瓷加热器4和陶瓷压板5被烧结。 此外，陶瓷保持架2的线膨胀系数大致等于陶瓷加热器4和陶瓷加压器5的线膨胀系数; 此外，陶瓷加压器5的压力侧从瓷陶瓷加热器4接近时，陶瓷保持架2和陶瓷压板5的导热率较大，并且随着陶瓷保持架2的安装面侧的接近而变小。

公开(公告)号：US06811627B2

公开(公告)日：2004-11-02

申请号：US10363693

申请日：2003-03-12

申请人： Yoshiyuki Arai ,  Akira Yamauchi

发明人： Yoshiyuki Arai ,  Akira Yamauchi

IPC分类号： B32B3100

CPC分类号： H01L21/67294 ,  H01L21/67144 ,  H01L21/67248 ,  H01L21/67259 ,  H01L24/75 ,  H05K13/089

摘要： A chip mounting device comprising a first recognition means (3) for recognizing a first recognition mark (5) on the upper chip-retainable head (2) side, a second recognition means (4) for recognizing a second recognition mark (6) on the lower substrate-retainable stage (1) side, a third recognition means (18) for recognizing the recognition marks (5, 6) concurrently when the first recognition mark (5) is brought close to or into contact with the second recognition mark (6), and a temperature detection means (17) attached to the first recognition means (3) or the second recognition means (4), wherein calibration is carried out based on the recognition of the recognition marks when the temperature detection means (17) detects a beyond-allowance temperature change, whereby permitting a high-accuracy, efficient calibration independently of mechanical deformation and temperature change in environmental atmosphere.

摘要翻译： 一种芯片安装装置，包括用于识别上部可芯片保持头部（2）侧的第一识别标记（5）的第一识别装置（3），用于识别第二识别标记（6）的第二识别装置 下基板保持级（1）侧，第三识别装置（18），用于当第一识别标记（5）靠近或接触第二识别标记时同时识别识别标记（5,6） 6），以及安装在第一识别装置（3）或第二识别装置（4）上的温度检测装置（17），其中当温度检测装置（17）基于识别标记的识别执行校准， 检测超出容限的温度变化，从而独立于环境气氛中的机械变形和温度变化，允许高精度，高效的校准。

公开(公告)号：US07341877B2

公开(公告)日：2008-03-11

申请号：US11016720

申请日：2004-12-21

申请人： Akira Yamauchi ,  Yoshiyuki Arai

发明人： Akira Yamauchi ,  Yoshiyuki Arai

IPC分类号： H01L21/66

CPC分类号： H01L21/67294 ,  H01L21/67144 ,  H01L22/20 ,  H01L23/544 ,  H01L2223/54473 ,  H01L2924/0002 ,  H05K13/08 ,  H05K13/089 ,  Y10T29/53178 ,  H01L2924/00

摘要： A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

摘要翻译： 一种在芯片安装装置中精确校准标记识别装置的移动控制系统的方法，包括以下步骤：识别放置在平台（26）上的头部（2）和第二识别标记（13）上的第一识别标记 ），用于校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数; 并且当头部（2）降低以将第一识别标记定位到第二识别标记（13）时，当两场识别装置（7）被移回时，用第三识别装置（20）识别两个标记，以便 校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数。

公开(公告)号：US20050104230A1

公开(公告)日：2005-05-19

申请号：US11016720

申请日：2004-12-21

申请人： Akira Yamauchi ,  Yoshiyuki Arai

发明人： Akira Yamauchi ,  Yoshiyuki Arai

IPC分类号： H01L21/00 ,  H01L21/66 ,  H01L23/544 ,  H05K13/00 ,  H05K13/08

CPC分类号： H01L21/67294 ,  H01L21/67144 ,  H01L22/20 ,  H01L23/544 ,  H01L2223/54473 ,  H01L2924/0002 ,  H05K13/08 ,  H05K13/089 ,  Y10T29/53178 ,  H01L2924/00

摘要： A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

摘要翻译： 一种在芯片安装装置中精确校准标记识别装置的移动控制系统的方法，包括以下步骤：识别放置在平台（26）上的头部（2）和第二识别标记（13）上的第一识别标记 ），用于校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数; 并且当头部（2）降低以将第一识别标记定位到第二识别标记（13）时，当两场识别装置（7）被移回时，用第三识别装置（20）识别两个标记，以便 校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数。

公开(公告)号：US06892447B1

公开(公告)日：2005-05-17

申请号：US10416452

申请日：2000-11-14

申请人： Akira Yamauchi ,  Yoshiyuki Arai

发明人： Akira Yamauchi ,  Yoshiyuki Arai

IPC分类号： H01L21/00 ,  H01L21/66 ,  H01L23/544 ,  H05K13/00 ,  H05K13/08 ,  H01R43/00

CPC分类号： H01L21/67294 ,  H01L21/67144 ,  H01L22/20 ,  H01L23/544 ,  H01L2223/54473 ,  H01L2924/0002 ,  H05K13/08 ,  H05K13/089 ,  Y10T29/53178 ,  H01L2924/00

摘要： A method accurately calibrating a movement control system of mark recognition in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

摘要翻译： 一种在芯片安装装置中精确校准标记识别的移动控制系统的方法，包括以下步骤：识别放置在平台（26）上的头部（2）和第二识别标记（13）上的第一识别标记， 双场识别装置（7），用于校准和更新输入到两场识别装置（7）的运动控制系统的先前控制参数; 并且当头部（2）降低以将第一识别标记定位到第二识别标记（13）时，当两场识别装置（7）被移回时，用第三识别装置（20）识别两个标记，以便 校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数。

公开(公告)号：US20140048805A1

公开(公告)日：2014-02-20

申请号：US13982697

申请日：2012-01-30

申请人： Tadatomo Suga ,  Akira Yamauchi ,  Ryuichi Kondou

发明人： Tadatomo Suga ,  Akira Yamauchi ,  Ryuichi Kondou

IPC分类号： H01L21/322 ,  H01L29/04 ,  H01L29/36 ,  H01L21/263

CPC分类号： H01L21/3221 ,  B23K1/20 ,  B23K20/24 ,  B23K2101/36 ,  H01J37/317 ,  H01J2237/202 ,  H01J2237/3165 ,  H01L21/02046 ,  H01L21/2007 ,  H01L21/263 ,  H01L21/302 ,  H01L21/67092 ,  H01L21/67115 ,  H01L21/76251 ,  H01L29/04 ,  H01L29/36

摘要： [Problem] To provide a substrate bonding technique having a wide range of application. [Solution] A silicon thin film is formed on a bonding surface, and the interface with the substrate is surface-treated using energetic particles/metal particles.

公开(公告)号：US08580743B2

公开(公告)日：2013-11-12

申请号：US13591366

申请日：2012-08-22

申请人： Nozomu Nishi ,  Mitsuomi Hirashima ,  Akira Yamauchi ,  Aiko Ito

发明人： Nozomu Nishi ,  Mitsuomi Hirashima ,  Akira Yamauchi ,  Aiko Ito

IPC分类号： A61K38/00 ,  A61K35/02 ,  A61K35/04 ,  C07K14/00 ,  C12P21/00

CPC分类号： C07K14/4726 ,  A61K38/00 ,  A61K48/00 ,  Y02A50/402 ,  Y02A50/406 ,  Y02A50/411 ,  Y02A50/463 ,  Y02A50/471 ,  Y02A50/475 ,  Y02A50/48

摘要： A recombinant galectin 9 (rGal 9) is provided which exhibits an immune system-mediated action and a direct action on tumor cells (i.e., activity of inducing the intercellular adhesion and apoptosis of the tumor cells), thereby potent in inducing the inhibition of cancer metastasis and reduction. Moreover, the rGal 9 exerts no efficacy on non-activated lymphocytes but can induce apoptosis in activated T cells, in particular, CD4-positive T cells causing an excessive immune response.

摘要翻译： 提供了重组galectin 9（rGal 9），其表现出免疫系统介导的作用和对肿瘤细胞的直接作用（即，诱导肿瘤细胞的细胞间粘附和凋亡的活性），从而有效诱导癌症的抑制 转移和还原。 此外，rGal9对非活化淋巴细胞没有效力，但可以诱导活化的T细胞，特别是导致过度免疫应答的CD4阳性T细胞的细胞凋亡。

公开(公告)号：US20120127485A1

公开(公告)日：2012-05-24

申请号：US13386788

申请日：2010-03-09

申请人： Akira Yamauchi

发明人： Akira Yamauchi

IPC分类号： G01B11/14

CPC分类号： H01L24/75 ,  G01B11/14 ,  H01L23/544 ,  H01L24/81 ,  H01L24/83 ,  H01L2224/131 ,  H01L2224/13124 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/75 ,  H01L2224/75301 ,  H01L2224/757 ,  H01L2224/81009 ,  H01L2224/81121 ,  H01L2224/8113 ,  H01L2224/81132 ,  H01L2224/81191 ,  H01L2224/81204 ,  H01L2224/81801 ,  H01L2224/83121 ,  H01L2924/0001 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0107 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/181 ,  H05K1/0269 ,  H05K3/303 ,  H05K2201/09918 ,  H05K2203/166 ,  Y02P70/613 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2224/13099 ,  H01L2924/00

摘要： A pressure application technique is provided that enables two objects to be pressurized (e.g., objects to be bonded) to be positioned with greater accuracy before having pressure applied thereto. The objects to be pressurized are moved relative to each other in a Z direction such that the objects are brought into contact with each other (step S13). Then, a horizontal positional shift ΔD between the objects to be pressurized is measured in the contact state of the objects to be pressurized (step S14). Thereafter, positioning of the objects to be pressurized is again performed by moving the objects to be pressurized relative to each other in the horizontal direction, as a result of which the positional shift ΔD is corrected (step S17).

摘要翻译： 提供了一种压力施加技术，其能够在施加压力之前使两个物体被加压（例如，待粘合的物体）以更高的准确度定位。 要加压的物体在Z方向上彼此相对移动，使得物体彼此接触（步骤S13）。 然后，在待加压物体的接触状态下测量待加压物体之间的水平位置移动量Dgr; D（步骤S14）。 此后，通过在水平方向上相对于彼此移动要加压的物体来再次执行要加压的物体的定位，结果校正位置偏移＆Dgr; D（步骤S17）。

公开(公告)号：US20100330092A1

公开(公告)日：2010-12-30

申请号：US12668201

申请日：2008-07-08

申请人： Shoichi Naito ,  Junji Onoda ,  Akira Yamauchi ,  Yoshito Numata ,  Junji Kishono

发明人： Shoichi Naito ,  Junji Onoda ,  Akira Yamauchi ,  Yoshito Numata ,  Junji Kishono

IPC分类号： A61K39/395 ,  C07K16/40 ,  C12N5/16 ,  G01N33/573 ,  C12N9/99

CPC分类号： G01N33/573 ,  C07K16/40 ,  C07K2317/76 ,  G01N2333/8146

摘要： A neutralizing monoclonal antibody specifically reacting with MMP13, a method of neutralizing enzyme activity of MMP13 and an immunological measuring method each using the antibody, as well as a diagnostic agent and a pharmaceutical composition containing the antibody, are provided. Various antibodies to MMP13 have been hitherto obtained, but an antibody having neutralizing activity against MMP13 has not been obtained. The present inventors intensively studied, as a result, found out a neutralizing antibody having specificity for MMP13, resulting in completion of the present invention.

摘要翻译： 提供了与MMP13特异性反应的中和单克隆抗体，中和MMP13的酶活性的方法和各自使用该抗体的免疫学测定方法，以及含有该抗体的诊断剂和药物组合物。 迄今为止已经获得了MMP13的各种抗体，但是尚未获得具有针对MMP13的中和活性的抗体。 本发明人深入研究了结果，发现了对MMP13具有特异性的中和抗体，从而完成了本发明。