Pusher assemblies for use in microfeature device testing, systems with pusher assemblies, and methods for using such pusher assemblies
    1.
    发明申请
    Pusher assemblies for use in microfeature device testing, systems with pusher assemblies, and methods for using such pusher assemblies 失效
    用于微特征装置测试的推动器组件,具有推动器组件的系统以及使用这种推动器组件的方法

    公开(公告)号:US20070216437A1

    公开(公告)日:2007-09-20

    申请号:US11374850

    申请日:2006-03-14

    IPC分类号: G01R31/26

    CPC分类号: G01R31/2893 G01R1/0441

    摘要: Pusher assemblies for use in microelectronic device testing systems and methods for using such pusher assemblies are disclosed herein. One particular embodiment of such a pusher assembly comprises a plate having a first side and a second side opposite the first side. An engagement assembly is removably coupled to the second side of the plate and positioned to contact a microfeature device being tested. The pusher assembly can include an urging member proximate the first side of the plate and configured to move the engagement assembly toward the device being tested. The pusher assembly can also include a heat transfer unit carried by the first side of the plate. In several embodiments, the pusher assembly can further include a plurality of pins carried by the engagement assembly such that the pins extend through the plate and engage the urging member to restrict axial movement of the urging member toward the device being tested.

    摘要翻译: 用于微电子器件测试系统的推动器组件和用于使用这种推动器组件的方法在此公开。 这种推动器组件的一个具体实施例包括具有与第一侧相对的第一侧和第二侧的板。 接合组件可移除地联接到板的第二侧并且定位成接触被测试的微型特征装置。 推动器组件可以包括邻近板的第一侧的推动构件,并且构造成使接合组件朝向被测试的装置移动。 推动器组件还可以包括由板的第一侧承载的传热单元。 在几个实施例中,推动器组件还可以包括由接合组件承载的多个销,使得销延伸穿过板并接合推动构件以限制推动构件朝着被测试装置的轴向运动。