公开(公告)号：US5908281A

公开(公告)日：1999-06-01

申请号：US716943

申请日：1996-09-20

Applicant: Christopher Kiley

Inventor： Christopher Kiley

IPC: B25J9/06 ,  B25J9/10 ,  B65G49/07 ,  H01L21/677 ,  H01L21/687 ,  B25J18/00

CPC classification number: B25J9/106 ,  H01L21/67781 ,  H01L21/68707 ,  Y10T74/20323

Abstract: An transfer device for moving substrates from one position to another comprises a base and a drive arm pivotally connected to one another about a first pivot axis. A drive is connected to the drive arm for moving the drive arm through an arc about the first pivot axis. The drive arm has a free end which has a second pivot axis disposed parallel to the first pivot axis. The drive arm free end further including at least one article handling element which is rotatably disposed about the second pivot axis. A belt rotatably couples the at least one article handling element to the base such that upon movement of the drive arm through the arc in a first rotary direction the at least one article handling element is rotated in the other opposite direction to move a substrate along a straight line path.

Abstract translation: 用于将基板从一个位置移动到另一个位置的转移装置包括基部和围绕第一枢轴彼此枢转地连接的驱动臂。 驱动器连接到驱动臂，用于使驱动臂通过围绕第一枢转轴线的弧线移动。 驱动臂具有自由端，该自由端具有平行于第一枢轴线设置的第二枢转轴线。 驱动臂自由端还包括至少一个物品处理元件，该物品处理元件围绕第二枢转轴线可旋转地设置。 皮带可旋转地将所述至少一个物品处理元件连接到所述基座，使得当所述驱动臂沿第一旋转方向移动通过所述弧时，所述至少一个物品处理元件在另一相反方向上旋转以使基板沿着 直线路径。

公开(公告)号：US20070269297A1

公开(公告)日：2007-11-22

申请号：US11679829

申请日：2007-02-27

Applicant: Peter Meulen ,  Christopher Kiley ,  Patrick Pannese ,  Raymond Ritter ,  Thomas Schaefer

Inventor： Peter Meulen ,  Christopher Kiley ,  Patrick Pannese ,  Raymond Ritter ,  Thomas Schaefer

IPC: B65G65/00

CPC classification number: B65G25/02 ,  B65G37/00 ,  H01L21/67161 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  H01L21/68792 ,  Y10S414/139

Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Abstract translation: 模块化晶片输送和处理设备以各种方式组合，在真空半导体处理系统中提供更高水平的灵活性，效用，效率和功能。 各种加工和其他模块可以与隧道和车辆运输系统相互连接，以延长真空环境的距离和通用性。 引入诸如旁路热调节器，缓冲对准器，批处理，多功能模块，低粒子通风口，集束处理单元等的其它改进以扩展功能并提高处理效率。

公开(公告)号：US20070285673A1

公开(公告)日：2007-12-13

申请号：US11682306

申请日：2007-03-05

Applicant: Christopher Kiley ,  Peter van der Meulen ,  Forest Buzan ,  Paul Fogel

Inventor： Christopher Kiley ,  Peter van der Meulen ,  Forest Buzan ,  Paul Fogel

IPC: G01B11/14

CPC classification number: H01L21/67265 ,  B65G25/02 ,  B65G37/00 ,  H01L21/67161 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  H01L21/68792 ,  Y10S414/129 ,  Y10S414/136

Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

Abstract translation: 本文公开了一些改进在半导体制造中使用的现有技术的晶片中心发现方法和系统。

公开(公告)号：US20070286710A1

公开(公告)日：2007-12-13

申请号：US11681978

申请日：2007-03-05

Applicant: Peter van der Meulen ,  Christopher Kiley ,  Patrick Pannese

Inventor： Peter van der Meulen ,  Christopher Kiley ,  Patrick Pannese

IPC: H01L21/677

CPC classification number: H01L21/67748 ,  B65G25/02 ,  B65G37/00 ,  H01L21/67161 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67772 ,  H01L21/68792

Abstract: A variety of process modules are described for use in semiconductor manufacturing processes.

Abstract translation: 描述了用于半导体制造工艺的各种工艺模块。