公开(公告)号：US06282958B1

公开(公告)日：2001-09-04

申请号：US09417105

申请日：1999-10-13

申请人： Christopher P Fell ,  Kevin Townsend ,  Ian D Hopkin

发明人： Christopher P Fell ,  Kevin Townsend ,  Ian D Hopkin

IPC分类号： G01P904

CPC分类号： G01C19/5684

摘要： An angular rate sensor or gyro includes a ring-like resonator (1) mounted by support beams (2) extending from the inner periphery of the ring (1) to a boss (4) on a base (3). The support beams (2) are flexible and allow the resonator (1) to vibrate in response to an electrostatic drive (6, 8) in a substantially undamped oscillation mode to permit the resonator to move relative to the support in response to turning rate. The support beams (2) and resonator (1) are made from crystalline silicon. Electrostatic sensors (7, 9) are provided for sensing movement of the resonator (1). The drive (6, 8) and sensors (7, 9) have plate-like elements made from crystalline silicon having surfaces located substantially normal to the plane of the resonator (1) at a spacing from the adjacent outer periphery of the resonator (1). The ratio of the thickness of the resonator (1) at the outer periphery (1b) to the width of the spacing (11) between the periphery (1b) and the element surfaces (10) is in the range of from 10:1 to 40:1.

摘要翻译： 角速率传感器或陀螺仪包括由从环（1）的内周延伸到基座（3）上的凸台（4）的支撑梁（2）安装的环形谐振器（1）。 支撑梁（2）是柔性的，并且允许谐振器（1）响应于基本无阻尼的振荡模式中的静电驱动（6,8）振动，以允许谐振器响应于转速而相对于支撑件移动。 支撑梁（2）和谐振器（1）由晶体硅制成。 静电传感器（7,9）用于感测谐振器（1）的移动。 驱动器（6,8）和传感器（7,9）具有由晶体硅制成的板状元件，其具有基本上垂直于谐振器（1）的平面的表面，其间隔与谐振器（1）的相邻外周隔开 ）。 在外周（1b）处的谐振器（1）的厚度与周边（1b）和元件表面（10）之间的间隔（11）的宽度的比率在10:1至 40：1。

公开(公告)号：US06631643B2

公开(公告)日：2003-10-14

申请号：US10169499

申请日：2002-07-03

申请人： Alan R Malvern ,  Ian D Hopkin ,  Kevin Townsend ,  Nicolaas F Derooij

发明人： Alan R Malvern ,  Ian D Hopkin ,  Kevin Townsend ,  Nicolaas F Derooij

IPC分类号： G01P15125

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P15/132 ,  G01P2015/0814

摘要： The accelerometer is linear having a substantially planar plate-like proof mass (9) mounted by four or more flexible mounting legs (8) each co-planar with the proof mass (9) to a substantially planar plate-like support (10) fixedly mounted relative to the proof mass (9) and co-planar therewith. In this way the proof mass (9) is mounted for linear movement in a sensing direction in the plane containing the proof mass (9), mounting legs (8) and support (10) to sense acceleration change applied to the accelerometer. At least two spaced apart substantially planar capacitor plates (11) each co-planar with the proof mass, mounting legs and support, are provided for sensing linear movement of the proof mass (9) in the sensing direction C. The proof mass (9), mounting legs (8), support (10) and capacitor blades (11) are formed from a single sheet of silicon and the mounting legs (8) extend substantially perpendicularly to the sensing direction C. Restoring means are provided for returning the proof mass (9) in the sensing direction C towards a null position.

摘要翻译： 加速度计是线性的，其具有由四个或更多个柔性安装腿（ 8 ）安装的基本上平面的板状证明块（ 9 PDAT>）与检测质量（ 9 ）共平面到基本平面的板状支撑体（ 10 ）相对于检验质量块（ 9 ）固定安装并与其共面。 以这种方式，安装检测质量（ 9 ）以在包含检测质量的平面（ 9 ）的感测方向上线性移动， ），安装腿（ 8 ）并支持（ 10 ）以检测应用于加速度计的加速度变化。 提供与校验质量块，安装腿和支撑件共面的至少两个间隔开的大致平面的电容器板（ 11 ），用于检测校准质量块的线性运动 感测方向C上的 9 ）。校验质量（ 9 ），安装腿（ 8 ），支持（ 10 ）和电容器刀片（ 11 ）由 单片硅和安装腿（ 8 ）基本上垂直于感测方向C延伸。提供恢复装置用于使检测质量（ 9 ）在感测方向C朝向零位置。

公开(公告)号：US06471883B1

公开(公告)日：2002-10-29

申请号：US09468838

申请日：1999-12-22

申请人： Christopher P Fell ,  Kevin Townsend ,  Ian Sturland

发明人： Christopher P Fell ,  Kevin Townsend ,  Ian Sturland

IPC分类号： G01C1956

CPC分类号： G01C19/5684

摘要： A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

摘要翻译： 具有硅基本上平面的环形振动结构（1）的振动结构陀螺仪（1）用于赋予振动结构（1）的驱动运动和感测振动结构（1）运动的电容性装置，以及围绕电容装置的屏蔽层（15），通过沉积光致抗蚀剂材料 （9）上的玻璃或硅衬底（7）上，硬化，图案化和显影所述光致抗蚀剂（9）以暴露所述衬底（7）的区域，蚀刻所述暴露的区域以在其中形成空腔（10），剥离任何剩余的光致抗蚀剂材料 （9）将硅层（8）附着到所述空化衬底（7）上，在所述硅层（8）上沉积铝层，在所述铝层上沉积光致抗蚀剂材料，硬化，图案化和显影所述光致抗蚀剂层以暴露 铝层，蚀刻铝层的暴露区域以在硅层上留下铝的区域，提供接合焊盘（11,12,13和14），从其中剥离剩余的光致抗蚀剂 光致抗蚀剂材料沉积在剩余的沉积铝层区域上的硅层（8）上的另一层光致抗蚀剂材料，硬化，图案化和显影该光致抗蚀剂材料层以暴露硅层（8）的区域和深反应离子蚀刻 所述硅层（8）的暴露区域从其形成由所述空腔（10）上方的毂（4）安装的所述基本上平面的环形振动结构（1）。

公开(公告)号：US06805007B2

公开(公告)日：2004-10-19

申请号：US10181765

申请日：2002-07-23

申请人： Christopher P Fell ,  Kevin Townsend

发明人： Christopher P Fell ,  Kevin Townsend

IPC分类号： G01C1900

CPC分类号： G01C19/5677 ,  G01C19/5691

摘要： A vibrating structure gyroscope comprises a resonant body, a drive transducer for driving resonant motion of the body, a pick-off for producing signals representative of the resonant motion, and a signal processor for extracting z-axis orientation information and x- and y-axis rate information from the signals. The resonant body is planar and the resonant motion takes place in a vibration mode pattern whose orientation angle with respect to the body varies in accordance with z-axis orientation of the body and couples energy into an out-of-plane response mode motion in accordance with rotation of the body about the x- or y-axis. The signal processor resolves the out-of-plane response mode motion with reference to a z-axis orientation signal to extract the x- and y-axis rate information.

摘要翻译： 振动结构陀螺仪包括谐振体，用于驱动身体的共振运动的驱动换能器，用于产生表示谐振运动的信号的拾取器，以及用于提取z轴取向信息和x轴和y轴的信号处理器， 来自信号的轴速率信息。 谐振体是平面的，并且谐振运动发生在振动模式图案中，其相对于身体的取向角根据身体的z轴取向而变化，并且将能量依次转换成平面外的响应模式运动 使身体绕x轴或y轴旋转。 信号处理器参照z轴取向信号来解决平面外的响应模式运动，以提取x轴和y轴速率信息。

公开(公告)号：US06651499B2

公开(公告)日：2003-11-25

申请号：US10221777

申请日：2002-09-17

申请人： Christopher P Fell ,  Kevin Townsend

发明人： Christopher P Fell ,  Kevin Townsend

IPC分类号： G01C1900

CPC分类号： G01C19/567

摘要： A vibrating structure gyroscope having a vibrating structure (3) primary drive means (4) and secondary drive means (7) and primary pick-off means (2) an secondary pick-off means (6) is provided with a control system. The control system includes a primary closed control loop (1) for controllably varying the drive signal applied to the primary drive means (4), a secondary closed control loop (5) for controllably varying the drive signal applied to the secondary drive means (7) in order to maintain a null value of the secondary pick-off means (6) and means (30) for actively adjusting the scalefactor in the primary and secondary closed control loops (1, 5). The means (30) includes means (34) for dividing a rate response signal from the loop (5) by a signal indicative of the amplitude of the primary mode vibration. The output form the means (34) is filtered to provide an applied rate output. A variable scalefactor loop (3) uses the output from the means (34) actively to adjust a reference voltage set level of loop (1) to adjust the in loop scalefactor of the system.

摘要翻译： 具有振动结构（3）的振动结构陀螺仪具有主驱动装置（4）和辅助驱动装置（7）以及辅助拾取装置（2），辅助输送装置（6）设置有控制系统。 控制系统包括用于可控地改变施加到主驱动装置（4）的驱动信号的主闭合控制回路（1），用于可控地改变施加到次驱动装置（7）的驱动信号的次闭合控制回路（5） ），以便保持次级拾取装置（6）的零值和用于主动调节主和次级闭合控制回路（1,5）中的比例因子的装置（30）。 装置（30）包括用于将来自环路（5）的速率响应信号除以指示主模式振动幅度的信号的装置（34）。 过滤装置（34）的输出以提供施加的速率输出。 可变比例因子环（3）主动地使用装置（34）的输出来调整环路（1）的参考电压设置电平以调整系统的环路比例因子。

公开(公告)号：US07637156B2

公开(公告)日：2009-12-29

申请号：US11571974

申请日：2005-07-12

申请人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher P. Fell ,  Kevin Townsend ,  Ian Sturland

发明人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher P. Fell ,  Kevin Townsend ,  Ian Sturland

IPC分类号： G01P9/04

CPC分类号： G01C19/5684

摘要： A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.

摘要翻译： 通过MEMS技术形成在硅晶片1中的振动器10具有支撑在中心部分11处并在径向方向上延伸并且相互保持相同角度的八个梁部分（梁）12，并且具有环形部分13 连接到八个光束部分12.在环部分13的外部，用于静电致动，电容检测等的八个电极21a至21h与在环部分13和电极21a至21h之间产生的间隙22均匀地间隔开。 在环部13内部，用于频率调节的十六个电极23与在环部13和电极23之间形成的间隙24均匀地间隔开。

公开(公告)号：US07219529B2

公开(公告)日：2007-05-22

申请号：US10523398

申请日：2003-11-12

申请人： Christopher P Fell ,  Kevin Townsend ,  Andrew Kazar

发明人： Christopher P Fell ,  Kevin Townsend ,  Andrew Kazar

IPC分类号： G01C25/00

CPC分类号： G01C19/567

摘要： Apparatus for measuring variation in scalefactor from a predetermined value for a vibrating structure gyroscope has a vibrating structure (R), fixed primary and fixed secondary drives (1, 13) for putting and maintaining the vibrating structure (R) in vibrating resonance, fixed primary and fixed secondary pick offs (2, 6) for detecting vibration of the vibrating structure (R), with the drives and pick offs (1, 13, 2, 6) being located radially around the vibrating structure (R), quadrature component and real component loop systems (7, 8), automatic gain control and phase locked loop systems (5, 22), a sin/cos pick off resolver (38) for receiving signals from the primary and secondary pick offs (2, 6) and for outputting signals to the quadrature component and real component loop systems (7, 8) and to the automatic gain control and phase locked loop systems (5, 22), a sin/cos drive resolver (37) for receiving output signals from the quadrature component and real component loop systems (7, 8) and from the automatic gain control and phase locked loop systems (5, 22) and for feeding control signals to the primary and secondary drives (1, 13), and an angular displacement control (40) for feeding angular displacement control signals to the sin/cos drive and pick off resolvers (38, 37) to control uniform displacement of the resolved carrier and response mode drives and pick offs axes angularly around the vibrating structure (R), with respect to a central axis of the vibrating structure, at a known rate.

摘要翻译： 用于根据振动结构陀螺仪的预定值测量比例因子的变化的装置具有振动结构（R），用于将振动结构（R）放置和保持在振动共振中的固定的初级和固定次级驱动装置（1,13），固定的初级 以及用于检测所述振动结构（R）的振动的固定次级拾取（2,6），所述驱动和拾取（1,13,2,6）位于所述振动结构（R）的径向周围，正交分量和 实际组件环路系统（7,8），自动增益控制和锁相环系统（5,22），用于接收来自主和次级拾取（2,6）的信号的sin / cos拾取旋转变压器（38）和 用于将信号输出到正交分量和实部环路系统（7,8）和自动增益控制和锁相环系统（5,22）; sin / cos驱动解算器（37），用于接收来自正交的输出信号 组件和实际组合 nt环路系统（7,8）以及来自自动增益控制和锁相环系统（5,22）并且用于将控制信号馈送到主驱动器（1）和辅助驱动器（1,13）的角位移控制（40） 将角位移控制信号馈送到sin / cos驱动器并拾取分解器（38,37），以控制分辨的载体和响应模式的均匀位移驱动和拾取轴围绕振动结构（R）围绕中心 振动结构的轴线。

公开(公告)号：US09234907B2

公开(公告)日：2016-01-12

申请号：US13698342

申请日：2011-05-19

申请人： Michael Durston ,  Kevin Townsend ,  Christopher Paul Fell

发明人： Michael Durston ,  Kevin Townsend ,  Christopher Paul Fell

IPC分类号： G01P3/44 ,  G01C19/567 ,  G01C19/5628 ,  G01C19/5733

CPC分类号： G01P3/44 ,  G01C19/567 ,  G01C19/5677

摘要： An angular velocity sensor is described with improved ageing and hysteresis properties. The sensor may be of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The gain of the primary pickoff signal and the capacitance of the primary portions of the sensor are controlled relative to the gain of the secondary pickoff and the capacitance of the secondary portions of the sensor. Control electronics is provided that enables matching of the relative signals from the respective channels. In this way, temperature hysteresis and ageing effects of materials used in forming the sensor are overcome.

摘要翻译： 描述了具有改进的老化和滞后特性的角速度传感器。 传感器可以是由驱动器电路驱动的环形，传感器还包括具有对应的信号检测的主要和次要部分。 主传感器的主要部分的增益和传感器的主要部分的电容相对于传感器的次级传感器的增益和传感器次级部分的电容进行控制。 提供控制电子装置，其能够匹配来自相应通道的相对信号。 以这种方式克服了用于形成传感器的材料的温度滞后和老化效应。

公开(公告)号：US09176158B2

公开(公告)日：2015-11-03

申请号：US13580616

申请日：2011-03-03

申请人： Kevin Townsend ,  Michael Durston ,  Douglas Robert Sitch

发明人： Kevin Townsend ,  Michael Durston ,  Douglas Robert Sitch

IPC分类号： G01C19/56 ,  G01P3/14 ,  G01C19/5684

CPC分类号： G01P3/14 ,  G01C19/5684

摘要： An inertial sensor is described that has a commanded test function. The sensor is of a ring type driven by a driver circuit, the sensor further includes primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The commanded test function includes a signal derived from the primary portion of the circuit and input into the two inputs of a differential amplifier in the secondary pickoff detector circuit.

摘要翻译： 描述了具有指令测试功能的惯性传感器。 该传感器是由驱动电路驱动的环型，该传感器还包括具有相应信号检测的主要和次要部分。 通过自动增益控制来控制主要的检测信号幅度，主锁相环和VCO锁定到谐振频率以提供同步检波器的时钟，通过主相移电路的初级检测信号被提供给主驱动器 ，次级检测信号被输入到能够检测传感器中的运动的检测器电路。 命令测试功能包括从电路的主要部分导出并输入到次级检测电路中的差分放大器的两个输入的信号。

公开(公告)号：US20130233074A1

公开(公告)日：2013-09-12

申请号：US13698342

申请日：2011-05-19

申请人： Michael Durston ,  Kevin Townsend ,  Christopher Paul Fell

发明人： Michael Durston ,  Kevin Townsend ,  Christopher Paul Fell

IPC分类号： G01P3/44

CPC分类号： G01P3/44 ,  G01C19/567 ,  G01C19/5677

摘要： An angular velocity sensor is described with improved ageing and hysteresis properties. The sensor may be of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The gain of the primary pickoff signal and the capacitance of the primary portions of the sensor are controlled relative to the gain of the secondary pickoff and the capacitance of the secondary portions of the sensor. Control electronics is provided that enables matching of the relative signals from the respective channels. In this way, temperature hysteresis and ageing effects of materials used in forming the sensor are overcome.

摘要翻译： 描述了具有改进的老化和滞后特性的角速度传感器。 传感器可以是由驱动器电路驱动的环形，传感器还包括具有对应的信号检测的主要和次要部分。 主传感器的主要部分的增益和传感器的主要部分的电容相对于传感器的次级传感器的增益和传感器次级部分的电容进行控制。 提供控制电子装置，其能够匹配来自相应通道的相对信号。 以这种方式克服了用于形成传感器的材料的温度滞后和老化效应。