公开(公告)号：US08035820B2

公开(公告)日：2011-10-11

申请号：US12837419

申请日：2010-07-15

Applicant: Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

Inventor： Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

IPC: G01B11/02

CPC classification number: G01B11/161

Abstract: A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed.

Abstract translation: 公开了一种用于面外位移检测的方法。 通过分析使用从不同频率振动的样本的一系列干涉图像提取的频域信息计算出的所有边缘密度指数来检测面外位移。 本发明还公开了一种通过检测在不同扫描频率下计算出的所有条纹指数的峰值的方法和装置，用于共振频率识别。 利用所识别的共振频率，可以重建样品在各种谐振模式下的全场振动表面轮廓。

公开(公告)号：US20050062981A1

公开(公告)日：2005-03-24

申请号：US10935172

申请日：2004-09-08

Applicant: Ching-Fen Kao ,  Chung-Chu Chang ,  Ching-Fang Lin

Inventor： Ching-Fen Kao ,  Chung-Chu Chang ,  Ching-Fang Lin

IPC: G01B9/02

CPC classification number: G01B9/02027 ,  G01B2290/30 ,  G01B2290/70

Abstract: An apparatus for measuring a two-dimensional displacement is disclosed and includes a laser light source, a collimator lens, a beam splitter, a plurality of staggered conjugate optic lens and a plurality of interference optical dephasing modules. The laser light source provides a laser light incident on the collimator lens to generate collimated laser beams. Each of the collimated laser beams are incident on the beam splitter to be separated into two incident beams and incident on a two-dimensional diffraction unit to generate a plurality of first diffracted beams and a plurality of second-order diffracted beams. The staggered conjugate optic lens are used to reflect the first diffracted beams so that the first diffracted beams return to the two-dimensional diffraction unit to generate a plurality of second diffracted beams where the second diffracted beams and the second-order diffracted beams generated as a result of the first diffraction of the beams stagger.

Abstract translation: 公开了一种用于测量二维位移的装置，包括激光源，准直透镜，分束器，多个交错共轭光学透镜和多个干涉光学去相位模块。 激光源提供入射在准直透镜上的激光以产生准直激光束。 每个准直激光束入射到分束器上，以分离成两个入射光束并入射到二维衍射单元上，以产生多个第一衍射光束和多个二次衍射光束。 交错共轭光学透镜用于反射第一衍射光束，使得第一衍射光束返回到二维衍射单元以产生多个第二衍射光束，其中第二衍射光束和二阶衍射光束作为 梁的第一次衍射的结果交错。

公开(公告)号：US08237933B2

公开(公告)日：2012-08-07

申请号：US13177168

申请日：2011-07-06

Applicant: Jin-Liang Chen ,  Shih-Hsuan Kuo ,  Chung-Chu Chang

Inventor： Jin-Liang Chen ,  Shih-Hsuan Kuo ,  Chung-Chu Chang

IPC: G01B11/02

CPC classification number: G01B9/02072 ,  G01B9/02057 ,  G01B11/2441 ,  G01B21/042

Abstract: The present invention relates to a method for image calibration and an apparatus for image acquiring. In the method for image calibration, the image formation position for an image acquiring unit of the apparatus is calibrated according to the relative location of the image acquiring unit to a objective lens of the apparatus, wherein the relative location is determined by calculating the focus index of the image acquired by the image acquiring unit so that a clear and sharp interferogram can be obtained for three dimensional surface profile measuring. In addition, it is possible to obtain a clear and sharp image without any interference fringe outside the coherent range by adjusting the image formation position, which is capable of being utilized for two dimensional defect detection and dimension measurement.

Abstract translation: 本发明涉及图像校准方法和图像采集装置。 在图像校准方法中，根据图像获取单元与装置的物镜的相对位置对装置的图像获取单元的图像形成位置进行校准，其中通过计算焦点指数来确定相对位置 由图像获取单元获取的图像，以便可以获得三维表面轮廓测量的清晰和锐利的干涉图。 此外，通过调整能够用于二维缺陷检测和尺寸测量的图像形成位置，可以获得清晰而清晰的图像，在相干范围外没有任何干涉条纹。

公开(公告)号：US08005290B2

公开(公告)日：2011-08-23

申请号：US12058926

申请日：2008-03-31

Applicant: Jin-Liang Chen ,  Shih-Hsuan Kuo ,  Chung-Chu Chang

Inventor： Jin-Liang Chen ,  Shih-Hsuan Kuo ,  Chung-Chu Chang

IPC: G06K9/00

CPC classification number: G01B9/02072 ,  G01B9/02057 ,  G01B11/2441 ,  G01B21/042

Abstract: The present invention relates to a method for image calibration and an apparatus for image acquiring. In the method for image calibration, the image formation position for an image acquiring unit of the apparatus is calibrated according to the relative location of the image acquiring unit to a objective lens of the apparatus, wherein the relative location is determined by calculating the focus index of the image acquired by the image acquiring unit so that a clear and sharp interferogram can be obtained for three dimensional surface profile measuring. In addition, it is possible to obtain a clear and sharp image without any interference fringe outside the coherent range by adjusting the image formation position, which is capable of being utilized for two dimensional defect detection and dimension measurement.

Abstract translation: 本发明涉及图像校准方法和图像采集装置。 在图像校准方法中，根据图像获取单元与装置的物镜的相对位置对装置的图像获取单元的图像形成位置进行校准，其中通过计算焦点指数来确定相对位置 由图像获取单元获取的图像，以便可以获得三维表面轮廓测量的清晰和锐利的干涉图。 此外，通过调整能够用于二维缺陷检测和尺寸测量的图像形成位置，可以获得清晰而清晰的图像，在相干范围外没有任何干涉条纹。

公开(公告)号：US20090030631A1

公开(公告)日：2009-01-29

申请号：US11858442

申请日：2007-09-20

Applicant: Chun Hung Ko ,  Yi Sha Ku ,  Chung Chu Chang

Inventor： Chun Hung Ko ,  Yi Sha Ku ,  Chung Chu Chang

IPC: G06F19/00

CPC classification number: G01N21/47 ,  G01B21/08 ,  G01B21/20 ,  G01N21/211 ,  G01N2201/1296

Abstract: A method for improving the measurement capability of multi-parameter inspection systems includes performing a measuring procedure to acquire a measured signature of a sample, calculating weighting factors representing a correlation between structural parameters of the sample by using a weighting algorithm, transforming the weighting factors into a sampling function by using a transforming rule, updating the measured signature to form an updated measured signature and generating a plurality of updated nominal signatures according to the sampling function, and comparing the updated measured signature and the updated nominal signatures to determine the structural parameters of the sample.

Abstract translation: 一种用于提高多参数检测系统的测量能力的方法，包括执行测量程序以获取样本的测量签名，通过使用加权算法来计算表示样本的结构参数之间的相关性的加权因子，将加权因子转换成 通过使用变换规则的采样函数，更新测量的签名以形成更新的测量签名并根据采样函数生成多个更新的标称签名，以及比较更新的测量签名和更新的标称签名，以确定 例子。

公开(公告)号：US07965394B2

公开(公告)日：2011-06-21

申请号：US12165890

申请日：2008-07-01

Applicant: Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

Inventor： Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

IPC: G01B11/02

CPC classification number: G01M7/022 ,  G01H9/002

Abstract: A method and apparatus for identifying dynamic characteristics of a vibratory object is provided in the present invention, in which a series of dynamic interference images of the vibratory object is acquired through a frequency sweeping procedure and a two-dimensional image scanning procedure. Thereafter, the acquired images are processed for obtaining the corresponding differential fringe density index by signal processing technique of band-pass filtering method so as to further identify the dynamic characteristics of the vibratory object.

Abstract translation: 本发明提供了一种用于识别振动对象的动态特性的方法和装置，其中通过频率扫描程序和二维图像扫描程序获取振动对象的一系列动态干扰图像。 此后，通过带通滤波方法的信号处理技术处理获取的图像以获得相应的差分边缘密度指数，以进一步识别振动对象的动态特性。

公开(公告)号：US20100277744A1

公开(公告)日：2010-11-04

申请号：US12837419

申请日：2010-07-15

Applicant: Liang-Chia CHEN ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

Inventor： Liang-Chia CHEN ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

IPC: G01B11/02

CPC classification number: G01B11/161

Abstract: A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed.

Abstract translation: 公开了一种用于面外位移检测的方法。 通过分析使用从不同频率振动的样本的一系列干涉图像提取的频域信息计算出的所有边缘密度指数来检测面外位移。 本发明还公开了一种通过检测在不同扫描频率下计算出的所有条纹指数的峰值的方法和装置，用于共振频率识别。 利用所识别的共振频率，可以重建样品在各种谐振模式下的全场振动表面轮廓。

公开(公告)号：US07782466B2

公开(公告)日：2010-08-24

申请号：US11987237

申请日：2007-11-28

Applicant: Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

Inventor： Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

IPC: G01B9/02

CPC classification number: G01B11/161

Abstract: A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed.

Abstract translation: 公开了一种用于面外位移检测的方法。 通过分析使用从不同频率振动的样本的一系列干涉图像提取的频域信息计算出的所有边缘密度指数来检测面外位移。 本发明还公开了一种通过检测在不同扫描频率下计算出的所有条纹指数的峰值的方法和装置，用于共振频率识别。 利用所识别的共振频率，可以重建样品在各种谐振模式下的全场振动表面轮廓。

公开(公告)号：US07610170B2

公开(公告)日：2009-10-27

申请号：US11858442

申请日：2007-09-20

Applicant: Chun Hung Ko ,  Yi Sha Kuo ,  Chung Chu Chang

Inventor： Chun Hung Ko ,  Yi Sha Kuo ,  Chung Chu Chang

IPC: G06F19/00

CPC classification number: G01N21/47 ,  G01B21/08 ,  G01B21/20 ,  G01N21/211 ,  G01N2201/1296

Abstract: A method for improving the measurement capability of multi-parameter inspection systems includes performing a measuring procedure to acquire a measured signature of a sample, calculating weighting factors representing a correlation between structural parameters of the sample by using a weighting algorithm, transforming the weighting factors into a sampling function by using a transforming rule, updating the measured signature to form an updated measured signature and generating a plurality of updated nominal signatures according to the sampling function, and comparing the updated measured signature and the updated nominal signatures to determine the structural parameters of the sample.

Abstract translation: 一种用于提高多参数检测系统的测量能力的方法，包括执行测量程序以获取样本的测量签名，通过使用加权算法来计算表示样本的结构参数之间的相关性的加权因子，将加权因子转换成 通过使用变换规则的采样函数，更新测量的签名以形成更新的测量签名并根据采样函数生成多个更新的标称签名，以及比较更新的测量签名和更新的标称签名，以确定 例子。

公开(公告)号：US07536265B2

公开(公告)日：2009-05-19

申请号：US11863914

申请日：2007-09-28

Applicant: Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

Inventor： Liang-Chia Chen ,  Chung-Chu Chang ,  Yao-Ting Huang ,  Jin-Liang Chen

IPC: G01B9/02

CPC classification number: G01B11/2441 ,  G01H9/00

Abstract: The present invention relates to a signal analysis method for vibratory interferometry to identify the vibratory characteristics of an object under test. A vibratory stroboscopic interferometric signal of an object under vibration is obtained. The vibratory stroboscopic interferometric signal is analyzed with a deconvolution operation to obtain a reformed vibratory stroboscopic interferometric signal.

Abstract translation: 本发明涉及一种用于振动干涉测量的信号分析方法，用于识别被测物体的振动特性。 得到振动对象振动频闪干涉信号。 通过去卷积操作分析振动频闪干涉信号，以获得改性的振动频闪干涉信号。