Method of forming a fine pattern
    1.
    发明申请
    Method of forming a fine pattern 失效
    形成精细图案的方法

    公开(公告)号:US20020042203A1

    公开(公告)日:2002-04-11

    申请号:US09938499

    申请日:2001-08-27

    Inventor: Ryuzo Ohmukai

    CPC classification number: C23C14/048

    Abstract: The surface of a substrate having a transmission index is irradiated with a beam of atoms having a slow enough velocity to be adsorbed on the substrate. A laser beam whose frequency is detuned by 1 to 10 gigahertz from the resonant frequency of the atoms is projected onto the substrate at an angle, producing total reflection. The atom beam is reflected at regions at which an intensity of an evanescent wave emitted at this time from the substrate surface is high, and adsorbed at regions where the intensity is low, thereby achieving atomic fabrication patterns on a substrate. By using a hologram image to create the pattern, it is possible to form an atomic fabrication patterns in which the size of features correspond to the diameter of the laser beam, enabling the size to be reduced to the diffraction limit of the laser light.

    Abstract translation: 用具有足够慢的原子的光束照射具有透射率的基板的表面以吸附在基板上。 其频率与原子的共振频率失谐1至10千兆赫兹的激光束以一定角度投影到基板上,产生全反射。 原子光束在此处从衬底表面发射的ev逝波的强度高的区域反射,并且在强度低的区域被吸附,从而在衬底上实现原子制造图案。 通过使用全息图图像来产生图案,可以形成其中特征尺寸对应于激光束的直径的原子制造图案,使得能够将尺寸减小到激光的衍射极限。

    Method of evaluating free-space optical propagation characteristics
    2.
    发明申请
    Method of evaluating free-space optical propagation characteristics 审中-公开
    评估自由空间光传播特性的方法

    公开(公告)号:US20030214645A1

    公开(公告)日:2003-11-20

    申请号:US10437053

    申请日:2003-05-14

    CPC classification number: H04B10/1125

    Abstract: A method of evaluating free-space optical propagation characteristics includes emitting a plurality of laser beams from a corresponding plurality of laser sources, receiving laser beams at different target points, and measuring the time-based spatial fluctuations between the laser beams thus received. The respective distances from the laser sources to each target point are used to normalize the time-based spatial fluctuations. The difference between the normalized spatial positions of the laser beams at the target points is derived and used to obtain the frequency spectrum of time-based fluctuations of the spatial positions.

    Abstract translation: 评估自由空间光传播特性的方法包括从相应的多个激光源发射多个激光束,在不同的目标点处接收激光束,并且测量如此接收的激光束之间的基于时间的空间波动。 使用从激光源到每个目标点的相应距离来归一化基于时间的空间波动。 导出目标点处的激光束的归一化空间位置之间的差异,并用于获得空间位置的基于时间的波动的频谱。

    Modulated light signal processing method and apparatus
    3.
    发明申请
    Modulated light signal processing method and apparatus 审中-公开
    调制光信号处理方法和装置

    公开(公告)号:US20030198477A1

    公开(公告)日:2003-10-23

    申请号:US10348770

    申请日:2003-01-23

    CPC classification number: H04B10/67 H04B10/2575 H04B2210/006

    Abstract: A modulated optical signal processing method and apparatus optically convert an optical signal to an intermediate frequency band that simplifies electrical processing after optical detection, thereby increasing the optical reception sensitivity. Either single-mode light is modulated with a first radio wave overlaid with data, or a modulated optical signal is directly generated, and the optical carrier and optical sideband contained in that modulated optical signal are transmitted, the transmitted optical carrier and optical sideband are input and the input optical carrier and optical sideband are mixed with a radio wave of a predetermined frequency and a combination of an adjacent optical carrier and optical sideband that are closer together than the frequency of the first radiofrequency electrical signal is optically selected from among a frequency-converted or frequency-unconverted optical carrier and optical sideband thus obtained and an electrical signal is detected from this selected optical signal.

    Abstract translation: 调制光信号处理方法和装置将光信号光学地转换为简化光检测后的电处理的中频带,从而提高光接收灵敏度。 单模光被以数据叠加的第一无线电波调制,或者直接产生调制的光信号,并且发送包含在该调制光信号中的光载波和光边带,输入的光载波和光边带被输入 并且将输入光载波和光边带与频率比第一射频电信号的频率更靠近的预定频率的无线电波和相邻的光载波和光边带的组合混合, 转换或频率未转换的光载波和光边带,并从该选择的光信号中检测出电信号。

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