公开(公告)号：US06542219B2

公开(公告)日：2003-04-01

申请号：US10097379

申请日：2002-03-15

申请人： Josephus J. M. Braat ,  Cornelis J. van der Laan

发明人： Josephus J. M. Braat ,  Cornelis J. van der Laan

IPC分类号： G03B2768

CPC分类号： G03F7/70308

摘要： A plate with substantially constant thickness is used to compensate for the residual distortion in the image projected by a high-quality projection lens for lithography. The two surfaces of the plate have an identical aspherical profile, whose shape has been calculated using the measured distortion map of the lithographic objective. The figuring process applied to the plate uses the principle of polishing in the presence of an elastic deformation, so as to achieve the desired aspherical shape on both sides.

公开(公告)号：US06373552B1

公开(公告)日：2002-04-16

申请号：US09484200

申请日：2000-01-18

申请人： Josephus J. M. Braat ,  Cornelis J. van der Laan

发明人： Josephus J. M. Braat ,  Cornelis J. van der Laan

IPC分类号： G03B2768

CPC分类号： G03F7/70308

摘要： A plate with substantially constant thickness is used to compensate for the residual distortion in the image projected by a high-quality projection lens for lithography. The two surfaces of the plate have an identical aspherical profile, whose shape has been calculated using the measured distortion map of the lithographic objective. The figuring process applied to the plate uses the principle of polishing in the presence of an elastic deformation, so as to achieve the desired aspherical shape on both sides.

摘要翻译： 使用具有基本恒定厚度的板来补偿由用于光刻的高质量投影透镜投射的图像中的残余变形。 板的两个表面具有相同的非球面轮廓，其形状已经使用光刻物镜的测量失真图进行了计算。 应用于板的成形工艺在弹性变形的存在下使用抛光原理，以便在两侧实现期望的非球面形状。