公开(公告)号：US06199991B1

公开(公告)日：2001-03-13

申请号：US09135862

申请日：1998-08-18

申请人： Josephus J. M. Braat

发明人： Josephus J. M. Braat

IPC分类号： G02B508

CPC分类号： G03F7/70233 ,  G02B17/0657 ,  G03F7/70275 ,  G03F7/70358

摘要： A mask pattern is repetitively scan-imaged on a number of areas of a substrate by means of a beam of EUV radiation having a circular segment-shaped cross-section. This system, which is easier to manufacture at lower cost than a projection system with six or more imaging mirrors, has only five imaging mirrors with a good numerical aperture and an acceptable image-ringfield width. An EUV lithographic projection apparatus provided with the new projection system has a wafer throughput which is approximately 50% higher than that of an apparatus provided with a six-mirror projection system. Moreover, it has a compact construction.

摘要翻译： 掩模图案通过具有圆形扇形截面的EUV辐射束在衬底的多个区域上重复扫描成像。 该系统以比具有六个或更多个成像镜的投影系统更低的成本更容易制造，仅具有五个具有良好数值孔径和可接受的图像环形宽度的成像镜。 设置有新投影系统的EUV光刻投影设备具有比设置有六镜投影系统的设备高约50％的晶片吞吐量。 此外，它具有紧凑的结构。

公开(公告)号：US6038077A

公开(公告)日：2000-03-14

申请号：US132862

申请日：1998-08-12

申请人： Josephus J. M. Braat

发明人： Josephus J. M. Braat

IPC分类号： G02B13/08 ,  G02B13/18 ,  G02B3/00

CPC分类号： G02B13/18

摘要： Imaging conditions for the aperture rays of an axial pencil, for example Abbe's sine condition, determine how an object volume will be imaged in the image space of an optical lens system. The invention provides an optical lens element having an imaging condition which analytically should lead to the largest possible volume in an image space wherein possible aberrations (spherical aberration and coma) remain below a certain prescribed level.

摘要翻译： 用于轴向笔的孔径光线的成像条件，例如阿贝正弦条件，确定对象体积如何在光学透镜系统的图像空间中成像。 本发明提供一种具有成像条件的光学透镜元件，该成像条件在分析上应导致图像空间中最大可能的体积，其中可能的像差（球面像差和昏迷）保持低于某一规定水平。

公开(公告)号：US5467335A

公开(公告)日：1995-11-14

申请号：US175075

申请日：1993-12-29

申请人： Josephus J. M. Braat

发明人： Josephus J. M. Braat

IPC分类号： B41J2/44 ,  G02B3/00 ,  G02B26/10 ,  G02B27/09 ,  G03B27/54 ,  G11B7/135 ,  H01S3/00 ,  H01S5/00 ,  H01S5/022 ,  G11B7/00

CPC分类号： G02B3/00 ,  G02B19/0014 ,  G02B19/0052 ,  G02B27/09 ,  G02B27/0966 ,  G02B27/0972 ,  G11B7/1381 ,  G11B7/1398 ,  H01S5/02212 ,  H01S5/02248 ,  H01S5/02288

摘要： A beam-shaping element for converting a beam having an elliptical cross-section into a beam having a circular cross-section. This element has a cylindrical entrance surface and a toriodal exit surface and can be arranged close to a diode laser so that the risk of wavefront deviations due to defocusing is reduced. The element has a high coupling efficiency.

摘要翻译： 一种用于将具有椭圆截面的光束转换成具有圆形横截面的光束的光束成形元件。 该元件具有圆柱形入口表面和波浪形出射表面，并且可以靠近二极管激光器布置，从而降低由于散焦引起的波前偏差的风险。 该元件具有高耦合效率。

公开(公告)号：US4668056A

公开(公告)日：1987-05-26

申请号：US589909

申请日：1984-03-14

申请人： Josephus J. M. Braat ,  Albert Smid

发明人： Josephus J. M. Braat ,  Albert Smid

IPC分类号： G02B13/00 ,  G02B3/04 ,  G02B13/18 ,  G11B7/135 ,  G02B26/10

CPC分类号： G02B3/04 ,  G11B7/1374

摘要： A single lens is described for forming of a scanning spot on an information surface of a transparent record-carrier substrate. The lens has one aspherical surface and one spherical or plane surface. The curvatures of the lens surfaces and the thickness of the lens are selected to compensate for aberrations caused by the substrate.

摘要翻译： 描述了用于在透明记录载体基板的信息表面上形成扫描点的单个透镜。 透镜具有一个非球面和一个球面或平面。 选择透镜表面的曲率和透镜的厚度以补偿由衬底引起的像差。

公开(公告)号：US4556967A

公开(公告)日：1985-12-03

申请号：US565994

申请日：1983-12-27

申请人： Josephus J. M. Braat

发明人： Josephus J. M. Braat

IPC分类号： G11B3/60 ,  G11B7/007 ,  G11B7/013 ,  G11B7/09 ,  G11B7/00

CPC分类号： G11B7/0938 ,  G11B3/60 ,  G11B7/24085

摘要： A record carrier is described which has an optically readable information structure in which information areas of adjacent information track portions have different phase depths, and an apparatus for reading said record carrier. By a suitable choice of the phase depths and by an electronic phase shift of the signals supplied by the read detectors, cross-talk between adjacent tracks can substantially be eliminated.

摘要翻译： 描述了一种具有光学可读信息结构的记录载体，其中相邻信息轨道部分的信息区域具有不同的相位深度，以及用于读取所述记录载体的装置。 通过相位深度的适当选择和由读取检测器提供的信号的电子相移，可以基本上消除相邻轨道之间的串扰。

公开(公告)号：US06788644B1

公开(公告)日：2004-09-07

申请号：US09332239

申请日：1999-06-14

申请人： Josephus J. M. Braat

发明人： Josephus J. M. Braat

IPC分类号： G11B724

CPC分类号： G11B7/24085 ,  G11B7/00745 ,  G11B7/0908 ,  G11B7/0917 ,  G11B7/0938

摘要： A device scans an optical record carrier having optically detectable marks along a track. The device includes a radiation source for emitting a radiation beam, an objective system for guiding the radiation beam to the record carrier, and a radiation-sensitive detection system for receiving radiation from the record carrier. The detection system includes at least two detectors on both sides of a dividing line. Each detector has an output for providing a detector signal. An electronic circuit forms a focus error signal from the detector signals. The electronic circuit determines a time or phase difference between corresponding parts of the detector signals relating to passage of the radiation beam over patterns of the marks having a spatial frequency in a first range and in a different, second range, and forms a focus error signal in dependence on the time or phase difference.

摘要翻译： 设备沿着轨道扫描具有光学可检测标记的光学记录载体。 该装置包括用于发射辐射束的辐射源，用于将辐射束引导到记录载体的物镜系统，以及用于接收来自记录载体的辐射的辐射敏感检测系统。 检测系统在分界线的两侧包括至少两个检测器。 每个检测器具有用于提供检测器信号的输出。 电子电路从检测器信号形成聚焦误差信号。 电子电路确定检测器信号的相关部分之间的时间或相位差，该信号与辐射束通过具有在第一范围和不同第二范围内的空间频率的标记的图案相关，并且形成聚焦误差信号 依赖于时间或相位差。

公开(公告)号：US06317276B1

公开(公告)日：2001-11-13

申请号：US09622601

申请日：2000-08-16

申请人： Josephus J. M. Braat

发明人： Josephus J. M. Braat

IPC分类号： G02B914

CPC分类号： G11B7/13927 ,  G02B21/002 ,  G11B7/1378 ,  G11B2007/13727

摘要： In a lens system for focusing a divergent beam in a small spot and comprising a collimator lens and an objective lens, the collimator lens is composed of a positive plastics lens element and a negative glass lens element. This collimator corrects the temperature-dependent spherical aberration of the objective lens. This lens system is very suitable for a scanning device and an apparatus for reading/writing high-density optical discs.

摘要翻译： 在用于将发散光束聚焦在小光点并且包括准直透镜和物镜的透镜系统中，准直透镜由正塑料透镜元件和负玻璃透镜元件组成。 该准直器校正物镜的温度依赖性球面像差。 该透镜系统非常适用于扫描装置和用于读/写高密度光盘的装置。

公开(公告)号：US6052237A

公开(公告)日：2000-04-18

申请号：US812191

申请日：1997-03-06

申请人： Willem G. Opheij ,  Josephus J. M. Braat

发明人： Willem G. Opheij ,  Josephus J. M. Braat

IPC分类号： G02B3/02 ,  G02B13/18 ,  G02B27/00 ,  G11B7/00 ,  G11B7/1372 ,  G11B7/1374 ,  G11B7/1392 ,  G02B3/10

CPC分类号： G11B7/1374 ,  G02B27/0025 ,  G02B3/02 ,  G11B7/1372 ,  G11B7/13922 ,  G11B2007/0006 ,  G11B2007/0013

摘要： A scanning device for optical record carriers is provided with an objective lens (7) suitable for scanning record carriers (1, 21) having a transparent substrate (2, 23) of different thicknesses. The lens comprises an outer annular part (25) and an inner central part (26) within the annular part. Only the central part of the lens is used for forming a focus through a first substrate (2) having a first thickness. The central part is corrected for the spherical aberration of the first substrate. The annular and central part of the lens are used for forming a focus through a second substrate (23) having a different, second thickness. The annular part is corrected for the spherical aberration of the second substrate.

摘要翻译： 用于光学记录载体的扫描装置设置有适于扫描具有不同厚度的透明基板（2,33）的记录载体（1,21）的物镜（7）。 透镜包括环形部分内的外环形部分（25）和内中心部分（26）。 只有透镜的中心部分用于通过具有第一厚度的第一基底（2）形成焦点。 对于第一基板的球面像差校正中心部分。 透镜的环形和中心部分用于通过具有不同的第二厚度的第二衬底（23）形成焦点。 针对第二基板的球面像差校正环形部分。

公开(公告)号：US5732065A

公开(公告)日：1998-03-24

申请号：US709402

申请日：1996-09-04

申请人： Josephus J. M. Braat ,  Gerardus J. J. Vos

发明人： Josephus J. M. Braat ,  Gerardus J. J. Vos

IPC分类号： G11B7/005 ,  G11B7/007 ,  G11B7/127 ,  G11B7/24 ,  G11B7/28 ,  G11B3/70 ,  G11B3/74

CPC分类号： G11B7/127 ,  G11B7/24 ,  G11B7/28 ,  G11B7/005

摘要： A record carrier having standard and high-density information layers. The standard density layer, e.g. in a standard CD format, is positioned at the bottom of a substrate, and is read out through the substrate with a laser beam. The thickness of the substrate is within the CD specification, e.g. 1.2 mm. At least one high-density layer is formed by a material which is (nearly) transparent for the laser wavelength of standard CD players (.lambda.=780 nm), but is (at least partially) reflective for shorter wavelengths used for high-density discs (.lambda.=635 nm). To achieve a high density, a smaller track pitch and smaller pits are used in the high-density layer(s). To achieve better reading signals from both layers, the high-density layer is positioned closer to the side of entrance of the laser beam in the substrate. A higher numeric aperture of the focusing lens and, therefore, a smaller spot for the shorter wavelength results. The high-density layer is preferably positioned midway in the substrate, e.g. at 0.6 mm. Such high-density layer configuration is compatible with two-sided high-density discs which have a total thickness of 1.2 mm. The information content of the standard layer may be duplicated on the high-density layer, or it may be represented by a different coding scheme.

摘要翻译： 具有标准和高密度信息层的记录载体。 标准密度层，例如 以标准CD格式定位在基底的底部，并通过激光束通过基片读出。 衬底的厚度在CD规范内，例如。 1.2毫米。 至少一个高密度层由对于标准CD播放器（λ= 780nm）的激光波长（几乎）透明的材料形成，但对于用于高密度光盘的较短波长（至少部分地）反射 （λ= 635nm）。 为了实现高密度，在高密度层中使用较小的轨道间距和较小的凹坑。 为了从两个层获得更好的读取信号，高密度层被定位成更靠近基板中的激光束的入射侧。 聚焦透镜的数值孔径越高，因此，对于较短波长的光点越小。 高密度层优选位于基底的中间，例如 0.6mm。 这种高密度层构造与总厚度为1.2mm的双面高密度盘兼容。 标准层的信息内容可以在高密度层上复制，也可以由不同的编码方式来表示。

公开(公告)号：US5071237A

公开(公告)日：1991-12-10

申请号：US497747

申请日：1990-03-19

申请人： Josephus J. M. Braat ,  Albert Smid

发明人： Josephus J. M. Braat ,  Albert Smid

IPC分类号： G02B15/167 ,  G02B15/16

CPC分类号： G02B15/173 ,  G02B13/22

摘要： A zoom lens is described for an electronic camera for still pictures, comprising a front group (G.sub.1), a variator group (G.sub.2) and a main group (G.sub.4). The lens is designed in such a manner that the sum of the spherical aberrations of the front group and the variator group is constant throughout the zoom range and is adapted to that of the main group.