公开(公告)号：US20230326939A1

公开(公告)日：2023-10-12

申请号：US18042505

申请日：2021-07-26

申请人： DIRECT ELECTRON, LP

发明人： Benjamin BAMMES ,  Robert BILHORN

IPC分类号： H01L27/146 ,  G01T1/24

CPC分类号： H01L27/14612 ,  G01T1/244 ,  H01L27/14659 ,  H01L27/14683

摘要： A detector is provided for forming images by detecting electrons in an electron microscope at energies in the range of 3 keV to 300 keV, more specifically in the range of 40 keV to 120 keV with very high spatial resolution and sensitivity. The detector is formed by bonding a handling wafer to the front side of a planarized monolithic active pixel sensor (MAPS), partially or completely removing the substrate layer on the back side and selectively removing the handling material from the front side to leave a periphery of handling material in the non-image forming area. The detector may be mounted in an electron microscope for back side illumination. The detector provides high resolution images at low-energies due to back side illumination and at higher energies due to a decreased epitaxial layer thickness and the absence of any backscattering substrate material.

公开(公告)号：US08809781B1

公开(公告)日：2014-08-19

申请号：US14193159

申请日：2014-02-28

申请人： Direct Electron, LP

发明人： Benjamin Eugene Bammes ,  Liang Jin

IPC分类号： H01J37/26 ,  H01J37/244

CPC分类号： H01J37/26 ,  H01J37/222 ,  H01J2237/223 ,  H01J2237/226

摘要： A method of imaging of a specimen exposed to an electron beam signal includes acquiring an image sequence of sequential images of the specimen. Each subsequent image in the image sequence represents increased cumulative electron beam signal exposure on the specimen. The method includes collecting cumulative exposure data for each image of the image sequence. The method includes applying a low-pass image processing filter to the images of the image sequence using the cumulative exposure data corresponding to each image to which the filter is being applied to produce processed images. The method includes combining the processed images to produce a final image. A method of imaging is also provided that includes selectively discarding images in the image sequence.

摘要翻译： 暴露于电子束信号的样本的成像方法包括获取样本的连续图像的图像序列。 图像序列中的每个后续图像表示样品上增加的累积电子束信号曝光。 该方法包括收集图像序列的每个图像的累积曝光数据。 该方法包括使用与应用滤波器的每个图像对应的累积曝光数据来对图像序列的图像应用低通图像处理滤波器以产生经处理的图像。 该方法包括组合经处理的图像以产生最终图像。 还提供了一种成像方法，其包括选择性地丢弃图像序列中的图像。

公开(公告)号：US11310438B2

公开(公告)日：2022-04-19

申请号：US16851835

申请日：2020-04-17

申请人： Direct Electron, LP

发明人： Benjamin Bammes ,  Robert Bilhorn

IPC分类号： H04N5/235 ,  H04N5/365 ,  H04N5/341 ,  H01J37/28 ,  H04N5/00

摘要： The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.

公开(公告)号：US11252339B2

公开(公告)日：2022-02-15

申请号：US16851931

申请日：2020-04-17

申请人： Direct Electron, LP

发明人： Benjamin Bammes ,  Robert Bilhorn

IPC分类号： H04N5/235 ,  H04N5/365 ,  H04N5/341 ,  H01J37/28 ,  H04N5/00

摘要： The present disclosure relates to an apparatus and methods for generating a hybrid image by high-dynamic-range counting. In an embodiment, the apparatus includes a processing circuitry configured to acquire an image from a pixelated detector, obtain a sparsity map of the acquired image, the sparsity map indicating low-flux regions of the acquired image and high-flux regions of the acquired image, generate a low-flux image and a high-flux image based on the sparsity map, perform event analysis of the acquired image based on the low-flux image and the high-flux image, the event analysis including detecting, within the low-flux image, incident events by an event counting mode, multiply, by a normalization constant, resulting intensities of the high-flux image and the detected incident events of the low-flux image, and generate the hybrid image by merging the low-flux image and the high-flux image.

公开(公告)号：US20200336646A1

公开(公告)日：2020-10-22

申请号：US16851931

申请日：2020-04-17

申请人： Direct Electron, LP

发明人： Benjamin BAMMES ,  Robert BILHORN

IPC分类号： H04N5/235 ,  H04N5/341 ,  H04N5/365

摘要： The present disclosure relates to an apparatus and methods for generating a hybrid image by high-dynamic-range counting. In an embodiment, the apparatus includes a processing circuitry configured to acquire an image from a pixelated detector, obtain a sparsity map of the acquired image, the sparsity map indicating low-flux regions of the acquired image and high-flux regions of the acquired image, generate a low-flux image and a high-flux image based on the sparsity map, perform event analysis of the acquired image based on the low-flux image and the high-flux image, the event analysis including detecting, within the low-flux image, incident events by an event counting mode, multiply, by a normalization constant, resulting intensities of the high-flux image and the detected incident events of the low-flux image, and generate the hybrid image by merging the low-flux image and the high-flux image.

公开(公告)号：US20230145436A1

公开(公告)日：2023-05-11

申请号：US17905128

申请日：2021-03-01

申请人： DIRECT ELECTRON, LP

发明人： Benjamin BAMMES ,  Robert BILHORN

IPC分类号： H01J37/295

CPC分类号： H01J37/2955 ,  H01J2237/2803 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/24495

摘要： A method of, and a detector for, performing energy sensitive imaging of ionizing radiation are provided, including acquiring a first frame having a plurality of pixels, each pixel of the plurality having an energy of detection and a location; grouping, into a cluster, pixels of the plurality having an energy of detection above a predetermined threshold and a location along with at least one other pixel also having an energy of detection above the predetermined threshold and being within a predetermined distance of the location; summing the energy of detection of all pixels within the grouped cluster to determine a cluster energy; determining a location of the cluster based on a distribution and an intensity of the summed energy of detection; and generating an image of the cluster based on the determined cluster energy and the determined location of the cluster.

公开(公告)号：US20200335301A1

公开(公告)日：2020-10-22

申请号：US16851835

申请日：2020-04-17

申请人： Direct Electron, LP

发明人： Benjamin BAMMES ,  Robert BILHORN

IPC分类号： H01J37/28

摘要： The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.

公开(公告)号：US20140239176A1

公开(公告)日：2014-08-28

申请号：US14193159

申请日：2014-02-28

申请人： DIRECT ELECTRON, LP

发明人： Benjamin Eugene Bammes ,  Liang Jin

IPC分类号： H01J37/244 ,  H01J37/26

CPC分类号： H01J37/26 ,  H01J37/222 ,  H01J2237/223 ,  H01J2237/226

摘要： A method of imaging of a specimen exposed to an electron beam signal includes acquiring an image sequence of sequential images of the specimen. Each subsequent image in the image sequence represents increased cumulative electron beam signal exposure on the specimen. The method includes collecting cumulative exposure data for each image of the image sequence. The method includes applying a low-pass image processing filter to the images of the image sequence using the cumulative exposure data corresponding to each image to which the filter is being applied to produce processed images. The method includes combining the processed images to produce a final image. A method of imaging is also provided that includes selectively discarding images in the image sequence.

摘要翻译： 暴露于电子束信号的样本的成像方法包括获取样本的连续图像的图像序列。 图像序列中的每个后续图像表示样品上增加的累积电子束信号曝光。 该方法包括收集图像序列的每个图像的累积曝光数据。 该方法包括使用与应用滤波器的每个图像对应的累积曝光数据来对图像序列的图像应用低通图像处理滤波器以产生经处理的图像。 该方法包括组合经处理的图像以产生最终图像。 还提供了一种成像方法，其包括选择性地丢弃图像序列中的图像。