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公开(公告)号：US20120123734A1
公开(公告)日：2012-05-17
申请号：US12944363
申请日：2010-11-11
申请人： Reed LINDE , Dan GLOTTER , Alexander CHUFAROVSKY , Leonid GUROV
发明人： Reed LINDE , Dan GLOTTER , Alexander CHUFAROVSKY , Leonid GUROV
CPC分类号： G01R31/2891
摘要： Systems and methods for deciding whether or not to indicate misalignment. In some examples, an analysis of parametric data relating to tests sensitive to misalignment is performed in order to determine which data is incongruous and to identify corresponding probes or socket contacts as suspected misaligned. In some examples, additionally or alternatively, a spatial analysis quantifies the placement of a set of identified suspected misaligned probes, which were identified from pass/fail test data and/or parametric test data, with respect to a contiguous or non-contiguous area on one or more wafers.
摘要翻译： 用于决定是否指示未对准的系统和方法。 在一些示例中，执行与对准不对齐的测试相关的参数数据的分析，以便确定哪些数据不协调并且识别出疑似不对齐的相应探针或插座触点。 在一些示例中，附加地或替代地，空间分析量化由通过/失败测试数据和/或参数测试数据识别的一组识别的可疑未对准探针相对于邻近或不连续区域的位置 一个或多个晶片。
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公开(公告)号：US08838408B2
公开(公告)日：2014-09-16
申请号：US12944363
申请日：2010-11-11
申请人： Reed Linde , Dan Glotter , Alexander Chufarovsky , Leonid Gurov
发明人： Reed Linde , Dan Glotter , Alexander Chufarovsky , Leonid Gurov
CPC分类号： G01R31/2891
摘要： Systems and methods for deciding whether or not to indicate misalignment. In some examples, an analysis of parametric data relating to tests sensitive to misalignment is performed in order to determine which data is incongruous and to identify corresponding probes or socket contacts as suspected misaligned. In some examples, additionally or alternatively, a spatial analysis quantifies the placement of a set of identified suspected misaligned probes, which were identified from pass/fail test data and/or parametric test data, with respect to a contiguous or non-contiguous area on one or more wafers.
摘要翻译： 用于决定是否指示未对准的系统和方法。 在一些示例中，执行与对准不对齐的测试相关的参数数据的分析，以便确定哪些数据不协调并且识别出疑似不对齐的相应探针或插座触点。 在一些示例中，附加地或替代地，空间分析量化由通过/失败测试数据和/或参数测试数据识别的一组识别的可疑未对准探针相对于邻近或不连续区域的位置 一个或多个晶片。
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