公开(公告)号：US20060216186A1

公开(公告)日：2006-09-28

申请号：US10555972

申请日：2004-05-06

Applicant: Peter Birch ,  David Turrell ,  Malcolm Gray ,  Neil Turner

Inventor： Peter Birch ,  David Turrell ,  Malcolm Gray ,  Neil Turner

IPC: F03C2/00 ,  F04C27/00

CPC classification number: F04C27/02 ,  F04C18/086 ,  F04C18/123 ,  F04C18/126 ,  F04C23/001 ,  F04C2220/12

Abstract: A seal assembly for the protection of a static seal device for use in a vacuum pump. The seal assembly comprising at least two components which are sealingly connected together, an o-ring seal, which is engaged between the two components to prevent transfer of fluid to and from the pump between these two components and a fluid channel. The fluid channel being in the plane of the o-ring and located between the o-ring seal and a process gas flow path. The fluid channel provides a path for a barrier gas to be routed when the apparatus is in use. The channel being connectable to an external source of barrier fluid and having an outlet in fluid communication with the pump swept volume.

Abstract translation: 一种用于保护用于真空泵的静态密封装置的密封组件。 密封组件包括密封地连接在一起的至少两个部件，O形圈密封件，其接合在两个部件之间以防止流体在这两个部件之间和/或从泵两者之间传递流体通道。 流体通道位于O形环的平面内并且位于O形环密封件和工艺气体流动路径之间。 当设备使用时，流体通道提供用于阻挡气体被路由的路径。 该通道可连接到外部的阻挡流体源并且具有与泵扫过体积流体连通的出口。

公开(公告)号：US20080089793A1

公开(公告)日：2008-04-17

申请号：US11660339

申请日：2005-08-17

Applicant: Stuart Coles ,  Michael Galtry ,  David Turrell ,  Patrick Clayton

Inventor： Stuart Coles ,  Michael Galtry ,  David Turrell ,  Patrick Clayton

IPC: F04B37/14

CPC classification number: F04B41/06 ,  F04B37/14

Abstract: A system for evacuating an enclosure is provided. The system comprises first pumping means having an inlet selectively connectable to an outlet from the enclosure. Second pumping means are also provided together with conduit means for connecting an exhaust of the first pumping means to an inlet of the second pumping means. An auxiliary chamber is provided, this chamber being selectively connectable to the conduit means such that, in a first state, gas can be drawn from the auxiliary chamber by the second pumping means in isolation from the enclosure, and, in a second state, gas can be drawn from the enclosure to the auxiliary chamber through the first pumping means.

Abstract translation: 提供了一种用于排空外壳的系统。 该系统包括第一泵送装置，其具有可选择地连接到来自外壳的出口的入口。 第二泵送装置还与用于将第一泵送装置的排气连接到第二泵送装置的入口的导管装置一起提供。 设置有辅助室，该室可选择性地连接到管道装置，使得在第一状态下，气体可以通过与外壳隔离的第二泵送装置从辅助室抽出，并且在第二状态下，气体 可以通过第一泵送装置从外壳抽入辅助室。