公开(公告)号：US20140093985A1

公开(公告)日：2014-04-03

申请号：US14112033

申请日：2012-02-17

申请人： Jian Li ,  Dean Levi ,  Migual Contreras ,  Stephen Glynn

发明人： Jian Li ,  Dean Levi ,  Migual Contreras ,  Stephen Glynn

IPC分类号： H01L21/66 ,  H01L31/18 ,  G01N9/00

CPC分类号： H01L22/10 ,  G01N9/00 ,  G01N21/211 ,  G01N21/8422 ,  G01N2021/213 ,  H01L22/12 ,  H01L31/03923 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

摘要： A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

摘要翻译： 制造光伏器件100的方法包括以下步骤：提供玻璃衬底102，在玻璃衬底的表面上沉积钼层104，将光引导通过玻璃衬底到钼层206的近衬底区域， 在与入射光208相互作用之后检测钼层的近基底区域的光学特性，并根据检测到的光学特性210确定钼层的近底基区域的密度。钼沉积参数可以基于 取决于钼层218的近基底区域的确定密度。非接触方法测量钼层和沉积室300的近基底区域的密度。

公开(公告)号：US09136184B2

公开(公告)日：2015-09-15

申请号：US14112033

申请日：2012-02-17

申请人： Jian Li ,  Dean Levi ,  Miguel Contreras ,  Stephen Glynn

发明人： Jian Li ,  Dean Levi ,  Miguel Contreras ,  Stephen Glynn

IPC分类号： H01L21/66 ,  G01N21/21 ,  G01N21/84 ,  H01L31/0392 ,  G01N9/00 ,  H01L31/18

CPC分类号： H01L22/10 ,  G01N9/00 ,  G01N21/211 ,  G01N21/8422 ,  G01N2021/213 ,  H01L22/12 ,  H01L31/03923 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

摘要： A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

摘要翻译： 制造光伏器件100的方法包括以下步骤：提供玻璃衬底102，在玻璃衬底的表面上沉积钼层104，将光引导通过玻璃衬底到钼层206的近衬底区域， 在与入射光208相互作用之后检测钼层的近基底区域的光学特性，并根据检测到的光学特性210确定钼层的近底基区域的密度。钼沉积参数可以基于 取决于钼层218的近基底区域的确定密度。非接触方法测量钼层和沉积室300的近基底区域的密度。

公开(公告)号：US07179665B1

公开(公告)日：2007-02-20

申请号：US11060111

申请日：2005-02-17

申请人： Dean Levi

发明人： Dean Levi

IPC分类号： H01L21/66

CPC分类号： H01L22/14

摘要： A method of processing a sample, comprising the steps of: introducing dopant into a sample thereby producing a doped sample; producing a healed sampled including a doping density profile in response to introducing the dopant into the sample; and measuring the doping density profile of the healed sample by performing reflectometry using light generated within the visible wavelength spectrum.

摘要翻译： 一种处理样品的方法，包括以下步骤：将掺杂剂引入样品中，从而产生掺杂样品; 响应于将掺杂剂引入到样品中，产生采样的包括掺杂密度分布的愈合; 并通过使用在可见波长光谱内产生的光进行反射测量来测量愈合样品的掺杂密度分布。