公开(公告)号：US20140093985A1

公开(公告)日：2014-04-03

申请号：US14112033

申请日：2012-02-17

申请人： Jian Li ,  Dean Levi ,  Migual Contreras ,  Stephen Glynn

发明人： Jian Li ,  Dean Levi ,  Migual Contreras ,  Stephen Glynn

IPC分类号： H01L21/66 ,  H01L31/18 ,  G01N9/00

CPC分类号： H01L22/10 ,  G01N9/00 ,  G01N21/211 ,  G01N21/8422 ,  G01N2021/213 ,  H01L22/12 ,  H01L31/03923 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

摘要： A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

摘要翻译： 制造光伏器件100的方法包括以下步骤：提供玻璃衬底102，在玻璃衬底的表面上沉积钼层104，将光引导通过玻璃衬底到钼层206的近衬底区域， 在与入射光208相互作用之后检测钼层的近基底区域的光学特性，并根据检测到的光学特性210确定钼层的近底基区域的密度。钼沉积参数可以基于 取决于钼层218的近基底区域的确定密度。非接触方法测量钼层和沉积室300的近基底区域的密度。