公开(公告)号：US20130127800A1

公开(公告)日：2013-05-23

申请号：US13566810

申请日：2012-08-03

Applicant: Detlef BILLEP ,  Hendrik Specht ,  Kurth Steffen ,  Thomas Hilberath ,  Thomas Gessner ,  Oliver Krayl

Inventor： Detlef BILLEP ,  Hendrik Specht ,  Kurth Steffen ,  Thomas Hilberath ,  Thomas Gessner ,  Oliver Krayl

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G02B26/101

Abstract: A method for controlling a micro-mirror, having the following: generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.

Abstract translation: 一种用于控制微镜的方法，具有以下特征：产生以第一频率编码微镜围绕第一倾斜轴的倾斜运动的第一控制信号; 产生第二控制信号，该第二控制信号以低于第一频率的第二频率编码微反射镜围绕垂直于第一倾斜轴的第二倾斜轴的倾斜运动; 以第一频率对第二控制信号进行二进制调制来调制第二控制信号; 以及使用调制的第二控制信号和第一控制信号来控制微镜的力耦合元件。

公开(公告)号：US08963898B2

公开(公告)日：2015-02-24

申请号：US13566810

申请日：2012-08-03

Applicant: Detlef Billep ,  Hendrik Specht ,  Kurth Steffen ,  Thomas Hilberath ,  Thomas Gessner ,  Oliver Krayl

Inventor： Detlef Billep ,  Hendrik Specht ,  Kurth Steffen ,  Thomas Hilberath ,  Thomas Gessner ,  Oliver Krayl

IPC: G09G5/00 ,  G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0833 ,  G02B26/101

Abstract: A method for controlling a micro-mirror, having the following: generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.

Abstract translation: 一种用于控制微镜的方法，具有以下特征：产生以第一频率编码微镜围绕第一倾斜轴的倾斜运动的第一控制信号; 产生第二控制信号，该第二控制信号以低于第一频率的第二频率编码微反射镜围绕垂直于第一倾斜轴的第二倾斜轴的倾斜运动; 以第一频率对第二控制信号进行二进制调制来调制第二控制信号; 以及使用调制的第二控制信号和第一控制信号来控制微镜的力耦合元件。

公开(公告)号：US06863832B1

公开(公告)日：2005-03-08

申请号：US10031957

申请日：2000-07-20

Applicant: Maik Wiemer ,  Karla Hiller ,  Detlef Billep ,  Uwe Breng ,  Bruno Rvrko ,  Eberhard Handrich

Inventor： Maik Wiemer ,  Karla Hiller ,  Detlef Billep ,  Uwe Breng ,  Bruno Rvrko ,  Eberhard Handrich

IPC: B81B3/00 ,  B81C1/00 ,  G01C19/56 ,  G01P15/08 ,  C23F1/00

CPC classification number: B81B3/0051 ,  B81B2201/0242 ,  B81C2201/0133 ,  G01C19/56 ,  G01P15/0888

Abstract: A method for producing a silicon torsion spring capable, for example, of reading the rotation rate in a microstructured torsion spring/mass system. The system that is produced achieves a low torsional stiffness compared to a relatively high transverse stiffness in the lateral and vertical directions. The method proceeds from a wafer or wafer composite and, upon suitable mask coverage, a spring with a V-shaped cross section is formed by anisotropic wet-chemical etching which preferably extends over the entire wafer thickness and is laterally delimited only by [111] planes. Two of the wafers or wafer composites prepared in this way are rotated through 180° and joined to one another oriented mirrorsymmetrically with respect to one another, so that overall the desired X-shaped cross section is formed.

Abstract translation: 一种制造例如在微结构扭转弹簧/质量体系中读取旋转速度的硅扭转弹簧的方法。 与横向和垂直方向上相对较高的横向刚度相比，所生产的系统达到较低的扭转刚度。 该方法从晶片或晶片复合材料进行，并且在合适的掩模覆盖时，通过各向异性湿化学蚀刻形成具有V形横截面的弹簧，其优选地在整个晶片厚度上延伸并且仅由[111] 飞机 以这种方式制备的两个晶片或晶片复合体相对于彼此对称地旋转180°并且彼此相对地定向成反射镜，从而形成所需的X形横截面。