Dielectric barrier discharge excimer light source
    1.
    发明申请
    Dielectric barrier discharge excimer light source 审中-公开
    介电阻挡放电准分子光源

    公开(公告)号:US20080054791A1

    公开(公告)日:2008-03-06

    申请号:US11976461

    申请日:2007-10-24

    Abstract: An anode electrode 10 is composed of a straight elongated cylindrical body, and the outer periphery of the cylindrical body is covered with a dielectric body 12. Further, a cathode portion 20 has a straight semicylindrical shape. A cathode 25 surrounds the anode, and the anode and cathode are disposed parallel to each other in the longitudinal direction. Further, the cathode comprises a cathode wire group 16. Both ends of the cathode wire group are fixed to both ends 20D in the longitudinal direction of the semicylindrical body constituting the cathode portion, so that a plurality of wires become parallel to each other. A reflective surface for reflecting irradiation in a vacuum ultraviolet region is formed on the surface 20S of the cathode portion at the side facing the anode.

    Abstract translation: 阳极电极10由直的细长圆筒体构成,圆筒体的外周被绝缘体12覆盖。 此外,阴极部分20具有直的半圆柱形形状。 阴极25围绕阳极,并且阳极和阴极在纵向方向上彼此平行设置。 此外,阴极包括阴极线组16。 阴极线组的两端在构成阴极部的半圆柱体的长度方向固定在两端部20D上,使多条电线彼此平行。 用于在真空紫外区域中反射照射的反射表面形成在阴极部分的面向阳极的一侧的表面20上。

    Dielectric barrier diescharge excimer light source
    2.
    发明申请
    Dielectric barrier diescharge excimer light source 审中-公开
    介电势垒去极化准分子光源

    公开(公告)号:US20080054773A1

    公开(公告)日:2008-03-06

    申请号:US11976458

    申请日:2007-10-24

    Abstract: An anode electrode 10 is composed of a straight elongated cylindrical body, and the outer periphery of the cylindrical body is covered with a dielectric body 12. Further, a cathode portion 20 has a straight semicylindrical shape. A cathode 25 surrounds the anode, and the anode and cathode are disposed parallel to each other in the longitudinal direction. Further, the cathode comprises a cathode wire group 16. Both ends of the cathode wire group are fixed to both ends 20D in the longitudinal direction of the semicylindrical body constituting the cathode portion, so that a plurality of wires become parallel to each other. A reflective surface for reflecting irradiation in a vacuum ultraviolet region is formed on the surface 20S of the cathode portion at the side facing the anode.

    Abstract translation: 阳极电极10由直的细长圆筒体构成,圆筒体的外周被绝缘体12覆盖。 此外,阴极部分20具有直的半圆柱形形状。 阴极25围绕阳极,并且阳极和阴极在纵向方向上彼此平行设置。 此外,阴极包括阴极线组16。 阴极线组的两端在构成阴极部的半圆柱体的长度方向固定在两端部20D上,使多条电线彼此平行。 用于在真空紫外区域中反射照射的反射表面形成在阴极部分的面向阳极的一侧的表面20上。

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