公开(公告)号：US06379568B1

公开(公告)日：2002-04-30

申请号：US09570958

申请日：2000-05-15

申请人： Young-Joon Baik ,  Joo-Yong Lee ,  Dong-Ryul Jeon

发明人： Young-Joon Baik ,  Joo-Yong Lee ,  Dong-Ryul Jeon

IPC分类号： H01J1900

CPC分类号： H01J9/025 ,  H01J2201/30457

摘要： A diamond field emitter and a fabrication method thereof, in which a pretreatment is performed on a surface of an Si substrate in order that diamond nuclei are uniformly formed on the Si substrate during a diamond deposition, an oxide film such as an SiO2 film is deposited on the pretreated surface of the Si substrate and removed after an etching process so that diamond powder can be selectively remained during the etching process, thus the effect of the surface pretreatment of the Si substrate remains in the selected portion during the etching process, and it is also possible to uniformly deposit the diamond in said portion. According to the present invention, the diamond field emitter having excellent and uniform field emission characteristic can be manufactured because the field emission is easily achieved at a tip shaped field emission section, and, moreover, the diamond placed on an upper end portion of the tip increases electron emission effect.

摘要翻译： 一种金刚石场发射器及其制造方法，其中在金刚石沉积中在Si衬底的表面上进行预处理以使金刚石核均匀地形成在Si衬底上，沉积诸如SiO 2膜的氧化物膜 在Si衬底的预处理表面上，并且在蚀刻工艺之后去除，使得在蚀刻工艺期间可以选择性地保留金刚石粉末，因此在蚀刻工艺期间，Si衬底的表面预处理的效果保留在所选择的部分中，并且 也可以将金刚石均匀地沉积在所述部分中。 根据本发明，可以制造具有优异均匀的场发射特性的金刚石场发射器，因为在尖端形状的场致发射部分容易实现场致发射，此外，金刚石放置在尖端的上端部 增加电子发射效应。

公开(公告)号：US06652762B2

公开(公告)日：2003-11-25

申请号：US09412536

申请日：1999-10-05

申请人： Young Joon Baik ,  Eun Song Baik ,  Dong Ryul Jeon

发明人： Young Joon Baik ,  Eun Song Baik ,  Dong Ryul Jeon

IPC分类号： C03C1500

CPC分类号： H01J9/025 ,  C01B33/06 ,  C30B25/00 ,  C30B25/005 ,  C30B29/04 ,  C30B29/605 ,  H01J2201/30457

摘要： A method for fabricating a nano-sized diamond whisker includes the steps of depositing a diamond film on a substrate, forming a nano-sized mask pattern on the deposited diamond film, and etching the diamond film by using the nano-sized pattern as an etching mask. The nano-sized diamond whisker can be used as a new field emission cold cathode device, thereby advancing a practical use of a field emission device having high performance, and can also be applied to various fields such as a new composite material and a mechanical device.

摘要翻译： 制造纳米尺寸金刚石晶须的方法包括以下步骤：在基底上沉积金刚石膜，在沉积的金刚石膜上形成纳米尺寸的掩模图案，并通过使用纳米尺寸图案作为蚀刻来蚀刻金刚石膜 面具。 纳米尺寸的金刚石晶须可以用作新的场致发射冷阴极器件，从而推进了具有高性能的场致发射器件的实际应用，并且还可以应用于各种领域，例如新的复合材料和机械装置 。