公开(公告)号：US4003770A

公开(公告)日：1977-01-18

申请号：US561405

申请日：1975-03-24

申请人： Richard J. Janowiecki ,  Michael C. Willson ,  Douglas H. Harris

发明人： Richard J. Janowiecki ,  Michael C. Willson ,  Douglas H. Harris

IPC分类号： C23C4/04 ,  H01L21/00 ,  H01L31/0368 ,  H01L31/068 ,  H01L21/203 ,  H01L31/00

CPC分类号： H01L31/068 ,  C23C4/04 ,  H01L21/00 ,  H01L31/03682 ,  Y02E10/546 ,  Y02E10/547 ,  Y10S148/049 ,  Y10S148/122

摘要： Polycrystalline silicon films useful in preparing solar cells primarily for terrestrial application are prepared by a plasma spraying process. A doped silicon powder is injected into a high temperature ionized gas (plasma) to become molten and to be sprayed onto a low-cost substrate. Upon cooling, a dense polycrystalline silicon film is obtained. A p-n junction is formed on the sprayed film by spray deposition, diffusion or ion implantation. A sprayed junction is produced by plasma spraying a thin layer of silicon of opposite polarity or type over the initially deposited doped film. In forming a diffused junction, dopant is applied over the surface of the initial plasma-sprayed film usually from the vapor phase and heat is used to cause the dopant to diffuse into the film to form a shallow layer of opposite polarity to that in the original film. A junction is also formed by implanting dopant ions in the surface of the originally deposited film by the use of electrical fields. When used in conjunction with ohmic contacts and electrical conductors, the p-n junctions produced using plasma-sprayed polycrystalline silicon films are formed into solar cells which are useful for directly converting sunlight into electricity by means of the photovoltaic effect.

摘要翻译： 用于制备主要用于陆地应用的太阳能电池的多晶硅膜通过等离子体喷涂方法制备。 将掺杂的硅粉末注入到高温电离气体（等离子体）中以熔化并喷涂到低成本基材上。 冷却后，得到致密的多晶硅膜。 通过喷雾沉积，扩散或离子注入在喷涂膜上形成p-n结。 通过在初始沉积的掺杂膜上等离子体喷涂相反极性或类型的薄层硅来产生喷涂结。 在形成扩散结时，掺杂剂通常从气相中施加在初始等离子体喷涂膜的表面上，并且使用热使掺杂剂扩散到膜中以形成与原始反相极性相反的浅层 电影。 通过使用电场将掺杂剂离子注入原始沉积膜的表面中也形成结。 当与欧姆接触和电导体结合使用时，使用等离子体喷涂的多晶硅膜产生的p-n结被形成为太阳能电池，其可用于通过光伏效应直接将阳光转换成电。

公开(公告)号：US3986149A

公开(公告)日：1976-10-12

申请号：US608955

申请日：1975-08-29

申请人： Douglas H. Harris ,  Fred J. Rosenbaum

发明人： Douglas H. Harris ,  Fred J. Rosenbaum

IPC分类号： H01P1/19 ,  H01P1/18

CPC分类号： H01P1/19

摘要： A rectangular toroid of a substrate material has a ferrite arc plasma sprayed into a channel toroid leaving two faces exposed. An off center aperture receives a drive winding which surrounds one long side of the toroid, the other long side is covered by three co-planar and parallel metal strips, slightly spaced and having ferrite material between the strips and forming a co-planar surface with the metal strips.

摘要翻译： 衬底材料的矩形环形具有铁氧体电弧等离子体喷射到沟道环形中，留下两个面露出。 偏心孔接收围绕环形线圈的一个长边的驱动绕组，另一个长边被三个平行和平行的金属带覆盖，这三个平行和平行的金属条稍微间隔开，并且在带之间具有铁素体材料并形成共面 金属条。