公开(公告)号：US06171880B2

公开(公告)日：2001-01-09

申请号：US09332112

申请日：1999-06-14

申请人： Michael Gaitan ,  Nim Tea ,  Edwin D. Bowen ,  Veljko Milanovic

发明人： Michael Gaitan ,  Nim Tea ,  Edwin D. Bowen ,  Veljko Milanovic

IPC分类号： H01L2100

CPC分类号： G01C9/00 ,  G01P15/008 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/18

摘要： A method is provided for the manufacture of a convective accelerometer and tilt sensor device using CMOS techniques. An integrated circuit chip is produced which includes a silicon substrate having an integrated circuit pattern thereon including a heater element located centrally of the substrate and at least first and second thermocouple elements located on the substrate on opposite sides of the heater element. Thereafter, portions of the substrate surrounding and beneath the heater and thermocouple elements are etched away to suspend the element on the substrate and thus to thermally isolate the elements from the substrate. The substrate is etched up to the cold thermocouple junction of the thermocouple elements so the cold junction remains on the substrate.

摘要翻译： 提供了一种使用CMOS技术制造对流加速度计和倾斜传感器装置的方法。 制造集成电路芯片，其包括其上具有集成电路图案的硅衬底，其包括位于衬底中心的加热器元件和位于加热器元件的相对侧上的衬底上的至少第一和第二热电偶元件。 此后，加热器和热电偶元件周围和下方的部分基板被蚀刻掉以将元件悬浮在基板上，从而将元件与基板热隔离。 衬底被蚀刻到热电偶元件的冷热电偶接头处，使得冷接点保留在衬底上。

公开(公告)号：US6107210A

公开(公告)日：2000-08-22

申请号：US136524

申请日：1998-08-19

申请人： Michael Gaitan ,  Edwin D. Bowen ,  Veljko Milanovic

发明人： Michael Gaitan ,  Edwin D. Bowen ,  Veljko Milanovic

IPC分类号： H01L21/764 ,  H01L21/302 ,  H01L21/8238

CPC分类号： H01L21/764

摘要： A method for forming a single cavity in a substrate, which may extend approximately the length of a device located on top of the substrate, and device produced thereby. The device has a length and a width, and may extend approximately the length of the substrate. After locating the device on the surface of the substrate, a first etchant is applied through openings on the surface of the substrate. Subsequently, a second etchant is applied through the same openings on the surface of the substrate. As a result, a single cavity is formed beneath the surface of the device, suspending the device and minimizing electrical coupling.

摘要翻译： 在衬底中形成单个空腔的方法，其可以延伸到位于衬底顶部的器件的大致长度，以及由此产生的器件。 该装置具有长度和宽度，并且可以大致延伸到衬底的长度。 在将器件定位在衬底的表面上之后，通过衬底表面上的开口施加第一蚀刻剂。 随后，通过基板表面上相同的开口施加第二蚀刻剂。 结果，在器件的表面下方形成单个空腔，悬挂该器件并使电耦合最小化。

公开(公告)号：US5606334A

公开(公告)日：1997-02-25

申请号：US410907

申请日：1995-03-27

申请人： Sal G. Amarillas ,  Edwin D. Bowen ,  Frederick J. Verd

发明人： Sal G. Amarillas ,  Edwin D. Bowen ,  Frederick J. Verd

IPC分类号： H01Q19/06 ,  H01Q19/12 ,  H01Q19/13

CPC分类号： H01Q19/12 ,  H01Q19/065 ,  H01Q19/134

摘要： A compact and flat antenna that provides both Direct Broadcast Satellite and local off-air reception. The flat reflector is made of a composite material with multiple reflective radiating surfaces. The multi-stepped reflector combines both diffraction and refractive principals to collimate Radio Frequency signal waves to a short focal point. At the focal point a phase correcting splash plate and lens direct the RF signal through a low loss axis-fed circular waveguide and then to a low noise amplifier. This compact design reduces space, cost and over-all structure, which presents an aesthetically pleasing satellite communication antenna. The antenna aperture includes a VHF/UHF antenna element for reception of local and/or off-air broadcast TV signals eliminating the need and cost to install a separate antenna.

摘要翻译： 一个紧凑而平坦的天线，提供直播广播卫星和当地的空中接收。 平面反射器由具有多个反射辐射表面的复合材料制成。 多级反射镜结合了衍射和折射原理，将射频信号波校准到短焦点。 在焦点处，相位校正飞溅板和透镜将RF信号通过低损耗轴馈送的圆形波导引导到低噪声放大器。 这种紧凑的设计减少了空间，成本和全面的结构，这呈现出美观的卫星通信天线。 天线孔径包括用于接收本地和/或空中广播电视信号的VHF / UHF天线元件，从而消除了安装单独天线的需要和成本。

公开(公告)号：US4320402A

公开(公告)日：1982-03-16

申请号：US166102

申请日：1980-07-07

申请人： Edwin D. Bowen

发明人： Edwin D. Bowen

IPC分类号： H01Q5/00 ,  H01Q5/25 ,  H01Q5/40 ,  H01Q9/04 ,  H01Q21/24 ,  H05K1/16 ,  H01Q1/38 ,  H01Q13/18

CPC分类号： H01Q9/0464 ,  H01Q21/24 ,  H01Q5/25 ,  H01Q5/40 ,  H01Q9/0435 ,  H05K1/16

摘要： A broadband microstrip antenna including two overlapping PC boards. A plurality of concentric spaced apart radiating rings and an upper ground plane layer are etched in the conductive upper surface of the upper PC board. An RF feedline network is etched in the conductive lower surface of the upper PC board. A continuous ground plane layer overlies the lower surface of the lower PC board. Plated through holes in the upper PC board connect a pair of 90.degree. spaced feed points on each of the rings to the feedline network. The feedline network is made of a plurality of conductive strips and matching stubs which are dimensioned and interconnected to permit the transmission/reception of circular polarized RF electromagnetic radiation while also matching the impedance of the rings to the impedance of a plurality of coaxial connectors mounted to the lower PC board.

摘要翻译： 宽带微带天线，包括两个重叠的PC板。 在上PC板的导电上表面中蚀刻多个同心间隔的辐射环和上接地平面层。 在上PC板的导电下表面中蚀刻RF馈线网络。 连续的接地层层叠在下PC板的下表面上。 通过上PC板上的孔进行电镀，将每个环上的一对90°间隔的馈电点连接到馈线网络。 馈线网络由多个导电条和匹配短截线制成，其尺寸和互连以允许圆偏振RF电磁辐射的发射/接收，同时还将环的阻抗与多个安装到 下PC板。

公开(公告)号：US06303976B1

公开(公告)日：2001-10-16

申请号：US09571179

申请日：2000-05-16

申请人： Michael Gaitan ,  Edwin D. Bowen ,  Veljko Milanovic

发明人： Michael Gaitan ,  Edwin D. Bowen ,  Veljko Milanovic

IPC分类号： H01L2906

CPC分类号： H01L21/764

摘要： A method for forming a single cavity in a substrate, which may extend approximately the length of a device located on top of the substrate, and device produced thereby. The device has a length and a width, and may extend approximately the length of the substrate. After locating the device on the surface of the substrate, a first etchant is applied through openings on the surface of the substrate. Subsequently, a second etchant is applied through the same openings on the surface of the substrate. As a result, a single cavity is formed beneath the surface of the device, suspending the device and minimizing electrical coupling.

摘要翻译： 在衬底中形成单个空腔的方法，其可以延伸到位于衬底顶部的器件的大致长度，以及由此产生的器件。 该装置具有长度和宽度，并且可以大致延伸到衬底的长度。 在将器件定位在衬底的表面上之后，通过衬底表面上的开口施加第一蚀刻剂。 随后，通过基板表面上相同的开口施加第二蚀刻剂。 结果，在器件的表面下方形成单个空腔，悬挂该器件并使电耦合最小化。