公开(公告)号：US06747731B2

公开(公告)日：2004-06-08

申请号：US10607545

申请日：2003-06-27

申请人： Eric W. A. Janssen ,  Marcel J. M. Renkens ,  Jakob Vijfvinkel ,  Ronald M. Schneider ,  Theo H. J. Bisschops ,  Rob Tabor

发明人： Eric W. A. Janssen ,  Marcel J. M. Renkens ,  Jakob Vijfvinkel ,  Ronald M. Schneider ,  Theo H. J. Bisschops ,  Rob Tabor

IPC分类号： G03B2742

CPC分类号： F16C29/025 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  F16F15/0275 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/709

摘要： A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.

摘要翻译： 平版印刷投影装置包括真空室，该真空室具有包围第一和第二目标表中的至少一个的真空室，真空室内的每个物体台被连接到用于相对于设备的投影系统定位物体台的定位装置 。 定位装置设置有气动重力补偿器，该气动重力补偿器包括与对象台相关联的活塞; 充气压力室，压力室中的气体作用在可移动构件上，以至少部分地抵消物体台的重量; 气体轴承; 以及用于将通过可动构件和圆柱形壳体的支承表面之间的间隙排出的气体排出到真空室的抽空装置。 部分柔性杆将活塞连接到物体台。

公开(公告)号：US06597429B2

公开(公告)日：2003-07-22

申请号：US09833077

申请日：2001-04-12

申请人： Eric W. A. Janssen ,  Marcel J. M. Renkens ,  Jakob Vijfvinkel ,  Ronald M. Schneider ,  Theo H. J. Bisschops ,  Rob Tabor

发明人： Eric W. A. Janssen ,  Marcel J. M. Renkens ,  Jakob Vijfvinkel ,  Ronald M. Schneider ,  Theo H. J. Bisschops ,  Rob Tabor

IPC分类号： G03B2742

CPC分类号： F16C29/025 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  F16F15/0275 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/709

摘要： A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.