公开(公告)号：US20080065696A1

公开(公告)日：2008-03-13

申请号：US11936971

申请日：2007-11-08

申请人： Ejaj Ahmed ,  Charles Archie ,  Stephen Goodrich ,  Eric Solecky ,  Georgios Vakas ,  Erwin Weissman ,  Lin Zhou

发明人： Ejaj Ahmed ,  Charles Archie ,  Stephen Goodrich ,  Eric Solecky ,  Georgios Vakas ,  Erwin Weissman ,  Lin Zhou

IPC分类号： G06F17/30 ,  G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/31459 ,  G05B2219/45031 ,  Y02P90/20

摘要： A method of preparing recipes for operating a metrology tool, wherein each recipe comprises a set of instructions for measuring at least one dimension in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different dimensions in a microelectronic feature by creating a summary of a recipes used by the metrology tool, and adding to the summary categorization attributes to identify the recipe summary for retrieval from the database. There is provided a desired recipe having instructions for measuring one or more desired dimensions, the desired recipe or portion thereof including a summary of parameters relating to metrology tool function with respect to the microelectronic feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences between the instructions in the desired recipe and the instructions in the database, modifying the instructions in the desired recipe to conform to the instructions in the database, Verifying the desired recipe prior to using the modified desired recipe by the metrology tool, and using the desired recipe to execute a microelectronic feature measurement on the metrology tool.

摘要翻译： 一种制备用于操作计量工具的配方的方法，其中每个配方包括用于测量微电子特征中的至少一个维度的一组指令。 数据库包括多个已知的指令，其具有用于通过创建由计量工具使用的配方的概要来测量微电子特征中的不同维度的最为已知的方法，并且添加到摘要分类属性以识别用于从数据库检索的配方摘要 。 提供了具有用于测量一个或多个期望尺寸的指令的期望配方，所需的配方或其部分包括与待测量的微电子特征尺寸有关的计量工具功能的参数的总结。 该方法包括将所需配方中的指令与数据库中的指令进行比较，识别所需配方中的指令与数据库中的指令之间的差异，修改所需配方中的指令以符合数据库中的指令，验证 在由计量工具使用修改的所需配方之前使用期望的配方，并且使用期望的配方在计量工具上执行微电子特征测量。