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公开(公告)号：US20080065696A1
公开(公告)日：2008-03-13
申请号：US11936971
申请日：2007-11-08
申请人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissman , Lin Zhou
发明人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissman , Lin Zhou
CPC分类号： G05B19/41865 , G05B2219/31459 , G05B2219/45031 , Y02P90/20
摘要： A method of preparing recipes for operating a metrology tool, wherein each recipe comprises a set of instructions for measuring at least one dimension in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different dimensions in a microelectronic feature by creating a summary of a recipes used by the metrology tool, and adding to the summary categorization attributes to identify the recipe summary for retrieval from the database. There is provided a desired recipe having instructions for measuring one or more desired dimensions, the desired recipe or portion thereof including a summary of parameters relating to metrology tool function with respect to the microelectronic feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences between the instructions in the desired recipe and the instructions in the database, modifying the instructions in the desired recipe to conform to the instructions in the database, Verifying the desired recipe prior to using the modified desired recipe by the metrology tool, and using the desired recipe to execute a microelectronic feature measurement on the metrology tool.
摘要翻译： 一种制备用于操作计量工具的配方的方法，其中每个配方包括用于测量微电子特征中的至少一个维度的一组指令。 数据库包括多个已知的指令，其具有用于通过创建由计量工具使用的配方的概要来测量微电子特征中的不同维度的最为已知的方法，并且添加到摘要分类属性以识别用于从数据库检索的配方摘要 。 提供了具有用于测量一个或多个期望尺寸的指令的期望配方，所需的配方或其部分包括与待测量的微电子特征尺寸有关的计量工具功能的参数的总结。 该方法包括将所需配方中的指令与数据库中的指令进行比较，识别所需配方中的指令与数据库中的指令之间的差异，修改所需配方中的指令以符合数据库中的指令，验证 在由计量工具使用修改的所需配方之前使用期望的配方，并且使用期望的配方在计量工具上执行微电子特征测量。
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公开(公告)号：US20070192056A1
公开(公告)日：2007-08-16
申请号：US11307640
申请日：2006-02-15
申请人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissmann , Lin Zhou
发明人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissmann , Lin Zhou
IPC分类号： G06F15/00
CPC分类号： G05B19/41865 , G05B2219/31459 , G05B2219/45031 , Y02P90/20
摘要： A method of preparing recipes for operating a metrology tool, each recipe including a set of instructions for measuring dimensions in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different feature dimensions by creating a summary of a recipes used by the tool, and adding categorization attributes to identify the summary for retrieval from the database. There is provided a desired recipe having instructions for measuring desired dimensions, including a summary of parameters relating to tool function for the feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences there between, modifying the desired recipe instructions to conform to the database instructions, verifying the desired recipe prior to using the modified desired recipe by the tool, and using the desired recipe to execute a feature measurement on the tool.
摘要翻译： 一种制备用于操作计量工具的配方的方法，每个配方包括用于测量微电子特征中的尺寸的一组指令。 数据库包括多个已知指令，其具有用于通过创建工具使用的配方的摘要来测量不同特征尺寸的最为已知的方法，并且添加分类属性以识别用于从数据库检索的摘要。 提供了具有用于测量所需尺寸的指令的期望配方，包括与要测量的特征尺寸的工具功能相关的参数的总结。 该方法包括将所需配方中的指令与数据库中的指令进行比较，识别其间的差异，修改所需配方指令以符合数据库指令，在使用工具进行修改的所需配方之前验证所需的配方;以及 使用所需的配方在工具上执行功能测量。
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3.发明申请Measurement Tool Monitoring Using Fleet Measurement Precision and Tool Matching Precision Analysis 失效使用车队测量的测量工具监控精度和刀具匹配精度分析公开(公告)号：US20110172958A1
公开(公告)日：2011-07-14
申请号：US12687145
申请日：2010-01-14
CPC分类号： G05B23/0237
摘要： A method for monitoring a fleet comprising a plurality of measurement tools includes collecting data for a current time interval from the fleet by a data collection module; and performing fleet measurement precision (FMP)/tool matching precision (TMP) analysis on the collected data by a FMP/TMP analysis module, wherein FMP/TMP analysis comprises determining a TMP for each of the plurality of measurement tools using a static and a dynamic benchmark measuring system (BMS); and determining a FMP for the fleet using the static and the dynamic BMS; and determining if the FMP is above a predetermined threshold by a fleet improvement module, and in the event the FMP is above the predetermined threshold, identifying at least one tool of the plurality of tools as poorly performing based on the TMPs; and flagging the identified at least one tool for improvement.
摘要翻译： 一种用于监视包括多个测量工具的车队的方法，包括：通过数据采集模块从车队收集当前时间间隔的数据; 以及通过FMP / TMP分析模块对所收集的数据执行车队测量精度（FMP）/工具匹配精度（TMP）分析，其中FMP / TMP分析包括使用静态和静态的来确定多个测量工具中的每一个的TMP 动态基准测量系统（BMS）; 并使用静态和动态BMS确定船队的FMP; 以及通过车队改进模块确定所述FMP是否高于预定阈值，并且在所述FMP高于所述预定阈值的情况下，基于所述TMP将所述多个工具中的至少一个工具识别为差的性能; 并标记所识别的至少一个工具以进行改进。
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4.发明申请DETERMINING FLEET MATCHING PROBLEM AND ROOT CAUSE ISSUE FOR MEASUREMENT SYSTEM 有权确定FLEET匹配问题和根本原因测量系统的问题公开(公告)号：US20080033692A1
公开(公告)日：2008-02-07
申请号：US11865797
申请日：2007-10-02
申请人： Charles Archie , George Banke , Eric Solecky
发明人： Charles Archie , George Banke , Eric Solecky
IPC分类号： G06F17/18
CPC分类号： G03F7/70516 , G01D18/00 , G03F7/70616
摘要： Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause of a matching problem, and for determining a fleet measurement precision metric.
摘要翻译： 公开了方法，系统和程序产品，用于确定被测量的测量系统（MSUT）是否匹配包括至少一个其他测量系统的机组。 本发明实现了用于分析匹配问题的现实参数，包括单个刀具精度，刀具对刀具非线性和刀具到刀具补偿。 然后实现将这些参数组合成单个值的底线工具匹配精度度量。 本发明还包括用于确定匹配问题的根本原因以及用于确定船队测量精度度量的方法。
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公开(公告)号：US20060195295A1
公开(公告)日：2006-08-31
申请号：US11245865
申请日：2005-10-07
申请人： Charles Archie , George Banke , Eric Solecky
发明人： Charles Archie , George Banke , Eric Solecky
CPC分类号： G01B21/045 , G01D18/00
摘要： Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause issue of a matching problem, and for determining a fleet measurement precision metric. Method, system and program product are also disclosed for attempting to determine a root cause of a subject problem related to at least one of a measurement system under test (MSUT) and a fleet of at least one other measurement system.
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6.发明申请Determining fleet matching problem and root cause issue for measurement system 有权确定舰队匹配问题和测量系统的根本原因公开(公告)号：US20060195294A1
公开(公告)日：2006-08-31
申请号：US11065740
申请日：2005-02-25
申请人： Charles Archie , George Banke , Eric Solecky
发明人： Charles Archie , George Banke , Eric Solecky
CPC分类号： G03F7/70516 , G01D18/00 , G03F7/70616
摘要： Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause of a matching problem, and for determining a fleet measurement precision metric.
摘要翻译： 公开了方法，系统和程序产品，用于确定被测量的测量系统（MSUT）是否匹配包括至少一个其他测量系统的机组。 本发明实现了用于分析匹配问题的现实参数，包括单个刀具精度，刀具对刀具非线性和刀具到刀具补偿。 然后实现将这些参数组合成单个值的底线工具匹配精度度量。 本发明还包括用于确定匹配问题的根本原因以及用于确定船队测量精度度量的方法。
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7.发明授权Measurement tool monitoring using fleet measurement precision and tool matching precision analysis 失效测量工具监控采用车队测量精度和刀具匹配精度分析公开(公告)号：US08467993B2
公开(公告)日：2013-06-18
申请号：US12687145
申请日：2010-01-14
CPC分类号： G05B23/0237
摘要： A method for monitoring a fleet comprising a plurality of measurement tools includes collecting data for a current time interval from the fleet by a data collection module; and performing fleet measurement precision (FMP)/tool matching precision (TMP) analysis on the collected data by a FMP/TMP analysis module, wherein FMP/TMP analysis comprises determining a TMP for each of the plurality of measurement tools using a static and a dynamic benchmark measuring system (BMS); and determining a FMP for the fleet using the static and the dynamic BMS; and determining if the FMP is above a predetermined threshold by a fleet improvement module, and in the event the FMP is above the predetermined threshold, identifying at least one tool of the plurality of tools as poorly performing based on the TMPs; and flagging the identified at least one tool for improvement.
摘要翻译： 一种用于监视包括多个测量工具的车队的方法，包括：通过数据采集模块从车队收集当前时间间隔的数据; 以及通过FMP / TMP分析模块对所收集的数据执行车队测量精度（FMP）/工具匹配精度（TMP）分析，其中FMP / TMP分析包括使用静态和静态的来确定多个测量工具中的每一个的TMP 动态基准测量系统（BMS）; 并使用静态和动态BMS确定船队的FMP; 以及通过车队改进模块确定所述FMP是否高于预定阈值，并且在所述FMP高于所述预定阈值的情况下，基于所述TMP将所述多个工具中的至少一个工具识别为差的性能; 并标记所识别的至少一个工具以进行改进。
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公开(公告)号：US20070192049A1
公开(公告)日：2007-08-16
申请号：US11307641
申请日：2006-02-15
申请人： Charles Archie , George Banke , Eric Solecky
发明人： Charles Archie , George Banke , Eric Solecky
CPC分类号： G01D18/00
摘要： Optimizing a measurement system under test (MSUT) is disclosed. In one embodiment, a method includes selecting a first set of adjustable parameters of the MSUT that affect a quality metric for the MSUT, calculating the quality metric over a range of values of each adjustable parameter in the first set of adjustable parameters, generating a first multidimensional response space based on the calculating step, and determining which value of each adjustable parameter optimizes the quality metric based on the first multidimensional response space. The multidimensional response space may be stored for later recall for other optimization exercises.
摘要翻译： 公开了优化测试系统（MSUT）。 在一个实施例中，一种方法包括：选择影响MSUT的质量度量的MSUT的第一组可调参数，在第一组可调参数中的每个可调参数的值的范围内计算质量度量，生成第一 基于所述计算步骤的多维响应空间，以及基于所述第一多维响应空间来确定每个可调参数的哪个值优化所述质量度量。 可以存储多维响应空间用于以后的召回用于其他优化练习。
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9.发明申请FORTIFIED, COMPENSATED AND UNCOMPENSATED PROCESS-SENSITIVE SCATTEROMETRY TARGETS 失效经过授权，补偿和未经确认的过程敏感散射目标公开(公告)号：US20050089775A1
公开(公告)日：2005-04-28
申请号：US10605751
申请日：2003-10-23
申请人： Charles Archie , Matthew Sendelbach
发明人： Charles Archie , Matthew Sendelbach
CPC分类号： G03F7/70641 , G03F7/70683 , H01L22/34
摘要： A scatterometry target is provided in which a plurality of parallel elongated features are placed, each having a length in a lengthwise direction. A plurality of stress-relief features are disposed at a plurality of positions along the length of each elongated feature.
摘要翻译： 提供散射测量目标，其中放置多个平行的细长特征，每个具有沿长度方向的长度。 多个应力消除特征被布置在沿着每个细长特征的长度的多个位置处。
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公开(公告)号：US20050222804A1
公开(公告)日：2005-10-06
申请号：US10524286
申请日：2002-12-20
申请人： Charles Archie , G. Banke Jr
发明人： Charles Archie , G. Banke Jr
CPC分类号： G01B21/045 , G03F7/70483 , G03F7/70616 , H01L22/12
摘要： Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation.
摘要翻译： 通过基于精度和精度确定总测量不确定度（TMU）来评估和优化计量仪器的方法和相关程序产品。 TMU基于线性回归分析计算，并从净残差中去除参考测量系统不确定度（URMS）。 TMU提供了客观和更准确的表示，测试中的测量系统是否具有感测真实产品变化的能力。
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