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公开(公告)号：US20080065696A1
公开(公告)日：2008-03-13
申请号：US11936971
申请日：2007-11-08
申请人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissman , Lin Zhou
发明人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissman , Lin Zhou
CPC分类号： G05B19/41865 , G05B2219/31459 , G05B2219/45031 , Y02P90/20
摘要： A method of preparing recipes for operating a metrology tool, wherein each recipe comprises a set of instructions for measuring at least one dimension in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different dimensions in a microelectronic feature by creating a summary of a recipes used by the metrology tool, and adding to the summary categorization attributes to identify the recipe summary for retrieval from the database. There is provided a desired recipe having instructions for measuring one or more desired dimensions, the desired recipe or portion thereof including a summary of parameters relating to metrology tool function with respect to the microelectronic feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences between the instructions in the desired recipe and the instructions in the database, modifying the instructions in the desired recipe to conform to the instructions in the database, Verifying the desired recipe prior to using the modified desired recipe by the metrology tool, and using the desired recipe to execute a microelectronic feature measurement on the metrology tool.
摘要翻译： 一种制备用于操作计量工具的配方的方法，其中每个配方包括用于测量微电子特征中的至少一个维度的一组指令。 数据库包括多个已知的指令，其具有用于通过创建由计量工具使用的配方的概要来测量微电子特征中的不同维度的最为已知的方法，并且添加到摘要分类属性以识别用于从数据库检索的配方摘要 。 提供了具有用于测量一个或多个期望尺寸的指令的期望配方，所需的配方或其部分包括与待测量的微电子特征尺寸有关的计量工具功能的参数的总结。 该方法包括将所需配方中的指令与数据库中的指令进行比较，识别所需配方中的指令与数据库中的指令之间的差异，修改所需配方中的指令以符合数据库中的指令，验证 在由计量工具使用修改的所需配方之前使用期望的配方，并且使用期望的配方在计量工具上执行微电子特征测量。
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公开(公告)号：US20070192056A1
公开(公告)日：2007-08-16
申请号：US11307640
申请日：2006-02-15
申请人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissmann , Lin Zhou
发明人： Ejaj Ahmed , Charles Archie , Stephen Goodrich , Eric Solecky , Georgios Vakas , Erwin Weissmann , Lin Zhou
IPC分类号： G06F15/00
CPC分类号： G05B19/41865 , G05B2219/31459 , G05B2219/45031 , Y02P90/20
摘要： A method of preparing recipes for operating a metrology tool, each recipe including a set of instructions for measuring dimensions in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different feature dimensions by creating a summary of a recipes used by the tool, and adding categorization attributes to identify the summary for retrieval from the database. There is provided a desired recipe having instructions for measuring desired dimensions, including a summary of parameters relating to tool function for the feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences there between, modifying the desired recipe instructions to conform to the database instructions, verifying the desired recipe prior to using the modified desired recipe by the tool, and using the desired recipe to execute a feature measurement on the tool.
摘要翻译： 一种制备用于操作计量工具的配方的方法，每个配方包括用于测量微电子特征中的尺寸的一组指令。 数据库包括多个已知指令，其具有用于通过创建工具使用的配方的摘要来测量不同特征尺寸的最为已知的方法，并且添加分类属性以识别用于从数据库检索的摘要。 提供了具有用于测量所需尺寸的指令的期望配方，包括与要测量的特征尺寸的工具功能相关的参数的总结。 该方法包括将所需配方中的指令与数据库中的指令进行比较，识别其间的差异，修改所需配方指令以符合数据库指令，在使用工具进行修改的所需配方之前验证所需的配方;以及 使用所需的配方在工具上执行功能测量。
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公开(公告)号：USD926645S1
公开(公告)日：2021-08-03
申请号：US29661910
申请日：2018-08-31
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公开(公告)号：USD886698S1
公开(公告)日：2020-06-09
申请号：US29661885
申请日：2018-08-31
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公开(公告)号：USD867246S1
公开(公告)日：2019-11-19
申请号：US29661901
申请日：2018-08-31
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公开(公告)号：USD865601S1
公开(公告)日：2019-11-05
申请号：US29661912
申请日：2018-08-31
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公开(公告)号：USD860864S1
公开(公告)日：2019-09-24
申请号：US29662557
申请日：2018-09-06
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8.发明授权公开(公告)号：US08232322B2
公开(公告)日：2012-07-31
申请号：US12500438
申请日：2009-07-09
申请人： Anthony East , Alan Letton , Suseela Kanamathareddy , Bryant J. Pudil , Stephen Goodrich , Michael B. Hicks , Yun Choe
发明人： Anthony East , Alan Letton , Suseela Kanamathareddy , Bryant J. Pudil , Stephen Goodrich , Michael B. Hicks , Yun Choe
CPC分类号： A61K9/0024 , A61K47/34 , A61L27/34 , A61L27/54 , A61L2300/21 , A61L2300/41 , A61L2300/416 , A61L2300/604
摘要： Anhydride polymers that release active or activatable agent(s) have pre-selected properties such as molecular weight, flexibility, hardness, adhesiveness, and other valuable properties. The polymers are suitable for use in compositions, formulations, coatings, devices, and the like that benefit from the controlled release of an agent(s) over a period of time. The polymers are prepared by a process involving various alternative and sequential steps that allow the design a priori of products with specific characteristics. The polymers are suitable as delivery systems, either by themselves, as compositions, formulations or devices.
摘要翻译： 释放活性或可活化剂的酐聚合物具有预先选择的性质，例如分子量，柔韧性，硬度，粘合性和其它有价值的性质。 聚合物适用于在一段时间内受益于试剂的受控释放的组合物，制剂，涂料，装置等中。 聚合物通过涉及各种替代和顺序步骤的方法制备，其允许先验地设计具有特定特征的产品。 聚合物本身适合作为递送系统，作为组合物，制剂或装置。
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9.发明申请公开(公告)号：US20050048121A1
公开(公告)日：2005-03-03
申请号：US10861881
申请日：2004-06-04
申请人： Anthony East , Alan Letton , Suseela Kanamathareddy , Bryant Pudil , Stephen Goodrich , Michael Hicks , Karen Giroux , Yun Choe
发明人： Anthony East , Alan Letton , Suseela Kanamathareddy , Bryant Pudil , Stephen Goodrich , Michael Hicks , Karen Giroux , Yun Choe
CPC分类号： A61K9/0024 , A61K47/34 , A61L27/34 , A61L27/54 , A61L2300/21 , A61L2300/41 , A61L2300/416 , A61L2300/604
摘要： Anhydride polymers that release active or activatable agent(s) have pre-selected properties such as molecular weight, flexibility, hardness, adhesiveness, and other valuable properties. The polymers are suitable for use in compositions, formulations, coatings, devices, and the like that benefit from the controlled release of an agent(s) over a period of time. The polymers are prepared by a process involving various alternative and sequential steps that allow the design a priori of products with specific characteristics. The polymers are suitable as delivery systems, either by themselves, as compositions, formulations or devices.
摘要翻译： 释放活性或可活化剂的酐聚合物具有预先选择的性质，例如分子量，柔韧性，硬度，粘合性和其它有价值的性质。 聚合物适用于在一段时间内受益于试剂的受控释放的组合物，制剂，涂料，装置等中。 聚合物通过涉及各种替代和顺序步骤的方法制备，其允许先验地设计具有特定特征的产品。 聚合物本身适合作为递送系统，作为组合物，制剂或装置。
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公开(公告)号：USD890371S1
公开(公告)日：2020-07-14
申请号：US29661899
申请日：2018-08-31
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