公开(公告)号：US20070137576A1

公开(公告)日：2007-06-21

申请号：US11376850

申请日：2006-03-16

Applicant: Peter F. Kurunczi ,  Russell Low ,  Alexander S. Perel ,  Eric R. Cobb ,  Ethan Adam Wright

Inventor： Peter F. Kurunczi ,  Russell Low ,  Alexander S. Perel ,  Eric R. Cobb ,  Ethan Adam Wright

IPC: H01J7/24 ,  C23C16/00

CPC classification number: H01J37/3171 ,  H01J37/026 ,  H01J2237/0041 ,  H01J2237/0044

Abstract: A technique for providing an inductively coupled radio frequency plasma flood gun is disclosed. In one particular exemplary embodiment, the technique may be realized as a plasma flood gun in an ion implantation system. The plasma flood gun may comprise: a plasma chamber having one or more apertures; a gas source capable of supplying at least one gaseous substance to the plasma chamber; and a power source capable of inductively coupling radio frequency electrical power into the plasma chamber to excite the at least one gaseous substance to generate a plasma. Entire inner surface of the plasma chamber may be free of metal-containing material and the plasma may not be exposed to any metal-containing component within the plasma chamber. In addition, the one or more apertures may be wide enough for at least one portion of charged particles from the plasma to flow through.

Abstract translation: 公开了一种用于提供电感耦合射频等离子体喷枪的技术。 在一个特定的示例性实施例中，该技术可以被实现为离子注入系统中的等离子体喷枪。 等离子体喷枪可以包括：具有一个或多个孔的等离子体室; 能够向所述等离子体室供给至少一种气态物质的气体源; 以及能够将射频电力感应耦合到等离子体室中以激发至少一种气态物质以产生等离子体的电源。 等离子体室的整个内表面可以没有含金属的材料，并且等离子体可能不暴露于等离子体室内的任何含金属的组分。 此外，一个或多个孔可以足够宽以使来自等离子体的带电粒子的至少一部分流过。