Vacuum infiltration of underfill material for flip-chip devices
    1.
    发明授权
    Vacuum infiltration of underfill material for flip-chip devices 失效
    用于倒装芯片的底部填充材料的真空渗透

    公开(公告)号:US5203076A

    公开(公告)日:1993-04-20

    申请号:US812332

    申请日:1991-12-23

    IPC分类号: H01L21/56

    摘要: A method of attaching an integrated circuit (10) to a substrate (20) starts with electrically interconnecting (14) the integrated circuit on the substrate. Next, a bead of underfill material (22) is provided on the substrate (20) about the periphery (24) of the integrated circuit (10). At least a partial vacuum (34) is then applied to the integrated circuit (10) and the substrate (20) to substantially evacuate the area (18) between the integrated circuit (10) and the substrate (20). Finally, fluid pressure (42) is applied to the integrated circuit (10) and the substrate (20) to force at least a portion of the underfill material (22) into the area (18) between the integrated circuit (10) and the substrate (20).

    摘要翻译: 将集成电路(10)附接到衬底(20)的方法从将衬底上的集成电路电连接(14)开始。 接下来,围绕集成电路(10)的周边(24)在基板(20)上设置有底部填充材料(22)的小珠。 至少部分真空(34)然后被施加到集成电路(10)和基板(20),以基本上抽出集成电路(10)和基板(20)之间的区域(18)。 最后,将流体压力(42)施加到集成电路(10)和基板(20)以迫使底部填充材料(22)的至少一部分进入集成电路(10)和集成电路(10)之间的区域(18) 衬底(20)。