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公开(公告)号：US20110006208A1
公开(公告)日：2011-01-13
申请号：US12833750
申请日：2010-07-09
CPC分类号： G01N23/2251 , G01N2223/611 , H01J37/20 , H01J37/26 , H01J2237/2003 , H01J2237/2008
摘要： The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes 504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample.Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.
摘要翻译： 本发明描述了一种在电子显微镜中检查样品的方法。 样品载体500显示连接焊盘505,508与待放置样品的区域A的电极504,507。 将样品置于样品载体上后，导电图案沉积在样品上，以便可以对样品的局部化部分施加电压和电流。 在样品上施加图案可以通过例如光束沉积或喷墨打印进行。 本发明还教导在样品中构建电子部件，例如电阻器，电容器，电感器和有源元件，例如FET。
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公开(公告)号：US08389936B2
公开(公告)日：2013-03-05
申请号：US12833750
申请日：2010-07-09
CPC分类号： G01N23/2251 , G01N2223/611 , H01J37/20 , H01J37/26 , H01J2237/2003 , H01J2237/2008
摘要： The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes 504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample.Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.
摘要翻译： 本发明描述了一种在电子显微镜中检查样品的方法。 样品载体500显示连接焊盘505,508与待放置样品的区域A的电极504,507。 将样品置于样品载体上后，导电图案沉积在样品上，以便可以对样品的局部化部分施加电压和电流。 在样品上施加图案可以通过例如光束沉积或喷墨打印进行。 本发明还教导在样品中构建电子部件，例如电阻器，电容器，电感器和有源元件，例如FET。
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