公开(公告)号：US20110220216A1

公开(公告)日：2011-09-15

申请号：US13114346

申请日：2011-05-24

申请人： Tsunenaga NAKASHIMA ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

发明人： Tsunenaga NAKASHIMA ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

IPC分类号： B23P11/00

CPC分类号： G03F7/162 ,  Y10T137/0402

摘要： A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

摘要翻译： 一种液体处理装置，通过从供给喷嘴向所述表面供给处理液，处理基本上水平地保持在壳体的台架上的基板的表面。 液体处理装置包括：杯体，其设置成围绕保持在基板保持部的基板侧面，杯体从其上方可拆卸地安装在壳体内的基座上; 可拆卸地保持杯体的杯体保持部; 以及升降机构，其在所述杯体安装在所述基体上的第一位置与位于所述第一位置上方的第二位置之间上下移动所述杯体保持部。

公开(公告)号：US20110265896A1

公开(公告)日：2011-11-03

申请号：US13094390

申请日：2011-04-26

申请人： Tsunenaga NAKASHIMA ,  Shunsuke SHIRAISHI ,  Toshihide TAKEO

发明人： Tsunenaga NAKASHIMA ,  Shunsuke SHIRAISHI ,  Toshihide TAKEO

IPC分类号： F03B11/02

CPC分类号： B05B9/03 ,  B05B15/30 ,  Y10T137/314 ,  Y10T137/8593 ,  Y10T137/86332

摘要： A process liquid feed mechanism includes a fixed cylinder with a thread around a peripheral surface, a movable cylinder provided coaxially with the fixed cylinder, a process liquid feed tube and an operating rotator. The movable cylinder is screw-engaged to the fixed cylinder. The process liquid feed tube is fixed in an axial position relative to the movable cylinder and passes through the lid and a cylinder including the fixed cylinder and the movable cylinder to be axially movable relative to the cylinder. The operating rotator includes an annular portion provided coaxially with the movable cylinder. An engaging portion and an engaged portion, which are provided in the movable cylinder and the annular portion respectively, rotate the movable cylinder through engagement therebetween with rotation of the operating rotator and release the engagement as a torque on the movable cylinder increases.

摘要翻译： 工艺液体供给机构包括具有围绕周面的螺纹的固定圆筒，与固定圆筒同轴设置的可动圆筒，工作液体供给管和操作旋转器。 可动气缸与固定气缸螺纹接合。 工艺液体供给管相对于可动气缸固定在轴向位置，并且通过盖子和包括固定气缸和可动气缸的气缸相对于气缸轴向移动。 操作旋转器包括与可动气缸同轴设置的环形部分。 分别设置在可动气缸和环形部分中的接合部分和接合部分通过其间的啮合而使可动气缸旋转，并且随着可动气缸上的转矩的增加而释放接合。

公开(公告)号：US20110159701A1

公开(公告)日：2011-06-30

申请号：US12973043

申请日：2010-12-20

申请人： Tsunenaga NAKASHIMA ,  Shinichi HAYASHI ,  Akihiro FUJIMOTO ,  Takahiro OOKUBO

发明人： Tsunenaga NAKASHIMA ,  Shinichi HAYASHI ,  Akihiro FUJIMOTO ,  Takahiro OOKUBO

IPC分类号： H01L21/312 ,  B05C5/00

CPC分类号： B05C5/0237 ,  B05C5/0225 ,  B05C13/02 ,  G03F7/162

摘要： The present disclosure provides a chemical liquid supply nozzle capable of suppressing the drying process of chemical liquid with a low cost. The chemical liquid supply nozzle is provided with a cutoff valve and a suction unit that sucks chemical liquid to a suction flow path at a nozzle main body connected to a front end of flow path member. Accordingly, the chemical liquid remaining at the downstream side of the cutoff valve after the chemical liquid is discharged, is sucked toward the upstream side of the cutoff valve and removed, to thereby suppress the drying and solidifying process of the chemical liquid at the chemical liquid flow path. Also, there is no need to block the chemical liquid flow path by sucking thinner at the downstream side of chemical liquid flow path, and the number of dummy dispense may be reduced, thereby reducing an overall operation cost of the process.

摘要翻译： 本公开提供了能够以低成本抑制化学液体的干燥过程的化学液体供给喷嘴。 化学液体供给喷嘴设置有切断阀和吸引单元，该吸引单元将化学液体吸附到与流路构件的前端连接的喷嘴主体处的吸入流路。 因此，在排出药液之后残留在截止阀的下游侧的化学液体被吸向截止阀的上游侧并除去，从而抑制药液的化学液的干燥和固化过程 流路。 此外，不需要通过在化学液体流动路径的下游侧吸取稀薄剂来阻止化学液体流动路径，并且可以减少虚拟分配的数量，从而降低了处理的整体操作成本。