公开(公告)号：US11746255B2

公开(公告)日：2023-09-05

申请号：US15904420

申请日：2018-02-25

申请人： Alex P. G. Robinson ,  Guy Dawson ,  Alan G. Brown ,  Thomas Lada ,  John Roth ,  Edward Jackson

发明人： Alex P. G. Robinson ,  Guy Dawson ,  Alan G. Brown ,  Thomas Lada ,  John Roth ,  Edward Jackson

IPC分类号： H01L21/033 ,  C08G59/50 ,  C09D163/04

CPC分类号： C09D163/04 ,  C08G59/5033 ,  H01L21/0332

摘要： Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative substituted with an amine and a crosslinking agent. The formulation is drain compatible with other solvents used in the semiconductor industry.

公开(公告)号：US20190127604A1

公开(公告)日：2019-05-02

申请号：US15904420

申请日：2018-02-25

申请人： Alex P. G. Robinson ,  Guy Dawson ,  Allan G. Brown ,  Thomas Lada ,  John Roth ,  Edward Jackson

发明人： Alex P. G. Robinson ,  Guy Dawson ,  Allan G. Brown ,  Thomas Lada ,  John Roth ,  Edward Jackson

IPC分类号： C09D163/04

摘要： Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative substituted with an amine and a crosslinking agent. The formulation is drain compatible with other solvents used in the semiconductor industry.