公开(公告)号：US4211924A

公开(公告)日：1980-07-08

申请号：US7647

申请日：1979-01-29

申请人： Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

发明人： Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

IPC分类号： H01J37/22 ,  H01J37/295

CPC分类号： H01J37/28 ,  H01J37/224 ,  H01J37/2955

摘要： An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.

摘要翻译： 一种改进的透射型扫描带电粒子束显微镜，包括电视照相机管和用于产生和显示被检样本的衍射图像的电视显示管。 本发明的改进包括在显微镜中沿着光束路径设置在样品后面的光束的透射荧光屏中的光学装置，适于将荧光屏成像在电视摄像机管的目标上 以及用于整体地检测从荧光屏发出的辐射的检测器装置。