公开(公告)号：US06038106A

公开(公告)日：2000-03-14

申请号：US438317

申请日：1995-05-10

申请人： Joseph Adam Aboaf ,  Edward Virgil Denison ,  Jules David Friedman ,  Vincent Noel Kahwaty ,  Herman Carl Kluge, II

发明人： Joseph Adam Aboaf ,  Edward Virgil Denison ,  Jules David Friedman ,  Vincent Noel Kahwaty ,  Herman Carl Kluge, II

IPC分类号： G11B5/11 ,  G11B5/17 ,  G11B5/31 ,  G11B5/39 ,  G11B5/40

CPC分类号： G11B5/3903 ,  G11B5/3146 ,  G11B5/3967 ,  G11B5/40 ,  G11B5/11 ,  G11B5/17 ,  G11B5/3133 ,  G11B5/3163

摘要： A magneto-resistive read/write tape head is provided for reading and writing to tape media along a tape head face. The tape head comprises a plurality of modules, each module comprising a read element and a write element spaced apart and terminating at the tape head face and formed over a substrate. The read element comprises a soft film bias layer and a hard film bias layer butted against the SFB layer. The write element comprises two pole tips spaced apart by a gap. The tape head further includes a plurality of activating conducting coil turns operatively associated with the write element and covered by a cross-linked photoresist and positioned between the gap and one of the pole tips and set back from the tape head face. The tape head has at least one of the following elements: (a) a wear shield between the read element and the write element for limiting wear of the gap between the two pole tips, the wear shield being grounded for decoupling read and write functions of the tape head, for allowing same module read/servo/write functions simultaneously, and for grounding static charge from the tape media; (b) a layer of electrically conductive and corrosion-resis tant material, such as rhodium, under the hard film bias layer to reduce its resistance; and (c) a non-activating dummy coil turn closer to the pole tips than the activating coil turns for defining a forward termination of the cross-linked photoresist between the activating coil turns and the tape head face to thereby provide improved ease of processability.

摘要翻译： 提供磁阻读/写磁带头，用于沿着磁带头面读取和写入磁带介质。 磁带头包括多个模块，每个模块包括读取元件和间隔开并终止于磁带头表面并形成在衬底上的写入元件。 读取元件包括与SFB层对接的软膜偏置层和硬膜偏置层。 写入元件包括由间隙隔开的两个极尖。 带头还包括与写入元件可操作地相关联并被交联光致抗蚀剂覆盖的多个激活导电线圈，并且定位在间隙和极尖之一之间并从磁带头表面返回。 带头具有以下元件中的至少一个：（a）读取元件和写入元件之间的耐磨屏蔽件，用于限制两个极尖之间的间隙的磨损，所述耐磨屏蔽层被接地，用于解耦读取和写入功能 磁带头，用于同时允许相同的模块读/写/写功能，并用于从磁带介质接地静电; （b）在硬膜偏压层下面的一层导电和耐腐蚀材料，如铑，以降低其电阻; 和（c）不活动的虚拟线圈比活动线圈转动更靠近磁极尖端，用于限定激活线圈匝和磁带头表面之间的交联光致抗蚀剂的前端，从而提供改进的可加工性。

公开(公告)号：US4092442A

公开(公告)日：1978-05-30

申请号：US755877

申请日：1976-12-30

申请人： Ram Kumar Agnihotri ,  Herman Carl Kluge, II

发明人： Ram Kumar Agnihotri ,  Herman Carl Kluge, II

IPC分类号： C23F4/00 ,  G03F7/09 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065 ,  B05D3/06

CPC分类号： H01L21/0271 ,  G03F7/094

摘要： A polyimide mask is used as an undercoat for a standard resist material during the patterning of an underlying thin film layer by plasma etching. The polyimide mask can withstand the conditions of reactive ion (plasma) etching so that it can be used as a protective coating when the thin film is subtractively etched by the plasma etching. The polyimide is particularly useful in processes using either positive or negative electron beam lithography which require sensitive resists.

摘要翻译： 在通过等离子体蚀刻对下面的薄膜层进行图案化期间，使用聚酰亚胺掩模作为标准抗蚀剂材料的底涂层。 聚酰亚胺掩模可以承受反应离子（等离子体）蚀刻的条件，使得当通过等离子体蚀刻减去薄膜时可以将其用作保护涂层。 聚酰亚胺在使用需要敏感抗蚀剂的正电子束或负电子束光刻的方法中特别有用。

公开(公告)号：US5652015A

公开(公告)日：1997-07-29

申请号：US685996

申请日：1996-07-25

申请人： Joseph Adam Aboaf ,  Edward Virgil Dennison ,  Jules David Friedman ,  Vincent Noel Kahwaty ,  Herman Carl Kluge

发明人： Joseph Adam Aboaf ,  Edward Virgil Dennison ,  Jules David Friedman ,  Vincent Noel Kahwaty ,  Herman Carl Kluge

IPC分类号： G11B5/31 ,  G11B5/48 ,  B05D5/12

CPC分类号： G11B5/3183 ,  G11B5/3103 ,  G11B5/4813 ,  G11B5/488

摘要： An arbitrary pattern write head assembly for writing timing-based servo patterns on magnetic storage media is provided, comprising: (a) a first pole piece comprising a substrate comprising a magnetic material, said substrate having a major surface; (b) a plurality of electrically conducting windings formed on the major surface; and (c) a second pole piece formed on the substrate, with a portion thereof formed above the plurality of electrically conducting windings and electrically insulated therefrom, the second pole piece having at least one opening therethrough defining a gap above the electrically conducting windings and the substrate, the second pole piece comprising at least two layers, each layer comprising a magnetic material. A method of batch fabricating servo writer heads is also provided for batch fabrication of servo writer heads at a very low cost. The method enables fabrication of heads capable of azimuthal recording commonly practiced in the video recording art. Hard nitrided Fe/NiFe poletip materials are used to minimize wear in tape head use.

摘要翻译： 提供了一种用于在磁存储介质上写入基于时序的伺服图案的任意图形写头组件，包括：（a）第一极片，其包括包括磁性材料的衬底，所述衬底具有主表面; （b）形成在主表面上的多个导电绕组; 和（c）形成在所述基板上的第二极靴，其一部分形成在所述多个导电绕组上方并与其电绝缘，所述第二极靴具有至少一个穿过所述导电绕组上方的间隙的开口， 衬底，所述第二极片包括至少两层，每层包括磁性材料。 还提供了批量制造伺服写入头的方法，用于以非常低的成本批量制造伺服写入头。 该方法能够制造能够在视频记录领域中通常实行的方位记录的头部。 使用硬质氮化Fe / NiFe poletip材料来减少磁带头使用中的磨损。