公开(公告)号：US20140044638A1

公开(公告)日：2014-02-13

申请号：US14112477

申请日：2012-04-13

申请人： Hiromoto Ohno ,  Hidejiro Yokoo ,  Shiho Irie

发明人： Hiromoto Ohno ,  Hidejiro Yokoo ,  Shiho Irie

IPC分类号： C01B31/26

CPC分类号： C01B31/26 ,  B01J31/0239 ,  B01J31/0247 ,  B01J31/0251 ,  B01J31/0265 ,  C01B32/70

摘要： An efficient process is provided in which sulfur is reacted with carbon monoxide in a liquid phase to produce carbonyl sulfide. In the presence of a base catalyst, carbon monoxide is continuously introduced into a reactor in which a liquid reaction mixture obtained by dissolving or suspending sulfur in an organic solvent is held, and the sulfur is reacted with the carbon monoxide at a pressure of 0.2-3.0 MPa and a temperature of 40-120° C. to yield carbonyl sulfide. The gaseous-phase part is withdrawn from the reactor, and the withdrawn gaseous-phase part is cooled with a cooler to condense the carbonyl sulfide contained in the gaseous-phase part. The condensed carbonyl sulfide is continuously withdrawn, and the gas that has not been condensed with the cooler is returned to the reactor. Thus, carbonyl sulfide is continuously produced.

摘要翻译： 提供了一种有效的方法，其中硫与液相中的一氧化碳反应以产生羰基硫化物。 在碱催化剂的存在下，将一氧化碳连续引入反应器，其中通过将硫溶解或悬浮在有机溶剂中而获得的液体反应混合物保持在其中，硫与一氧化碳在0.2- 3.0MPa，温度为40-120℃，得到羰基硫化物。 将气相部分从反应器中取出，并将抽出的气相部分用冷却器冷却以冷凝气相部分中所含的羰基硫化物。 连续抽出冷凝的硫化羰，并且未与冷却器冷凝的气体返回反应器。 因此，连续生产硫化羰。

公开(公告)号：US07812202B2

公开(公告)日：2010-10-12

申请号：US12298863

申请日：2007-04-25

申请人： Hiromoto Ohno ,  Toshio Ohi

发明人： Hiromoto Ohno ,  Toshio Ohi

IPC分类号： C07C17/00

CPC分类号： C07C21/20 ,  C07C17/02 ,  C07C17/04 ,  C07C17/10 ,  C07C17/23 ,  C07C17/25 ,  C07C17/358 ,  C07C17/383 ,  C07C21/09 ,  C07C19/01 ,  C07C19/10 ,  C07C21/21

摘要： Disclosed is a process for producing hexafluoro-1,3-butadiene, which is used for an etching gas capable of being used in fine processing for semiconductors, safely in industrialization and at low cost economically. Specifically disclosed is a process for producing hexafluoro-1,3-butadiene comprises (1) a step comprising allowing a compound having four carbon atoms each which bonds to an atom selected from the group consisting of a bromine atom, an iodine atom and a chlorine atom, to react with a fluorine gas in the presence of a diluting gas in a gas phase, thereby preparing a mixture containing a product (A), and (2) a step comprising eliminating halogens excluding a fluorine atom with a metal from the product (A) prepared in the step (1) in the presence of a solvent, thereby preparing a mixture containing hexafluoro-1,3-butadiene.

摘要翻译： 公开了一种用于半导体精细加工的蚀刻气体的六氟-1,3-丁二烯的制造方法，工业化安全且经济地低成本。 具体公开了六氟-1,3-丁二烯的制造方法，其特征在于，包括（1）使具有与选自溴原子，碘原子和氯原子的原子键合的四个碳原子的化合物 在气相中在稀释气体的存在下与氟气反应，由此制备含有产物（A）的混合物，和（2）包括用产物中的金属除去氟原子的卤素的步骤 （A）在溶剂存在下制备，从而制备含有六氟-1,3-丁二烯的混合物。

公开(公告)号：US20090280051A1

公开(公告)日：2009-11-12

申请号：US12064927

申请日：2006-08-25

申请人： Hiromoto Ohno ,  Toshio Ohi ,  Yuji Sakai

发明人： Hiromoto Ohno ,  Toshio Ohi ,  Yuji Sakai

IPC分类号： C01B21/083 ,  B01J19/00

CPC分类号： C01B21/0835 ,  C01C1/162

摘要： A method for producing nitrogen trifluoride related to the present invention is characterized in that a fluorine gas and an ammonia gas are fed into a tubular reactor and are reacted with each other in the presence of a diluting gas in a gaseous phase under the condition of no catalyst to produce a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride, and then the solid product attached to an inner wall of the tubular reactor is removed by means of a device for removing the solid product, which device is mounted to the tubular reactor.

摘要翻译： 与本发明有关的三氟化氮的制造方法的特征在于，将氟气和氨气供给到管状反应器中，并且在气相的稀释气体的存在下，在没有 催化剂，以产生主要由三氟化氮组成的气体产物和主要由氟化铵和/或酸性氟化铵组成的固体产物，然后通过除去装置除去连接到管状反应器内壁的固体产物 固体产品，该装置安装到管式反应器。

公开(公告)号：US07208644B2

公开(公告)日：2007-04-24

申请号：US11028154

申请日：2005-01-04

申请人： Hiromoto Ohno ,  Toshio Ohi

发明人： Hiromoto Ohno ,  Toshio Ohi

IPC分类号： C07C17/383 ,  C07C17/38

CPC分类号： C07C19/08 ,  B01J23/08 ,  B01J23/26 ,  B01J23/44 ,  B01J37/26 ,  C07C17/10 ,  C07C17/206 ,  C07C17/21 ,  C07C17/23 ,  C07C17/395

摘要： A process for production of high-purity hexafluoroethane, wherein a mixed gas containing hexafluoroethane and chlorotrifluoromethane is reacted with hydrogen fluoride in a gas phase in the presence of a fluorination catalyst at 200–450° C., for fluorination of the chlorotrifluoromethane, or wherein pentafluoroethane containing chlorine compounds with 1–3 carbon atoms is reacted with hydrogen in a gas phase in the presence of a hydrogenation catalyst at 150–400° C., and the product is then reacted with fluorine in a gas phase in the presence of a diluent gas.

摘要翻译： 一种生产高纯度六氟乙烷的方法，其中含有六氟乙烷和一氯三氟甲烷的混合气体在氟化催化剂存在下在气相中与氟化氢在200-450℃反应，氟化三氟甲烷，或其中 含有1-3个碳原子的氯化合物的五氟乙烷在氢化催化剂存在下在150-400℃下与气相在氢气中反应，然后使产物在气相中在氟化氢存在下与氟反应， 稀释气体。

公开(公告)号：US07176337B2

公开(公告)日：2007-02-13

申请号：US10778239

申请日：2004-02-17

申请人： Hiromoto Ohno ,  Toshio Ohi

发明人： Hiromoto Ohno ,  Toshio Ohi

IPC分类号： C07C19/08

CPC分类号： C23G5/02803 ,  C07C17/10 ,  C07C17/21 ,  H01L21/31116 ,  H01L21/32136 ,  C07C19/08

摘要： The process for producing perfluorocarbons according to the present invention is characterized in that in the production of a perfluorocarbon by contacting an organic compound with a fluorine gas, the organic compound is contacted with the fluorine gas at a temperature of from 200 to 500° C. and the content of an oxygen gas within the reaction system is controlled to 2% by volume or less based on the gas components in the reaction starting material, whereby a perfluorocarbon reduced in the content of impurities is produced. According to the process for producing perfluorocarbons of the present invention, high-purity perfluorocarbons extremely suppressed in the production of impurities such as an oxygen-containing compound can be obtained. The perfluorocarbons obtained by the production process of the present invention contain substantially no oxygen-containing compound and, therefore, can be effectively used as an etching or cleaning gas for use in a process for producing a semiconductor device.

摘要翻译： 根据本发明的全氟化碳的制造方法的特征在于，在通过使有机化合物与氟气接触来制造全氟化碳时，有机化合物在200〜500℃的温度下与氟气接触。 并且反应体系内的氧气的含量基于反应原料中的气体成分控制在2体积％以下，由此产生降低杂质含量的全氟化碳。 根据本发明的全氟化碳的制造方法，可以得到在含氧化合物等杂质的制造中极度抑制的高纯度全氟化碳。 通过本发明的制造方法获得的全氟化碳基本上不含有含氧化合物，因此可以有效地用作用于制造半导体器件的工艺的蚀刻或清洁气体。

公开(公告)号：US07045668B2

公开(公告)日：2006-05-16

申请号：US10398441

申请日：2002-08-06

申请人： Hiromoto Ohno ,  Toshio Ohi

发明人： Hiromoto Ohno ,  Toshio Ohi

IPC分类号： C07C17/395 ,  C07C17/383

CPC分类号： C07C19/08 ,  B01J23/08 ,  B01J23/26 ,  B01J23/44 ,  B01J37/26 ,  C07C17/10 ,  C07C17/206 ,  C07C17/21 ,  C07C17/23 ,  C07C17/395

摘要： A process for production of high-purity hexafluoroethane, wherein a mixed gas containing hexafluoroethane and chlorotrifluoromethane is reacted with hydrogen fluoride in a gas phase in the presence of a fluorination catalyst at 200-450° C., for fluorination of the chlorotrifluoromethane, or wherein pentafluoroethane containing chlorine compounds with 1-3 carbon atoms is reacted with hydrogen in a gas phase in the presence of a hydrogenation catalyst at 150-400° C., and the product is then reacted with fluorine in a gas phase in the presence of a diluent gas.

摘要翻译： 一种生产高纯度六氟乙烷的方法，其中含有六氟乙烷和一氯三氟甲烷的混合气体在氟化催化剂存在下在气相中与氟化氢在200-450℃反应，氟化三氟甲烷，或其中 含有1-3个碳原子的氯化合物的五氟乙烷在氢化催化剂存在下在150-400℃下与气相在氢气中反应，然后使产物在气相中在氟化氢存在下与氟反应， 稀释气体。

公开(公告)号：US07018598B2

公开(公告)日：2006-03-28

申请号：US10030682

申请日：2001-05-11

申请人： Hiromoto Ohno ,  Toshio Ohi

发明人： Hiromoto Ohno ,  Toshio Ohi

IPC分类号： C01B21/083

CPC分类号： C01B7/191 ,  C01B21/0835 ,  C01C1/162

摘要： F2 gas is reacted with NH3 gas in a gaseous phase at 80° C. or less in the presence of a diluting gas to produce NF3. Thus, NF3 is produced with good safety, efficiency and profitability.

摘要翻译： 在稀释气体存在下，使F 2气体在气相中在80℃或更低温度下与NH 3气体反应以产生NF 3 / SUB>。 因此，产生具有良好的安全性，效率和利润的NF 3。

公开(公告)号：US20050124834A1

公开(公告)日：2005-06-09

申请号：US10488288

申请日：2003-06-30

申请人： Hiromoto Ohno ,  Toshio Ohi

发明人： Hiromoto Ohno ,  Toshio Ohi

IPC分类号： C07C17/10 ,  C07C17/20 ,  C07C17/21 ,  C07C17/38 ,  C07C17/389 ,  C07C19/08

CPC分类号： C07C19/08 ,  C07C17/10 ,  C07C17/206 ,  C07C17/21 ,  C07C17/389

摘要： A process comprising bringing crude pentafluoroethane containing at least one compound selected from the group consisting of hydrofluorocarbons containing one carbon atom, hydrochlorofluorocarbons containing one carbon atom and hydrochlorocarbons containing one carbon atom, into contact with an adsorbent comprising a zeolite having an average pore size of 3 to 6 Å and a silica/aluminum ratio of 2.0 or less and/or a carbonaceous adsorbent having an average pore size of 3.5 to 6 Å, to reduce the content of the compound. The purified gas can be used as a low temperature refrigerant or an etching gas.

摘要翻译： 一种方法，其包括将含有至少一种选自含有一个碳原子的氢氟烃，含有一个碳原子的氢氯氟烃和含有一个碳原子的氢氯烃的至少一种化合物的五氟乙烷与含有平均孔径为3的沸石的吸附剂接触 二氧化硅/铝比为2.0以下，和/或平均孔径为3.5〜6的碳质吸附剂，以降低化合物的含量。 净化气体可以用作低温制冷剂或蚀刻气体。

公开(公告)号：US06489523B1

公开(公告)日：2002-12-03

申请号：US10030823

申请日：2002-01-14

申请人： Hiromoto Ohno ,  Kazunari Kaga ,  Toshio Ohi

发明人： Hiromoto Ohno ,  Kazunari Kaga ,  Toshio Ohi

IPC分类号： C07C1738

CPC分类号： C07C19/08 ,  C07C17/204 ,  C07C17/21 ,  C07C17/395

摘要： The present invention intends to provide a process for producing CF3CF3 with good profitability using CF3CHF2 containing a compound having chlorine atom within the molecule, and use thereof. In the process of the present invention, a gas mixture containing CF3CHF2 and a compound having chlorine atom within the molecule is reacted with hydrogen fluoride in the presence of a fluorination catalyst, thereby converting CClF2CF3 as a main impurity into CF3CF3, and CF3CHF2 containing CF3CF3 is reacted with fluorine gas in the gaseous phase in the presence of a diluting gas.

摘要翻译： 本发明旨在提供使用含有分子内具有氯原子的化合物的CF 3 CHF的具有良好利润的CF 3 CF 3的制备方法及其用途。在本发明的方法中，将含有CF 3 CHF 2和含有氯原子的化合物的气体混合物 在氟化催化剂的存在下，使该分子与氟化氢反应，将作为主要杂质的CClF 2 CF 3转化为CF 3 CF 3，在稀释气体的存在下，使含有CF 3 CF 3的CF 3 CHF与气态的氟气反应。

公开(公告)号：US06162957A

公开(公告)日：2000-12-19

申请号：US484222

申请日：2000-01-18

申请人： Tetsuo Nakajo ,  Masatoshi Hotta ,  Hiromoto Ohno ,  Toshio Ohi ,  Yusaku Takita

发明人： Tetsuo Nakajo ,  Masatoshi Hotta ,  Hiromoto Ohno ,  Toshio Ohi ,  Yusaku Takita

IPC分类号： A62D3/00 ,  A62D3/20 ,  A62D101/22 ,  A62D101/47 ,  A62D101/49 ,  B01D53/86 ,  B01D47/00 ,  C01B7/00

CPC分类号： A62D3/20 ,  A62D2101/22 ,  A62D2101/47 ,  A62D2101/49 ,  B01D53/8662 ,  Y02C20/30

摘要： A method for decomposing a perfluorocarbon in the presence of water vapor or water vapor and molecular oxygen in gas phase, in which a catalyst of a phosphate comprising at least one element selected from the group consisting of aluminum, boron, alkali earth metal, titanium, zirconium, lanthanum, cerium, yttrium, rare earth metal, vanadium, niobium, chromium, manganese, iron, cobalt and nickel, and phosphorus oxide, is used.

摘要翻译： 一种在气相中存在水蒸气或水蒸汽和分子氧的情况下分解全氟化碳的方法，其中包含选自铝，硼，碱土金属，钛， 锆，镧，铈，钇，稀土金属，钒，铌，铬，锰，铁，钴和镍以及氧化磷。