公开(公告)号：US09500520B2

公开(公告)日：2016-11-22

申请号：US14378002

申请日：2012-07-30

申请人： Kazuaki Ohkubo ,  Hisashi Shiraiwa

发明人： Kazuaki Ohkubo ,  Hisashi Shiraiwa

IPC分类号： G01J1/06 ,  G01J1/04 ,  G01J1/42 ,  G01J1/02

CPC分类号： G01J1/06 ,  G01J1/0223 ,  G01J1/0403 ,  G01J1/0488 ,  G01J1/4257 ,  G01J2001/4247

摘要： An optical measurement apparatus includes: a hollow cylindrical member having one plane with a first opening and the other plane with a second opening; a rotation mechanism for rotating the cylindrical member about a first axis; a support unit for arranging a light source at a measurement position which is on the first axis and from which the emitted light enters the cylindrical member through the first opening; a first reflection unit arranged inside the cylindrical member for reflecting the light emitted from the light source and entering through the first opening; a second reflection unit for reflecting the light inside the cylindrical member and propagating the light through the second opening along the first axis to the outside of the cylindrical member; and at least one third reflection unit for causing the light reflected by the first reflection unit to be incident on the second reflection unit.

摘要翻译： 光学测量装置包括：具有一个具有第一开口的平面和具有第二开口的另一平面的中空圆柱形构件; 旋转机构，用于围绕第一轴线旋转所述圆柱形构件; 支撑单元，用于将光源布置在位于第一轴上的测量位置处，并且所发射的光通过第一开口进入圆柱形构件; 第一反射单元，布置在所述圆筒构件内部，用于反射从所述光源发射的光并通过所述第一开口进入; 第二反射单元，用于将所述光反射到所述圆柱形构件内并沿着所述第一轴将所述光通过所述第二开口传播到所述圆柱形构件的外部; 以及至少一个第三反射单元，用于使由第一反射单元反射的光入射在第二反射单元上。

公开(公告)号：US07808625B2

公开(公告)日：2010-10-05

申请号：US11896041

申请日：2007-08-29

申请人： Kenji Nakamura ,  Hisashi Shiraiwa

发明人： Kenji Nakamura ,  Hisashi Shiraiwa

IPC分类号： G01J1/00 ,  G01N21/00

CPC分类号： G02B21/086 ,  G01N21/25 ,  G02B5/201

摘要： Disclosed is an aperture variable inspection optical system including a variable aperture unit 13 having a polygonal light transparent section and light collecting systems 12a, 12b for forming an irradiation spot U of light passing through the variable aperture unit 13 at the position of a sample S. The variable aperture unit 13 is capable of changing the shape/size of the polygon. The size of the irradiation spot U can be changed without rearranging the aperture unit.

摘要翻译： 公开了一种光圈可变检查光学系统，其包括具有多边形透光部分的可变孔径单元13和用于在样本S的位置处形成通过可变孔径单元13的光的照射点U的光收集系统12a，12b。 可变孔径单元13能够改变多边形的形状/大小。 可以改变照射点U的大小而不重新布置孔径单元。

公开(公告)号：US20080055592A1

公开(公告)日：2008-03-06

申请号：US11896041

申请日：2007-08-29

申请人： Kenji Nakamura ,  Hisashi Shiraiwa

发明人： Kenji Nakamura ,  Hisashi Shiraiwa

IPC分类号： G01N21/01

CPC分类号： G02B21/086 ,  G01N21/25 ,  G02B5/201

摘要： Disclosed is an aperture variable inspection optical system including a variable aperture unit 13 having a polygonal light transparent section and light collecting systems 12a, 12b for forming an irradiation spot U of light passing through the variable aperture unit 13 at the position of a sample S. The variable aperture unit 13 is capable of changing the shape/size of the polygon. The size of the irradiation spot U can be changed without rearranging the aperture unit.

摘要翻译： 公开了一种光圈可变检查光学系统，其包括具有多边形透光部分的可变孔径单元13和用于在样本位置处形成通过可变孔径单元13的光的照射点U的光收集系统12a， 可变孔径单元13能够改变多边形的形状/大小。 可以改变照射点U的大小而不重新布置孔径单元。