公开(公告)号：US06677592B2

公开(公告)日：2004-01-13

申请号：US09948841

申请日：2001-09-07

Applicant: Hsing-Yao Chen

Inventor： Hsing-Yao Chen

IPC: H01J2900

CPC classification number: G21K1/087 ,  H01J37/1477 ,  H01J2237/3175 ,  H01J2237/31774

Abstract: An electron beam device includes an electron beam source, plural spaced plates having aligned apertures through which an electron beam is directed, an electrostatic focusing arrangement, and plural electrostatically charged deflection plates for deflecting the beam and displacing it over a target surface. The apertures in the spaced plates are of deceasing size in the direction of travel of the electron beam for intercepting the outer periphery of the beam and providing a beam of reduced cross section. The electron beam is simultaneously deflected by the deflection plates and focused by the electrostatic focusing arrangement. The electrostatic focusing arrangement includes first and second focusing elements through which the beam is directed which are disposed along the beamline and adjacent the upper and lower end portions, respectively, of the beam deflection plates. The electron beam device is of small size, permitting plural devices to be arranged in two- and three-dimensional compact matrix arrays for dense electron beam lithography arrangements such as for use in the simultaneous manufacture of large numbers of semiconductor devices to boost the throughput in integrated circuit manufacture inexpensively.

Abstract translation: 电子束装置包括电子束源，具有对准的孔的电子束源，电子束被引导通过的多个间隔板，静电聚焦装置和用于偏转光束并使其移动到目标表面上的多个静电偏转板。 间隔板中的孔在电子束的行进方向上具有减小的尺寸，用于拦截梁的外周并提供减小横截面的梁。 电子束同时被偏转板偏转并被静电聚焦装置聚焦。 所述静电聚焦装置包括第一和第二聚焦元件，所述光束被引导通过所述第一和第二聚焦元件，所述第一和第二聚焦元件分别沿着所述光束线布置并且分别邻近所述光束偏转板的上端部分 电子束器件尺寸小，允许将多个器件布置在用于致密电子束光刻布置的二维和三维紧凑矩阵阵列中，例如用于同时制造大量半导体器件以提高生产量 集成电路制造成本低廉。

公开(公告)号：US06377003B1

公开(公告)日：2002-04-23

申请号：US09835929

申请日：2001-04-16

Applicant: Hsing-Yao Chen ,  Chun-Hsien Yeh

Inventor： Hsing-Yao Chen ,  Chun-Hsien Yeh

IPC: G09G104

CPC classification number: H01J29/503 ,  H01J2229/507

Abstract: For use in a beam index color cathode ray tube (CRT), a multi-beam group electron gun directs first and second groups of vertically aligned electron beams on respective parallel, horizontally aligned color phosphor stripes on the CRT's display screen. Each group of electron beams includes three beams, one for each of the three primary colors of red, green and blue. The first and second electron beam groups are horizontally offset from one another, with the upper, intermediate and lower electron beams in each group tracing the same horizontal phosphor stripe as the beams scan the display screen and with a time delay provided to synchronize the video information of both electron beam groups. A color video signal is provided either to a respective cathode or to a respective segmented conductive portion containing a beam passing aperture in the electron gun's G1 control grid for individually modulating each beam with color video image information.

Abstract translation: 为了在光束折射彩色阴极射线管（CRT）中使用，多光束组电子枪将第一和第二组垂直排列的电子束引导到CRT显示屏上的相应的平行，水平对准的彩色荧光条上。 每组电子束包括三个光束，一个用于红色，绿色和蓝色三原色中的每一个。 第一和第二电子束组彼此水平偏移，每组中的上，中，下电子束跟踪与扫描显示屏相同的水平荧光条，并提供时间延迟以使视频信息同步 的两个电子束组。 彩色视频信号被提供给相应的阴极或相应的分段的导电部分，其包含电子枪G1控制栅格中的光束通过孔，用于用彩色视频图像信息单独调制每个光束。

公开(公告)号：US6166483A

公开(公告)日：2000-12-26

申请号：US111819

申请日：1998-07-08

Applicant: Hsing-Yao Chen ,  Chun-Hsien Yeh

Inventor： Hsing-Yao Chen ,  Chun-Hsien Yeh

IPC: H01J29/50

CPC classification number: H01J29/503 ,  H01J2229/4841

Abstract: An internal resistor within a color cathode ray tube (CRT) is connected to a voltage source and is coupled across a G4 grid and a G6 grid of the CRT's multi-grid quadrupole (QPF) electron gun. De-coupling the G4 grid from the G2 grid in the electron gun's prefocus lens and operating the G4 grid at a higher voltage as used in the gun's high voltage main focus lens moves the equivalent lens of the prefocus and main focus lenses toward the CRT's display screen and reduces electron beam magnification and spot size for improved video image definition and focusing.

Abstract translation: 彩色阴极射线管（CRT）内的一个内部电阻器连接到电压源，并连接在CRT多格四极杆（QPF）电子枪的G4格栅和G6格栅上。 在电子枪的预聚焦透镜中将G2格栅与G2格栅分离，并在枪的高压主焦点透镜中使用的较高电压操作G4格栅，将预聚焦和主要聚焦透镜的等效透镜移向CRT显示器 屏幕并减少电子束放大倍数和光斑尺寸，以改善视频图像定义和聚焦。

公开(公告)号：US6153970A

公开(公告)日：2000-11-28

申请号：US63092

申请日：1998-04-20

Applicant: Hsing-Yao Chen ,  Yu Kun Ma

Inventor： Hsing-Yao Chen ,  Yu Kun Ma

IPC: H01J29/50 ,  H01J29/51

CPC classification number: H01J29/503 ,  H01J29/51 ,  H01J2229/5635

Abstract: In a multi-stage, multi-beam electron gun of the common lens type for use in a color cathode ray tube (CRT), a charged grid in the prefocus lens of the electron gun is provided with three inline asymmetric beam passing apertures. The three asymmetric apertures may be either in the G4 grid, in the upper side of the G3 grid, or on the lower side of the G5 grid, i.e., in facing relation to the G4 grid, or may be incorporated in both the G3 and G5 grids. The small G3-G4 and G4-G5 spacing gives rise to isolation of the electron optic lenses of the two outer electron beams from that of the center electron beam allowing the asymmetric auxiliary apertures to asymmetrically and independently correct for electron beam astigmatism, i.e., the difference between the beam's horizontal and vertical focus voltage, and differences in the focus voltages of the two outer electron beams relative to the center electron beam. Each of the three inline apertures includes a circular center portion with an overlapping (or superimposed) elliptically shaped aperture. The elliptical aperture may be aligned generally vertically or generally horizontally, and the two outer electron beam passing apertures may be larger or smaller in diameter than the center aperture. In the two outer electron beam passing apertures, the superimposed elliptically shaped aperture may be horizontally offset (either outwardly or inwardly relative to the circular center portion) for controlling static convergence of the three electron beams.

Abstract translation: 在用于彩色阴极射线管（CRT）的普通透镜型多级多光束电子枪中，电子枪的预聚焦透镜中的带电栅格具有三个一致的非对称光束通过孔。 三个不对称孔可以在G4栅格中，G3栅格的上侧，也可以在G5栅格的下侧，即与G4栅格相对的关系，或者可以并入G3和 G5网格 小的G3-G4和G4-G5间距引起两个外部电子束的电子透镜与中心电子束的间隔隔离，允许不对称的辅助孔对称地和独立地校正电子束散光，即， 光束的水平和垂直聚焦电压之间的差异以及两个外部电子束相对于中心电子束的聚焦电压的差异。 三个在线孔中的每一个包括具有重叠（或重叠）椭圆形孔的圆形中心部分。 椭圆形孔可以大致垂直地或大致水平对准，并且两个外部电子束通过孔的直径可以大于或小于中心孔径。 在两个外部电子束通过孔中，叠加的椭圆形孔可以水平偏移（相对于圆形中心部分向外或向内），用于控制三个电子束的静态会聚。

公开(公告)号：US5610475A

公开(公告)日：1997-03-11

申请号：US412268

申请日：1995-03-28

Applicant: Hsing-Yao Chen

Inventor： Hsing-Yao Chen

IPC: H01J29/48 ,  H01J29/62 ,  H01J29/70

CPC classification number: H01J29/488 ,  H01J29/628

Abstract: An electron gun for use in a cathode ray tube (CRT) includes a cathode, a low voltage beam forming region (BFR), and a high voltage deflection focus lens disposed in the beam deflection region of the CRT's magnetic deflection yoke for simultaneous and coincident focusing and deflection of the electron beam on the CRT's display screen. The deflection lens includes a plurality of first focus grids disposed in the CRT's neck portion including a spaced first pair of grids (G42, G44) having respective beam passing apertures disposed horizontally off-center in opposed directions relative to the electron beam axis, and a second pair of grids (G46, G48) having respective beam passing apertures disposed vertically off-center in opposed directions relative to the axis. Other grids disposed on opposed sides of each of the first and second pair of grids have respective beam passing apertures centered with respect to the electron beam axis and are maintained at a fixed focus voltage. A first dynamic focus correction voltage source (275) and a second dynamic focus correction voltage source (277) which vary with the electron beam deflection are respectively applied to each of the first and second pair of grids for compensating for asymmetric off-axis electron beam defocusing at all points on the CRT's faceplate. This dynamic off-axis defocusing correction is equally applicable in a single beam, monochromatic deflection lens CRT, as well as in a multi-beam, color deflection lens CRT.

Abstract translation: 用于阴极射线管（CRT）的电子枪包括阴极，低电压波束形成区域（BFR）和设置在CRT磁偏转线圈的束偏转区域中的高电压偏转聚焦透镜，用于同时重合 电子束在CRT显示屏上的聚焦和偏转。 偏转透镜包括设置在CRT颈部中的多个第一焦点栅格，包括间隔开的第一对栅格（G42，G44），其具有相对于电子束轴线在相对方向上水平偏心设置的相应的光束通过孔，以及 第二对栅格（G46，G48）具有相对于该轴线在相反方向上垂直偏心设置的各个光束通过孔。 设置在第一对和第二对栅格中的每一个的相对侧上的其它栅格具有相对于电子束轴线居中的相应的光束通过孔，并且保持在固定的聚焦电压。 第一动态聚焦校正电压源（275）和随电子束偏转而变化的第二动态聚焦校正电压源（277）分别施加到第一和第二对栅格中，用于补偿非对称离轴电子束 散焦在CRT面板上的所有点上。 这种动态离轴散焦校正同样适用于单光束单色偏转透镜CRT以及多光束彩色偏转透镜CRT。

公开(公告)号：US5488265A

公开(公告)日：1996-01-30

申请号：US511722

申请日：1995-08-07

Applicant: Hsing-Yao Chen

Inventor： Hsing-Yao Chen

IPC: H01J29/50 ,  H01J29/56

CPC classification number: H01J29/503 ,  H01J29/566

Abstract: An inline electron gun for use in a multi-beam color cathode ray tube (CRT) has a main focus lens for focusing the electron beams on a display screen of the CRT. The main focus lens includes adjacent charged electrodes each having a respective common lens aperture through which the electron beams are directed and which are in facing relation for reducing horizontal spherical aberration of the electron beams on the display screen, where each common lens aperture has a longitudinal axis aligned with the inline electron beams. In one embodiment, each common lens aperture is chain-link-shaped including spaced, vertically enlarged portions, each aligned with a respective electron beam for correcting for vertical spherical aberration. Each adjacent electrode further includes a plurality of auxiliary apertures, each aligned with and passing a respective electron beam. Each auxiliary aperture includes a generally circular center portion and upper and lower slots extending generally vertically therefrom to provide balanced focusing for all of the electron beams as well as to correct for beam astigmatism. The circular center portion of each aperture is adapted to receive a cylindrical electrode support rod, or mandrel, disposed within and aligning the electrodes during electron gun assembly. The three inline auxiliary apertures may have the same diameter, or the two outer apertures may have larger diameters and wider slots than the center aperture in another embodiment. The slots may be vertically centered on the circular center portion of each aperture, or the two outer apertures may have outwardly disposed upper and lower slots in another embodiment.

Abstract translation: 用于多光束彩色阴极射线管（CRT）的直列电子枪具有用于将电子束聚焦在CRT的显示屏上的主聚焦透镜。 主聚焦透镜包括相邻的带电电极，每个相邻的带电电极具有相应的公共透镜孔，电子束通过它们被引导并且面对关系，用于减小显示屏上的电子束的水平球面像差，其中每个共同透镜孔具有纵向 轴与直列电子束对准。 在一个实施例中，每个公共透镜孔径是链状的，包括间隔开的垂直放大的部分，每个部分与相应的电子束对准，用于校正垂直球面像差。 每个相邻的电极还包括多个辅助孔，每个辅助孔对准并通过相应的电子束。 每个辅助孔包括大致圆形的中心部分，以及大体上垂直延伸的上部和下部狭槽，为所有电子束提供平衡聚焦以及校正束散光。 每个孔的圆形中心部分适于接纳在电子枪组装期间设置在电极内并对准电极的圆柱形电极支撑杆或心轴。 三个在线辅助孔可以具有相同的直径，或者在另一个实施例中，两个外孔可以具有比中心孔更大的直径和更宽的狭缝。 槽可以在每个孔的圆形中心部分上垂直居中，或者在另一个实施例中，两个外孔可以具有向外设置的上槽和下槽。

公开(公告)号：US5389855A

公开(公告)日：1995-02-14

申请号：US16590

申请日：1993-02-10

Applicant: Hsing-Yao Chen

Inventor： Hsing-Yao Chen

IPC: H01J29/48 ,  H01J29/54 ,  H04N3/28 ,  H04N5/68 ,  H01J29/46 ,  H01J29/56

CPC classification number: H04N5/68 ,  H01J29/488 ,  H04N3/28 ,  H01J2229/507

Abstract: A multi-beam electron gun for use in a monochrome cathode ray tube (CRT) such as used in a black and white television receiver, a projection television receiver, or a computer monitor includes G1 control and G2 screen grids each having a plurality of vertically aligned apertures for forming electron beams which are deflected in unison across the CRT's display screen to simultaneously trace a plurality of vertically spaced, horizontal scan lines with each display screen sweep. The electron beams are deflected across the screen in a raster-like manner with each beam containing video information for each adjacent scan line. The G1 control grid includes a plurality of discrete conductive portions each including a respective beam passing aperture and each coupled to a respective video signal source, with the video signal sources including memory for storing video signal information for subsequent display. This permits plural adjacent scanning electron beams to simultaneously provide adjacent portions of the same frame of a video image on the display screen. The grids in the main lens portion of the electron gun include vertically elongated, common apertures for focusing each of the electron beams on the display screen, with the electron beams deflected by a vertically oriented, self-convergent magnetic deflection yoke. In another embodiment, each of a plurality of vertically aligned apertures in the G1 grid has an associated cathode, with a respective video signal provided to each of the cathodes for simultaneously writing video information on adjacent horizontal scan lines on the video display.

Abstract translation: 用于黑白电视接收机，投影电视接收机或计算机监视器的单色阴极射线管（CRT）的多光束电子枪包括G1控制和G2屏幕格栅，每个具有多个垂直 用于形成电子束的对准孔，它们在CRT的显示屏上同时偏转，以同时跟踪每个显示屏扫描的多个垂直间隔的水平扫描线。 电子束以栅格状的方式在屏幕上偏转，每个波束包含每个相邻扫描线的视频信息。 G1控制栅格包括多个分立的导电部分，每个分立的导电部分包括相应的光束通过孔径，并且各自耦合到相应的视频信号源，视频信号源包括用于存储用于后续显示的视频信号信息的存储器。 这允许多个相邻的扫描电子束在显示屏上同时提供视频图像的相同帧的相邻部分。 电子枪的主透镜部分中的栅格包括用于将每个电子束聚焦在显示屏上的垂直细长的公共孔，电子束由垂直取向的自会聚磁偏转轭偏转。 在另一个实施例中，G1格栅中的多个垂直对准的孔中的每一个具有相关联的阴极，其中提供给每个阴极的相应视频信号用于在视频显示器上的相邻水平扫描线上同时写入视频信息。

公开(公告)号：US5350978A

公开(公告)日：1994-09-27

申请号：US16575

申请日：1993-02-10

Applicant: Hsing-Yao Chen

Inventor： Hsing-Yao Chen

IPC: H01J29/48 ,  H01J29/50 ,  H01J29/54 ,  H04N9/20 ,  H01J29/51 ,  H01J29/56

CPC classification number: H04N9/20 ,  H01J29/481 ,  H01J29/50 ,  H01J2229/507

Abstract: A multi-beam electron gun for a color cathode ray tube (CRT) includes a plurality of vertically spaced, horizontal inline beams, where each inline array of beams provides the three primary colors of red, green and blue and adjacent inline beam arrays simultaneously trace adjacent horizontal scan lines on the color CRT's display screen. The beams in each horizontal inline array of beams are focused on a common spot on the display screen, with the three beams deflected across the screen in unison. Each inline array of beams is modulated in accordance with that portion of the video image which they form allowing adjacent, vertically spaced inline arrays to write different video image information on the screen in simultaneously forming adjacent portions of the color video image. Simultaneously providing color video image information on more than one horizontal scan line allows for a reduction in horizontal scan frequency and associated magnetic deflection yoke operating criteria, and also increases beam dwell time on the screen's phosphor elements allowing for a reduction in individual beam current without sacrificing video image brightness while improving video image resolution. Individual beams are modulated by providing video drive signals to either segmented conductive portions in the G1 control grid in one embodiment, where each conductive portion includes a beam passing aperture, or in another embodiment to each cathode which is aligned with and directs emitted electrons through an associated aperture in the G1 control grid.

Abstract translation: 用于彩色阴极射线管（CRT）的多光束电子枪包括多个垂直间隔的水平内联光束，其中每个在线阵列的光束提供红色，绿色和蓝色的三原色以及相邻的在线光束阵列同时追踪 彩色CRT显示屏上的相邻水平扫描线。 每个水平的直列线阵列中的光束聚焦在显示屏上的公共点上，三个光束一致地偏转在屏幕上。 根据它们形成的每个视频图像的一部分，对其进行调制，允许相邻的垂直间隔的线阵列在屏幕上写入不同的视频图像信息，同时形成彩色视频图像的相邻部分。 同时在多于一个水平扫描线上提供彩色视频图像信息允许减少水平扫描频率和相关的磁偏转线圈操作标准，并且还增加了屏幕的荧光体元件上的光束驻留时间，从而允许减少单个光束电流而不牺牲 视频图像亮度，同时提高视频图像分辨率。 在一个实施例中，通过向G1控制网格中的分段导电部分提供视频驱动信号来调制各个光束，其中每个导电部分包括光束通过孔，或者在另一实施例中，每个阴极与每个阴极对准，并且通过 相关孔径在G1控制网格。

公开(公告)号：US5241240A

公开(公告)日：1993-08-31

申请号：US890836

申请日：1992-06-01

Applicant: Hsing-Yao Chen ,  Sen-Su Tsai

Inventor： Hsing-Yao Chen ,  Sen-Su Tsai

IPC: H01J29/48 ,  H01J29/50

CPC classification number: H01J29/503 ,  H01J2229/4872 ,  H01J2229/4896

Abstract: An inline electron gun for use in a multi-beam color cathode ray tube (CRT) has a main focus lens for focusing the electron beams on a display screen of the CRT. The main focus lens includes adjacent charged electrodes each having chain link-type common lens apertures through which the electron beams are directed and which are in facing relation for reducing horizontal spherical aberration of the electron beams on the CRT display screen, where each common lens aperture has a longitudinal axis aligned with the inline electron beams. Each common lens aperture includes spaced, vertically enlarged portions, each aligned with a respective electron beam, for correcting for vertical spherical aberration of the electron beams. Increasing the vertical dimension of that portion of each of the common lens apertures aligned with a respective electron beam reduces the vertical spot size of the electron beam without degrading other electron gun operating characteristics. The chain link-type common lens is defined by a thin peripheral side wall parallel to the beam axis which may also be used in other embodiments such as in combination with facing conventional solid (double side wall) or hollow (single side wall) common lens structures in adjacent electrodes in the main focus lens. The chain link-type common lens aperture may be either disposed in an inwardly directed end wall of the electrode or it may be defined by a straight side wall of the electrode aligned with the electron gun axis.

Abstract translation: 用于多光束彩色阴极射线管（CRT）的直列电子枪具有用于将电子束聚焦在CRT的显示屏上的主聚焦透镜。 主聚焦透镜包括相邻的带电电极，每个相邻的带电极具有链节型共透镜孔，电子束通过它们被引导并且处于面对关系，以减小CRT显示屏上的电子束的水平球面像差，其中每个公共透镜孔 具有与直列电子束对准的纵轴。 每个公共透镜孔包括间隔开的垂直放大的部分，每个部分与相应的电子束对准，用于校正电子束的垂直球面像差。 增加与各个电子束对准的每个公共透镜孔的那部分的垂直尺寸减小了电子束的垂直光斑尺寸，而不降低其他电子枪的操作特性。 链节型共透镜由平行于光束轴的薄的周边侧壁限定，其也可以用于其它实施例中，例如与面对常规固体（双侧壁）或中空（单侧壁）共透镜 在主焦点透镜中的相邻电极中的结构。 链节型共透镜孔可以设置在电极的向内的端壁中，或者可以由与电子枪轴对准的电极的直的侧壁限定。

公开(公告)号：US5223764A

公开(公告)日：1993-06-29

申请号：US804298

申请日：1991-12-09

Applicant: Hsing-Yao Chen

Inventor： Hsing-Yao Chen

IPC: H01J29/48 ,  H01J29/62

CPC classification number: H01J29/624 ,  H01J29/488

Abstract: A limiting aperture disposed in a relatively low voltage and electrostatic field-free region in the main focusing lens portion of an electron gun in a cathode ray tube (CRT) provides reduced electron beam spot size and improved video image contrast and purity in the CRT's display screen. The generally circular limiting aperture is disposed on the axis of the electron gun and within a charged electrode, or grid, within the main focusing lens. The cylindrically shaped, charged grid is elongated along the gun axis and includes generally circular recesses in facing surfaces thereof, which recesses are also disposed on the gun axis and separated by an inner partition defining the limiting aperture. The charged grid is maintained at a voltage V.sub.G, with V.sub.G .ltoreq.0.12 V.sub.A, where V.sub.A is the CRT's anode voltage. With the limiting aperture recessed within the elongated charged electrode, the electrostatic field is essentially zero at the limiting aperture where outer, peripheral electrons in the electron beam are intercepted and removed from the beam for limiting electron beam spot size. The low voltage of the limiting aperture-bearing grid substantially reduces the possibility of secondary electrons reaching the display screen. Most of the secondary electrons are absorbed by the succeeding high voltage grid.

Abstract translation: 设置在阴极射线管（CRT）中的电子枪的主聚焦透镜部分中的相对低电压和无静电区域中的限制孔径在CRT显示器中提供减小的电子束斑点尺寸和改善的视频图像对比度和纯度 屏幕。 大致圆形的限制孔设置在电子枪的轴线上并且在主聚焦透镜内的带电电极或栅格内。 圆柱形的带电栅格沿着枪的轴线是细长的，并且在其相对的表面中包括大致圆形的凹部，这些凹槽也设置在枪的轴线上并且被限定了限制孔的内部分隔开。 带电栅格保持在VG，VG = 0.12VA，其中VA是CRT的阳极电压。 利用限制孔凹入细长带电电极内，静电场在限制孔处基本为零，其中电子束中的外部外围电子被截取并从光束中移除以限制电子束斑点尺寸。 限制孔径支撑网格的低电压基本上降低了二次电子到达显示屏的可能性。 大多数二次电子被后面的高压电网吸收。