公开(公告)号：US20050253093A1

公开(公告)日：2005-11-17

申请号：US10844201

申请日：2004-05-12

申请人： Richard Gorski ,  Boris Rozansky ,  Hsing-Yao Chen

发明人： Richard Gorski ,  Boris Rozansky ,  Hsing-Yao Chen

IPC分类号： H01J37/04 ,  H01J37/302 ,  H01J37/317

CPC分类号： H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J2237/0435 ,  H01J2237/31766 ,  H01J2237/31774

摘要： A maskless, direct write electron lithography apparatus for accurately and simultaneously writing plural sub-micron patterns on a silicon substrate employs plural parallel electron beams with precise X-Y mechanical translation of the substrate to provide low cost, high throughput integrated circuit (IC) fabrication. Plural compact micro electron gun assemblies arranged in a I×J rectangular grid each simultaneously expose one IC pattern on the substrate, with each electron gun assembly including a K×L array of individually controlled electron guns emitting K×L electron beams. The regular, small spacing between electron beams in each array, i.e., approximately 1 mm or less, requires a correspondingly small X-Y translation of the substrate to write the entire wafer. Each electron gun array includes plural AC blanked cathodes and DC biased plates having plural aligned beam passing apertures. A computer controlled pattern generator synchronized with wafer X-Y translation controls the duration and timing of the cathode blanking signals.

摘要翻译： 用于在硅衬底上准确并同时地写入多个亚微米图案的无掩模式直写式电子光刻设备采用具有精确的X-Y机械平移的平行电子束，以提供低成本，高吞吐量的集成电路（IC）制造。 以1x×矩形网格布置的多个紧凑型微电子枪组件同时暴露基板上的一个IC图案，每个电子枪组件包括发射KxL电子束的单独控制的电子枪的KxL阵列。 每个阵列中的电子束之间规则的小的间隔，即大约1mm或更小，需要基片的相应较小的X-Y平移来写入整个晶片。 每个电子枪阵列包括多个交流阴极阴极和具有多个对准的光束通过孔的直流偏压板。 与晶片X-Y平移同步的计算机控制模式发生器控制阴极消隐信号的持续时间和时序。

公开(公告)号：US06479937B2

公开(公告)日：2002-11-12

申请号：US09804901

申请日：2001-03-13

申请人： Hsing-Yao Chen ,  Chun-Hsien Yeh

发明人： Hsing-Yao Chen ,  Chun-Hsien Yeh

IPC分类号： H01J2946

CPC分类号： H01J31/20 ,  H01J2231/121

摘要： A multi-beam color index cathode ray tube (CRT) includes vertically spaced, horizontal phosphor stripes on the inner surface of its display screen. The parallel phosphor bands are arranged in groups of three, with each phosphor stripe in a group providing a respective one of the three primary colors of red, green and blue. An electron gun directs three electron beams onto the display screen, with the three electron beams deflected over the display screen in unison in a raster pattern. The three electron beams are focused in the form of three spots on the display screen, with each spot coincident with a respective horizontal phosphor stripe of a given color. The intensity of each electron beam is independently modulated as it sweeps across the width of the display screen by a respective color video signal in accordance with the displayed image. The three electron beams are each provided with a horizontally elongated cross section, with convergence of the beams provided by a plurality of multi-pole adjustable magnets. By horizontally elongating and vertically offsetting the beams, the vertical spacing between the electron beams as well as between the horizontal phosphor stripes may be reduced for improved video image resolution. The closely spaced electron beams may be focused with a conventional main focusing lens employing a common beam-passing aperture, with electron beam alignment with the horizontal phosphor stripes provided via a beam responsive UV emitter/sensor combination and feedback control arrangement.

公开(公告)号：US5412277A

公开(公告)日：1995-05-02

申请号：US111566

申请日：1993-08-25

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： H01J29/48 ,  H01J29/62 ,  H01J29/70

CPC分类号： H01J29/488 ,  H01J29/628

摘要： An electron gun for use in a cathode ray tube (CRT) includes a cathode, a low voltage beam forming region (BFR), and a high voltage deflection focus lens disposed in the beam deflection region of the CRT's magnetic deflection yoke for simultaneous and coincident focusing and deflection of the electron beam on the CRT's display screen. The deflection lens includes a plurality of first focus grids disposed in the CRT's neck portion including a spaced first pair of grids each having respective beam passing apertures, with one of the beam passing apertures horizontally offset and the other beam passing aperture vertically offset from the electron beam axis. Other grids disposed on opposed sides of each of the first pair of grids have respective beam passing apertures centered with respect to the electron beam axis and are maintained at a fixed focus voltage. A dynamic focus correction voltage which varies with electron beam deflection is applied to each of the first pair of grids for compensating for asymmetric off-axis electron beam defocusing at all points on the CRT's faceplate. This dynamic off-axis defocusing correction is equally applicable in a single beam, monochromatic deflection lens CRT as well as in a multi-beam, color deflection lens CRT.

摘要翻译： 用于阴极射线管（CRT）的电子枪包括阴极，低电压波束形成区域（BFR）和设置在CRT磁偏转线圈的束偏转区域中的高电压偏转聚焦透镜，用于同时重合 电子束在CRT显示屏上的聚焦和偏转。 偏转透镜包括设置在CRT颈部中的多个第一焦点栅格，包括间隔开的第一对栅格，每个栅格具有相应的光束通过孔，其中一个光束通过孔水平偏移，另一个光束通过孔垂直偏离电子 光束轴。 设置在第一对栅格中的每一个的相对侧上的其它栅格具有相对于电子束轴线居中的相应的光束通过孔，并且保持在固定的聚焦电压。 对于第一对栅格中的每一个施加随电子束偏转而变化的动态聚焦校正电压，用于补偿CRT面板上所有点处的非对称离轴电子束散焦。 该动态离轴散焦校正同样适用于单光束单色偏转透镜CRT以及多光束彩色偏转透镜CRT。

公开(公告)号：US5159240A

公开(公告)日：1992-10-27

申请号：US805378

申请日：1991-12-09

申请人： Hsing-Yao Chen ,  Sen-Su Tsai

发明人： Hsing-Yao Chen ,  Sen-Su Tsai

IPC分类号： H01J29/48

CPC分类号： H01J29/485

摘要： A limiting aperture disposed in a low voltage, beam forming region (BFR) of an electron gun in a cathode ray tube (CRT) provides reduced electron beam spot size with low power dissipation. The limiting aperture is located in a low voltage, electrostatic field-free region, preferably in the screen grid electrode G.sub.2, where the field-free region is formed by increasing the thickness of the screen grid electrode G.sub.2 to 1.8 times the diameter of a pair of circular recessed portions in opposing surfaces of the screen grid electrode G.sub.2 which are separated by the small diameter limiting aperture on the electron gun's axis through which the beam is directed. A narrow, relatively electrostatic field-free zone is thus formed in the center of the screen grid electrode G.sub.2 which is maintained at a relatively low voltage, i.e., ranging from approximately 300 V to less than 12% of the anode voltage. The outer electrons in the relatively low energy electron beam are intercepted by the limiting aperture to provide a small, well defined beam spot size on the CRT screen.

摘要翻译： 设置在阴极射线管（CRT）中的电子枪的低电压波束形成区域（BFR）中的限制孔径以低功率耗散提供减小的电子束斑点尺寸。 限制孔径位于低电压，无静电场区域，优选位于屏栅格电极G2中，其中通过将丝网栅电极G2的厚度增加到一对直径的1.8倍而形成无场区域 在栅极电极G2的相对表面中的圆形凹陷部分被电子枪的轴线上的小直径限制孔分隔开。 因此，在屏栅格电极G2的中心形成窄的，相对静电的无场区，其保持在相对较低的电压，即从阳极电压的大约300V至小于12％的范围内。 相对较低能量的电子束中的外部电子被限制孔截取，以在CRT屏幕上提供一个很小的，明确定义的束斑尺寸。

公开(公告)号：US4234814A

公开(公告)日：1980-11-18

申请号：US945600

申请日：1978-09-25

申请人： Hsing-Yao Chen ,  Richard H. Hughes

发明人： Hsing-Yao Chen ,  Richard H. Hughes

IPC分类号： H01J29/50 ,  H01J29/48 ,  H01J29/51 ,  H01J29/56

CPC分类号： H01J29/51

摘要： The gun, for use in a television picture tube, comprises a cathode, an apertured control grid, and an apertured screen grid aligned in the order named. The screen grid aperture comprises a rectangular slot portion facing the control grid and a circular portion facing away from the control grid. The slot portion of the aperture, which has a width 2-5 times its depth, creates an astigmatic field that produces underconvergence of the electron beam in the vertical plane only, whereby to avoid and/or compensate for vertical flare distortion of the beam spot at off-center positions on the image screen.

摘要翻译： 用于电视显像管的枪包括阴极，有孔控制栅格和以所述顺序排列的有孔屏幕。 屏幕网格孔包括面向控制栅格的矩形槽部分和背离控制栅格的圆形部分。 孔的狭缝部分具有其深度的2-5倍的宽度，产生像散电场，其仅在垂直平面中产生电子束的欠会聚，由此避免和/或补偿光束点的垂直光晕变形 在图像屏幕的偏心位置。

公开(公告)号：US06653645B1

公开(公告)日：2003-11-25

申请号：US09570899

申请日：2000-05-15

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： G21G500

CPC分类号： G21K1/087 ,  H01J37/1477 ,  H01J2237/3175 ,  H01J2237/31774

摘要： An electron beam device includes an electron beam source, plural spaced plates having aligned apertures through which an electron beam is directed, an electrostatic focusing arrangement, and plural electrostatically charged deflection plates for deflecting the beam and displacing it over a target surface. The apertures in the spaced plates are of deceasing size in the direction of travel of the electron beam for intercepting the outer periphery of the beam and providing a beam of reduced cross section. The electron beam is simultaneously deflected by the deflection plates and focused by the electrostatic focusing arrangement. The electrostatic focusing arrangement includes first and second focusing elements through which the beam is directed which are disposed along the beamline and adjacent the upper and lower end portions, respectively, of the beam deflection plates. The electron beam device is of small size, permitting plural devices to be arranged in two- and three-dimensional compact matrix arrays for dense electron beam lithography arrangements such as for use in the simultaneous manufacture of large numbers of semiconductor devices to boost the throughput in integrated circuit manufacture inexpensively.

公开(公告)号：US5592193A

公开(公告)日：1997-01-07

申请号：US529345

申请日：1995-09-18

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： A61B19/00 ,  G09G3/34 ,  G09G3/36

CPC分类号： G09G3/342 ,  A61B90/11 ,  G09G2310/024

摘要： A video display system includes a passive display panel such as a liquid crystal display (LCD) panel including a first plurality of horizontally aligned transparent conductive scanning electrodes and a second plurality of vertically aligned transparent conductive signal electrodes disposed on opposed surfaces of the panel. Light directed onto the aft surface of the display panel is transmitted through the panel as each horizontal linear array of first scanning electrodes is turned "ON" with the horizontal linear arrays sequentially turned on for vertically scanning the display panel in a step wise manner. Time varying video image information is provided to the vertically aligned electrodes. Liquid crystal display backlighting is provided in the form of a thin, elongated light beam of uniform intensity directed onto the display panel's aft surface. The backlighting beam is vertically displaced, such as from top to bottom, in a stepwise manner over the display panel synchronously with the turning "ON" of the horizontal scanning electrodes such that the beam illuminates only the horizontal linear array of the scanning electrodes which is turned "ON" i.e., only that portion of the display panel containing visible video information, for improved video image contrast and more efficient backlighting of the display panel. The scanning back light beam is provided by a partitioned or sectioned light panel, such as a plasma discharge panel (PDP), where the partitions are each aligned with a respective horizontal array of scanning electrodes and sequentially turned "ON" synchronously with actuation of the scanning electrode arrays.

摘要翻译： 视频显示系统包括诸如液晶显示器（LCD）面板的无源显示面板，其包括第一多个水平排列的透明导电扫描电极和布置在面板的相对表面上的第二多个垂直对准的透明导电信号电极。 导向到显示面板的后表面的光通过每个水平线性阵列的第一扫描电极的“水平线性阵列”顺序地接通以逐步地垂直扫描显示面板的“ON”被传送通过面板。 向垂直排列的电极提供时变视频图像信息。 液晶显示器背光被提供为指向显示面板的后表面的均匀强度的细长的光束的形式。 背光束与水平扫描电极的“ON”同步地在显示面板上以逐步的方式从顶部向底部垂直移位，使得光束仅照射扫描电极的水平线性阵列 变成“ON”，即仅显示面板的包含可见视频信息的那部分，以提高显示面板的视频图像对比度和更有效的背光。 扫描后光束由诸如等离子体放电面板（PDP）的分隔或分割的光板提供，其中分隔件与各个扫描电极的水平阵列对准，并且与激光的同时顺序地“ON” 扫描电极阵列。

公开(公告)号：US5382883A

公开(公告)日：1995-01-17

申请号：US98072

申请日：1993-07-28

申请人： Hsing-Yao Chen ,  Chun-Hsien Yeh

发明人： Hsing-Yao Chen ,  Chun-Hsien Yeh

IPC分类号： H01J29/48 ,  G09G1/00 ,  G09G1/20 ,  H01J29/50 ,  H01J29/51 ,  H01J29/70

CPC分类号： H01J29/70 ,  G09G1/002 ,  G09G1/20 ,  H01J29/50 ,  H01J2229/507

摘要： An inline electron gun for a color cathode ray tube (CRT) directs electron beams through an Einzel lens common to all of the beams for focusing the beams on a display screen across which the beams are scanned in horizontal scan lines in a raster-like manner. The electron gun includes a beam forming region (BFR) for forming the beams in a matrix array including a plurality of vertically spaced, horizontally aligned apertures, where each horizontally aligned group of apertures passes the primary color electron beams for one scan line on the display screen and vertically aligned apertures are grouped to pass common color electron beams which are horizontally deflected in synchronism over adjacent, vertically spaced scan lines on the display screen. All of the electron beams converge and cross over the electron gun's axis at the center of the Einzel lens, with the diverging beams then directed through a convergence arrangement which converges each group of the horizontally aligned beams to a common spot on a given scan line permitting video display information to be presented simultaneously on more than one scan line. The beam convergence arrangement equalizes the vertical and horizontal convergence effects on each of the beams in the matrix array of beams to deflect the outer beams inwardly while deflecting the upper and lower beams respectively downwardly and upwardly so that each group of horizontally aligned beams converge on the center beam of that group at the display screen.

摘要翻译： 用于彩色阴极射线管（CRT）的直列电子枪引导电子束通过所有光束共同的Einzel透镜，用于将光束聚焦在显示屏幕上，横向扫描线以光栅状扫描光束 。 电子枪包括用于将矩阵阵列中的波束形成的波束形成区域（BFR），该矩阵阵列包括多个垂直间隔开的水平对准的孔，其中每个水平排列的孔隙通过原色电子束，以在显示器上的一条扫描线 屏幕和垂直对准的孔被分组以通过在显示屏上的相邻的，垂直间隔的扫描线上水平偏转的普通彩色电子束。 所有电子束在Einzel透镜的中心会聚并交叉电子枪的轴线，发散光束然后被引导通过会聚装置，该会聚装置将每组水平对准的光束会聚到给定扫描线上的公共点，允许 视频显示信息将同时显示在多条扫描线上。 光束会聚装置使垂直和水平收敛效应平衡在矩阵阵列中的每个光束上，以使外光束向内偏转，同时分别向上和向下偏转上光束和下光束，使得每组水平对准的光束会聚在 该组的中心光束在显示屏幕上。

公开(公告)号：US5381252A

公开(公告)日：1995-01-10

申请号：US79900

申请日：1993-06-22

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： G09G3/34 ,  H04N5/74 ,  G02F1/1335

CPC分类号： G09G3/342 ,  H04N5/7441 ,  G09G2310/024

摘要： A projection liquid crystal display (LCD) system includes a liquid crystal display panel including a first plurality of horizontally aligned transparent conductive scanning electrodes and a second plurality of vertically aligned transparent conductive signal electrodes disposed on opposed surfaces of the panel. Light directed onto the display panel's aft surface is transmitted through the panel as each horizontal linear array of electrodes is turned "ON", with the horizontal linear arrays sequentially turned on for vertically scanning the display panel in a stepwise manner. LCD backlighting is provided by a cathode ray tube (CRT) having a phosphorbearing faceplate which emits light when an electron beam is incident thereon. The CRT includes two electron beams which are directed onto the faceplate's inner phosphor layer and are deflected in opposed directions along a common horizontal scan line, where each horizontal scan line on the CRT's faceplate is traced in sequence by the two beams. Each horizontal scan of the CRT's faceplate by the two electron beams is synchronized with the turning on of the vertically spaced, horizontal arrays of the first scanning electrodes to provide a single line light source for illuminating only that portion of the display panel containing video information for improved video image contrast and more efficient LCD panel backlighting. The total electron beam energy at each faceplate pixel when integrated over an entire horizontal scan line period is essentially constant when both beams have equal Gaussian beam density distributions to provide uniform illumination over the entire horizontal scan line.

摘要翻译： 投影液晶显示（LCD）系统包括：液晶显示面板，包括第一多个水平对准的透明导电扫描电极和设置在面板的相对表面上的第二多个垂直对准的透明导电信号电极。 当每个水平线性阵列的电极“接通”时，指向显示面板的后表面的光被透射通过面板，水平线性阵列依次打开以逐步地垂直扫描显示面板。 LCD背光源由阴极射线管（CRT）提供，该阴极射线管具有在电子束入射时发光的荧光屏面板。 CRT包括两个电子束，其被引导到面板的内部荧光体层上并沿着共同的水平扫描线在相反的方向上偏转，其中CRT面板上的每个水平扫描线由两个光束依次跟踪。 通过两个电子束对CRT面板的每个水平扫描与第一扫描电极的垂直间隔的水平阵列的导通同步，以提供单线光源，用于仅照亮包含视频信息的显示面板的那部分， 改进的视频图像对比度和更有效的LCD面板背光。 当两个光束具有相等的高斯光束密度分布以在整个水平扫描线周期上提供均匀的照明时，在整个水平扫描线周期上积分时，每个面板像素处的总电子束能量基本上是恒定的。

公开(公告)号：US5182492A

公开(公告)日：1993-01-26

申请号：US885880

申请日：1992-05-20

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： H01J29/48

CPC分类号： H01J29/488

摘要： Energetic electrons emitted by heated cathodes in a multi-beam color cathode ray tube (CRT) are directed to a low voltage beam forming region (BFR) of an electron gun, with the thus formed electron beams then directed through a high voltage main focus lens for focusing the beams on a display screen of the CRT. The BFR includes a G.sub.2 electron having three spaced inline apertures each disposed within an essentially electrostatic field-free region and through each of which a respective electron beam passes. Each G.sub.2 aperture intercepts an outer portion of an associated electron beam to provide an electron beam cross sectional shape which compensates for the asymmetric focusing effect of the main focus lens in correcting for beam spherical aberration to provide a rotationally symmetric electron beam spot on the display screen. The invention is also adapted for use in a monochrome, single electron beam CRT to provide a desired electron beam spot shape for optimum display pixel density and/or to eliminate display discontinuities and provide a smooth video image display.

摘要翻译： 在多光束彩色阴极射线管（CRT）中由加热阴极发射的能量电子被引导到电子枪的低电压波束形成区域（BFR），由此形成的电子束然后被引导通过高压主聚焦透镜 用于将光束聚焦在CRT的显示屏上。 BFR包括具有三个间隔开的在线孔径的G2电子，其各自设置在基本上无静电的区域内，并且通过各自的电子束通过。 每个G2孔径截取相关联的电子束的外部部分以提供电子束横截面形状，其补偿主聚焦透镜在校正束球面像差中的不对称聚焦效应，以在显示屏上提供旋转对称的电子束斑点 。 本发明还适用于单色单电子束CRT，以提供期望的电子束斑点形状，以获得最佳显示像素密度和/或消除显示不连续性并提供平滑的视频图像显示。