公开(公告)号：US20090039295A1

公开(公告)日：2009-02-12

申请号：US12033892

申请日：2008-02-20

Applicant: Hung-Pin Yu ,  Hsueh-Li Chiang ,  Cheng-Da Wu ,  Shiu-Shien Hsheng

Inventor： Hung-Pin Yu ,  Hsueh-Li Chiang ,  Cheng-Da Wu ,  Shiu-Shien Hsheng

IPC: G21F3/00

CPC classification number: H01J37/3171 ,  H01J37/32623 ,  H01J2237/0206 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/038 ,  H01J2237/08 ,  H01J2237/16

Abstract: A detachable inner shield suitable for an isolation bushing of an ion implanter is provided. The inner shield is mounted on an inside of the isolation bushing and completely fitting the inside of the isolation bushing.

Abstract translation: 提供了一种适用于离子注入机隔离套管的可拆卸内屏蔽罩。 内屏蔽安装在隔离套管的内侧，并完全安装在隔离套管的内部。