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113 条记录 (耗时 0.047 秒)

    Ion implantation apparatus
    6.
    发明授权
    Ion implantation apparatus 有权
    离子注入装置

    公开(公告)号：US09336992B2

    公开(公告)日：2016-05-10

    申请号：US14746277

    申请日：2015-06-22

    申请人： Sumitomo Heavy Industries Ion Technology Co., Ltd.

    发明人： Yoshitaka Amano

    IPC分类号： H01J37/00 ,  H01J37/317 ,  H01J37/10 ,  H01J37/244

    CPC分类号： H01J37/3171 ,  H01J37/10 ,  H01J37/244 ,  H01J2237/038 ,  H01J2237/1202 ,  H01J2237/16

    摘要： An ion implantation apparatus includes: a lens electrode unit including a plurality of electrode sections for parallelizing an ion beam; and a vacuum unit that houses the lens electrode unit in a vacuum environment. The vacuum unit includes: a first vacuum container having a first conductive container wall; a second vacuum container having a second conductive container wall; and an insulating container wall that allows the first vacuum container and the second vacuum container to communicate with each other and that insulates the first conductive container wall from the second conductive container wall. An insulating member is provided that insulates at least one electrode section of the lens electrode unit from at least one of the first conductive container wall and the second conductive container wall, and the insulating member is housed in the vacuum environment together with the lens electrode unit.

    摘要翻译： 离子注入装置包括：透镜电极单元，包括用于使离子束平行化的多个电极部分; 以及在真空环境中容纳透镜电极单元的真空单元。 真空单元包括：具有第一导电容器壁的第一真空容器; 具有第二导电容器壁的第二真空容器; 以及允许第一真空容器和第二真空容器彼此连通并使第一导电容器壁与第二导电容器壁绝缘的绝缘容器壁。 提供了一种绝缘构件，其将透镜电极单元的至少一个电极部分与第一导电容器壁和第二导电容器壁中的至少一个绝缘，并且绝缘构件与透镜电极单元一起容纳在真空环境中 。

    Insulation structure of high voltage electrodes for ion implantation apparatus
    7.
    发明授权
    Insulation structure of high voltage electrodes for ion implantation apparatus 有权
    用于离子注入装置的高压电极的绝缘结构

    公开(公告)号：US09117630B2

    公开(公告)日：2015-08-25

    申请号：US14229038

    申请日：2014-03-28

    申请人： SEN Corporation

    发明人： Masateru Sato ,  Hiroshi Matsushita

    IPC分类号： H01J37/08 ,  H01J37/317 ,  H01J37/248

    CPC分类号： H01J37/3171 ,  H01J37/248 ,  H01J2237/032 ,  H01J2237/036 ,  H01J2237/038 ,  H01J2237/08

    摘要： An insulation structure of high voltage electrodes includes an insulator having an exposed surface and a conductor portion, which includes a joint region in contact with the insulator, and a heat-resistant portion provided, along at least part of an edge of the joint region, in such a manner as to be adjacent to the exposed surface of the insulator. The heat-resistant portion is formed of an electrically conductive material whose melting point is higher than that of the conductor portion. The heat-resistant portion may be so provided as to have a gap between the insulator and the exposed surface.

    摘要翻译： 高电压电极的绝缘结构包括具有暴露表面的绝缘体和导体部分，导体部分包括与绝缘体接触的接合区域，以及沿着接合区域的边缘的至少一部分设置的耐热部分， 以与绝缘体的暴露表面相邻的方式。 耐热部由熔点高于导体部的导电性材料形成。 耐热部分可以设置成在绝缘体和暴露表面之间具有间隙。

    High-voltage insulation device for charged-particle optical apparatus
    8.
    发明授权
    High-voltage insulation device for charged-particle optical apparatus 有权
    带电粒子光学装置的高压绝缘装置

    公开(公告)号：US09093201B2

    公开(公告)日：2015-07-28

    申请号：US14155771

    申请日：2014-01-15

    申请人： IMS NANOFABRICATION AG

    发明人： Elmar Platzgummer ,  Andreas Chylik ,  Gerald Kratzert ,  Roman Oberleitner

    IPC分类号： H01J1/90 ,  H01B17/14 ,  H01J37/147 ,  H01J37/02 ,  H01J37/04 ,  H01J37/15 ,  H01J37/317 ,  B82Y10/00 ,  B82Y40/00

    CPC分类号： H01B17/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/023 ,  H01J37/04 ,  H01J37/147 ,  H01J37/15 ,  H01J37/3177 ,  H01J2237/036 ,  H01J2237/038 ,  H01J2237/1502

    摘要： A high-voltage insulation device (300) for use in a charged-particle optical apparatus comprises a plurality of rigid pillars (320) made of electrically insulating material. These pillars (320) are arranged around a central passage (310) which traverses the insulating device along its longitudinal axis (L), and the two ends of each pillar are configured to be respectively fixed to two separate electrostatic housings (221, 231) of the charged-particle optical apparatus by means of two respective end plates (311, 312), with the pillars (320) being oriented at an angle so as to be inclined with regard to said longitudinal axis (L). Advantageously, the pillars are mechanically adjustable with regard to their effective length, and each pillar (320) is arranged outside the central passage with its two ends at either of the first and second end plates (311, 312), preferably in a zig-zag arrangement.

    摘要翻译： 用于带电粒子光学装置的高压绝缘装置（300）包括由电绝缘材料制成的多个刚性支柱（320）。 这些支柱（320）围绕其纵向轴线（L）穿过绝缘装置的中心通道（310）布置，并且每个支柱的两端被分别固定在两个独立的静电外壳（221,231）上， 通过两个相应的端板（311,312）连接带电粒子光学装置，柱子（320）以相对于所述纵向轴线（L）倾斜的角度定向。 有利地，支柱可相对于它们的有效长度机械地调节，并且每个支柱（320）布置在中心通道的外侧，其两端位于第一和第二端板（311,312）中的任一个处， 扎格布置。

    Compact high-voltage electron gun
    9.
    发明授权
    Compact high-voltage electron gun 有权
    紧凑型高压电子枪

    公开(公告)号：US08957394B2

    公开(公告)日：2015-02-17

    申请号：US13679072

    申请日：2012-11-16

    申请人： KLA-Tencor Corporation

    发明人： Alan D. Brodie ,  Joseph Maurino ,  Mark A. McCord ,  Paul F. Petric

    IPC分类号： H01J23/06 ,  H01J23/08 ,  G21K5/08 ,  H01J37/065 ,  H01J29/48

    CPC分类号： H01J23/06 ,  G21K5/08 ,  H01J23/08 ,  H01J29/48 ,  H01J29/488 ,  H01J37/065 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/3175

    摘要： One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator 115 stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.

    摘要翻译： 一个实施例涉及一种包括具有电阻层的绝缘体支架的高压电子枪。 电阻层至少在绝缘体支架的内表面上。 阴极保持器联接到绝缘体115的一端，并且阳极耦合到另一端。 电阻层有利地增加了用于绝缘体间隔的表面击穿场强，因此能够实现高压电子枪的紧凑设计。 还公开了其它实施例，方面和特征。