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公开(公告)号：US11961627B2
公开(公告)日：2024-04-16
申请号：US18326935
申请日：2023-05-31
CPC分类号： G21K5/04 , G21K1/02 , H01J37/12 , H01J37/16 , H01J37/3007 , H01J37/3177 , H01J2237/002 , H01J2237/0213 , H01J2237/0216 , H01J2237/024 , H01J2237/0262 , H01J2237/032 , H01J2237/1207 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/30472
摘要： The invention relates to charged particle beam generator comprising a charged particle source for generating a charged particle beam, a collimator system comprising a collimator structure with a plurality of collimator electrodes for collimating the charged particle beam, a beam source vacuum chamber comprising the charged particle source, and a generator vacuum chamber comprising the collimator structure and the beam source vacuum chamber within a vacuum, wherein the collimator system is positioned outside the beam source vacuum chamber. Each of the beam source vacuum chamber and the generator vacuum chamber may be provided with a vacuum pump.
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公开(公告)号：US09735019B2
公开(公告)日：2017-08-15
申请号：US14842416
申请日：2015-09-01
申请人： TEL Epion Inc.
发明人： Michael Graf , Noel Russell , Matthew C. Gwinn , Allen J. Leith
IPC分类号： H01L21/3065 , H01L27/02 , H01J37/305 , H01L21/311 , H01J27/02 , H01L21/3213 , H01J37/317
CPC分类号： H01L21/3065 , H01J27/026 , H01J37/317 , H01J2237/006 , H01J2237/0812 , H01J2237/16 , H01J2237/31732 , H01J2237/3174 , H01L21/31116 , H01L21/32136
摘要： A beam processing system and method of operating are described. In particular, the beam processing system includes a beam source having a nozzle assembly that is configured to introduce a primary gas through the nozzle assembly to a vacuum vessel in order to produce a gaseous beam, such as a gas cluster beam, and optionally, an ionizer positioned downstream from the nozzle assembly, and configured to ionize the gaseous beam to produce an ionized gaseous beam. The beam processing system further includes a process chamber within which a substrate is positioned for treatment by the gaseous beam, and a secondary gas source, wherein the secondary gas source includes a secondary gas supply system that delivers a secondary gas, and a secondary gas controller that operatively controls the flow of the secondary gas injected into the beam processing system downstream of the nozzle assembly.
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3.发明授权公开(公告)号：US09548182B2
公开(公告)日：2017-01-17
申请号：US14406909
申请日：2013-05-08
发明人： Takashi Onishi , Shunichi Watanabe , Minoru Kaneda
IPC分类号： H01J37/04 , H01J37/073 , H01J37/02 , H01J37/067 , H01J37/248 , H01J37/24 , H01J27/02 , H01J29/48 , H01J37/16
CPC分类号： H01J37/04 , H01J27/024 , H01J29/485 , H01J37/026 , H01J37/067 , H01J37/073 , H01J37/16 , H01J37/241 , H01J37/248 , H01J2237/16
摘要： An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.
摘要翻译： 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。
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公开(公告)号：US20150270093A1
公开(公告)日：2015-09-24
申请号：US14222147
申请日：2014-03-21
CPC分类号： H05H1/34 , H01J37/08 , H01J37/3171 , H01J37/32467 , H01J2237/061 , H01J2237/16 , Y10T29/49002
摘要： The plasma arc chamber is made in part of a one piece base fabricated from 95.95% pure tungsten having four rigid walls defining a rectangular central opening. A bottom plate closes the bottom of the base and a cover with a slit for the passage of an ion beam closes the top of the base. Liners are fitted into the bottom plate, the top of base and against the four walls of the base.
摘要翻译： 等离子体电弧室是由95.95％纯钨制成的一体式基座的一部分，其具有限定矩形中心开口的四个刚性壁。 底板封闭基座的底部，并且具有用于离子束通过的狭缝的盖封闭基座的顶部。 衬里装配到底板，底座的顶部和底座的四个墙壁上。
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公开(公告)号：US20150137010A1
公开(公告)日：2015-05-21
申请号：US14541238
申请日：2014-11-14
IPC分类号： H01J37/02 , H01J37/317 , H01J37/30 , H01J37/16
CPC分类号： G21K1/02 , G21K5/04 , H01J37/026 , H01J37/065 , H01J37/12 , H01J37/16 , H01J37/24 , H01J37/3002 , H01J37/3007 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/032 , H01J2237/04 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/303 , H01J2237/30472
摘要： The invention relates to an electrode stack (70) comprising stacked electrodes (71-80) for manipulating a charged particle beam along an optical axis (A). Each electrode comprises an electrode body with an aperture for the charged particle beam. The electrode bodies are mutually spaced and the electrode apertures are coaxially aligned along the optical axis. The electrode stack comprises electrically insulating spacing structures (89) between each pair of adjacent electrodes for positioning the electrodes (71-80) at predetermined mutual distances along the axial direction (Z). A first electrode and a second electrode each comprise an electrode body with one or more support portions (86), wherein each support portion is configured to accommodate at least one spacing structure (89). The electrode stack has at least one clamping member (91-91c) configured to hold the support portions (86) of the first and second electrodes, as well as the intermediate spacing structure (89) together.
摘要翻译： 本发明涉及一种电极堆叠（70），其包括用于沿光轴（A）操纵带电粒子束的堆叠电极（71-80）。 每个电极包括具有用于带电粒子束的孔的电极体。 电极体相互间隔开，并且电极孔沿光轴同轴对准。 电极堆叠包括在每对相邻电极之间的电绝缘间隔结构（89），用于将电极（71-80）沿着轴向方向（Z）定位在预定的相互距离处。 第一电极和第二电极各自包括具有一个或多个支撑部分（86）的电极主体，其中每个支撑部分构造成容纳至少一个间隔结构（89）。 电极堆叠具有至少一个构造成将第一和第二电极的支撑部分（86）以及中间间隔结构（89）保持在一起的夹紧构件（91-91c）。
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公开(公告)号：US20150137009A1
公开(公告)日：2015-05-21
申请号：US14541236
申请日：2014-11-14
IPC分类号： H01J37/30 , H01J37/24 , H01J37/317
CPC分类号： G21K1/02 , G21K5/04 , H01J37/026 , H01J37/065 , H01J37/12 , H01J37/16 , H01J37/24 , H01J37/3002 , H01J37/3007 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/032 , H01J2237/04 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/303 , H01J2237/30472
摘要： The invention relates to a collimator electrode, comprising an electrode body (81) that is provided with a central electrode aperture (82), wherein the electrode body defines an electrode height between two opposite main surfaces, and wherein the electrode body accommodates a cooling conduit (105) inside the electrode body for transferring a cooling liquid (102). The electrode body preferably has a disk shape or an oblate ring shape.The invention further relates to a collimator electrode stack for use in a charged particle beam generator, comprising a first collimator electrode and a second collimator electrode that are each provided with a cooling conduit (105) for transferring the cooling liquid (102), and a connecting conduit (110) for a liquid connection between the cooling conduits of the first and second collimator electrodes.
摘要翻译： 本发明涉及一种准直器电极，包括设置有中心电极孔（82）的电极体（81），其中电极体限定两个相对的主表面之间的电极高度，并且其中电极体容纳冷却导管 （105），用于传送冷却液（102）。 电极体优选具有盘状或扁圆形状。 本发明还涉及一种用于带电粒子束发生器的准直器电极叠层，其包括第一准直器电极和第二准直器电极，每个准直器电极和第二准直器电极都设置有用于传送冷却液体（102）的冷却导管（105） 连接导管（110）用于第一和第二准直仪电极的冷却管道之间的液体连接。
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公开(公告)号：US20150124936A1
公开(公告)日：2015-05-07
申请号：US14528408
申请日：2014-10-30
发明人： Hidero ANNO , Masaji KANAGAMI
CPC分类号： H01J35/105 , A61B6/107 , A61B6/4488 , H01J7/26 , H01J19/36 , H01J19/54 , H01J19/74 , H01J35/16 , H01J35/26 , H01J37/165 , H01J2229/0061 , H01J2229/863 , H01J2229/8638 , H01J2235/12 , H01J2235/1216 , H01J2235/166 , H01J2237/002 , H01J2237/16 , H05G1/025 , H05G1/04
摘要： According to one embodiment, a rotating-anode X-ray tube assembly includes a rotating-anode X-ray tube, a housing, a coolant, a first shell, an X-ray shielding member, a second shell and an air introduction unit. The first shell is provided apart from the housing and an envelope of the rotating-anode X-ray tube, and surrounds the envelope. The X-ray shielding member is provided between the first shell and the housing and apart from the housing. The second shell is provided apart from the housing to cause an airway to be formed between the second shell and the housing. The air introduction unit produces a flow of air in the airway.
摘要翻译： 根据一个实施例，旋转阳极X射线管组件包括旋转阳极X射线管，壳体，冷却剂，第一壳体，X射线屏蔽构件，第二壳体和空气引入单元。 第一壳体与壳体和旋转阳极X射线管的外壳分开设置，并且围绕信封。 X射线屏蔽构件设置在第一壳体和壳体之间并且与壳体分离。 第二壳体与壳体分开设置，以在第二壳体和壳体之间形成气道。 空气引入单元在气道中产生空气流。
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公开(公告)号：US20140175278A1
公开(公告)日：2014-06-26
申请号：US14191769
申请日：2014-02-27
发明人： Yusuke OMINAMI , Sukehiro ITO , Tomohisa OHTAKI
IPC分类号： H01J37/18 , H01J37/244
CPC分类号： H01J37/18 , H01J37/16 , H01J37/185 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/16 , H01J2237/164 , H01J2237/1825 , H01J2237/2007 , H01J2237/2608
摘要： Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.
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公开(公告)号：US08592783B2
公开(公告)日：2013-11-26
申请号：US13245035
申请日：2011-09-26
IPC分类号： G21K5/00
CPC分类号： C23C14/564 , C23C16/4404 , H01J37/3171 , H01J37/32477 , H01J2237/0213 , H01J2237/08 , H01J2237/16
摘要： An improved plasma processing chamber is disclosed, wherein some or all of the components which are exposed to the plasma are made of, or coated with, titanium diborane. Titanium diborane has a hardness in excess of 9 mhos, making it less susceptible to sputtering. In addition, titanium diborane is resistant to fluoride and chlorine ions. Finally, titanium diborane is electrically conductive, and therefore the plasma remains more uniform over time, as charge does not build on the surfaces of the titanium diborane components. This results in improved workpiece processing, with less contaminants and greater uniformity. In other embodiments, titanium diborane may be used to line components within a beam line implanter.
摘要翻译： 公开了一种改进的等离子体处理室，其中暴露于等离子体的部分或全部组分由钛乙硼烷制成或涂覆。 钛乙硼烷的硬度超过9毫摩尔，使其不易溅射。 此外，乙硼烷钛耐氟化物和氯离子。 最后，乙硼烷钛是导电的，因此随着时间的推移，等离子体保持更均匀，因为电荷不会在钛二硼烷组分的表面上形成。 这导致改进的工件加工，更少的污染物和更大的均匀性。 在其它实施方案中，可以使用乙硼烷钛来在束线注入机内引导组分。
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公开(公告)号：US20130239663A1
公开(公告)日：2013-09-19
申请号：US13872950
申请日：2013-04-29
IPC分类号： G01N33/00
CPC分类号： G01N33/00 , H01J37/16 , H01J37/28 , H01J2237/022 , H01J2237/16 , H01J2237/182 , H01J2237/2817
摘要： An apparatus having a vacuum vessel that has a mechanism using a lubricant therein and not causing defects and faults to samples introduced into the vacuum vessel even it is an apparatus where lubricating oil or grease is applied is provided. An apparatus having a vacuum vessel that has a mechanism using a lubricant therein such as CD-SEM, in which a lubricant (oil, grease) whose adsorption amount per minute to a surface of a material introduced into the vacuum vessel of an apparatus for evaluating a lubricant after the start of vacuum evacuation and after reaches a quasi-equilibrium state is below 0.09 ng/cm2 is employed.
摘要翻译： 具有真空容器的装置是具有使用润滑剂的机构，即使是施加润滑油或润滑脂的装置，也不会引入到真空容器中的样品的缺陷和缺陷。 一种具有真空容器的设备，该真空容器具有使用其中的润滑剂的机构，例如CD-SEM，其中将润滑剂（油，油脂）的每分钟吸附量引入到用于评估的设备的真空容器中的材料的表面 真空抽真空后达到准平衡状态后的润滑剂低于0.09ng / cm2。
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