POWDER ATOMIC LAYER DEPOSITION EQUIPMENT AND GAS SUPPLY METHOD THEREFOR

    公开(公告)号:US20230132914A1

    公开(公告)日:2023-05-04

    申请号:US17801544

    申请日:2021-05-13

    Abstract: Provided are powder atomic layer deposition (ALD) equipment capable of increasing deposition uniformity of powder by using a gas supply sequence with or without an impeller or a vibration generator, and a gas supply method thereof, the powder ALD equipment including a process chamber having an accommodation space therein to accommodate powder, a gas supplier for sequentially supplying a plurality of gases to the powder, and a gas exhauster for exhausting, to outside, the gases discharged from the process chamber, wherein the gas supplier includes a gas supply plate, a first gas supply line, a first valve, edge valves, and a gas supply sequence controller.

    SYSTEM AND METHOD FOR ATOMIC LAYER DEPOSITION

    公开(公告)号:US20180274096A1

    公开(公告)日:2018-09-27

    申请号:US15934115

    申请日:2018-03-23

    Abstract: Disclosed is an atomic layer deposition system and method, the system including a chamber having a first accommodation space to accommodate a first target substrate, and a first gas supplier mounted in the chamber to supply a first gas to the first target substrate, wherein the first gas supplier includes a first fixed block having a rotation space therein and including a (1-1)st passage provided in a first direction of the rotation space and a (1-2)nd passage provided in a second direction of the rotation space, and a first rotatable pipe having a first gas channel therein, having a pipe shape including at least one first gas outlet at a side thereof, and rotatably mounted in the rotation space of the first fixed block to connect the first gas outlet to the (1-1)st or (1-2)nd passage of the first fixed block.

    Powder-Surface Treatment Apparatus
    6.
    发明公开

    公开(公告)号:US20240018649A1

    公开(公告)日:2024-01-18

    申请号:US18148331

    申请日:2022-12-29

    CPC classification number: C23C16/4417 C23C16/45544

    Abstract: An embodiment powder-surface treatment apparatus includes a housing defining an internal space, a main chamber installed in the internal space and defining an accommodation space in which a surface treatment process is performable using ALD, an injection unit provided on a first end portion of the main chamber, a plurality of sub-chambers arranged in a stack on top of each other in a multi-step configuration along the accommodation space in the main chamber in a state where an internal space in each of the plurality of sub-chambers is filled with a powder, a discharging unit provided on a second end portion of the main chamber, a loading apparatus configured to load a new sub-chamber into the accommodation space in the main chamber, and an unloading apparatus configured to unload and discharge at least one of the plurality of sub-chambers from the accommodation space to the outside.

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