摘要:
The present invention comprises a line scan camera and a variable focus optical element. With the line scan camera, the three dimensional imaging system of the present invention can overcome the speed problems of the area sensor and the variable focus optical element (Micromirror Array Lens) can change depth as fast as the line scan camera refreshes for the next scan so that the line scan camera and the variable focus optical element can be coupled to control optical depth and the linear scan. With help of the present invention scheme, three dimensional scan can be achieved with only one path scan of the line scan. Scheme, apparatus, and method are disclosed in the present invention.
摘要:
The present invention utilizes aperture array element and vari-focus optical element in confocal microscopy system. With the aperture array element lateral scanning property can be obtained and with vari-focus optical element axial scanning property can be obtained. Especially Micromirror Array Lens is used as a vari-focus optical element, fast and extended depth of focus scan range can be obtained. Thus the present invention of confocal microscopy with the vari-focus optical element increases scan speed of confocal microscopy system. The confocal microscopy system of the present invention comprises an illumination source, an aperture array element, a vari-focus optical element, an objective lens element, a photosensitive optical sensor device. With these elements, confocal microscopy is performed to get three dimensional images. Three dimensional with the confocal microscopy of the present invention can be obtained three dimensional images: two dimensional lateral images can be obtained with aperture array element scanning laterally with multiple aperture to increase scanning speed and the depth information of each pixel in two dimensional image can be determined by the vari-focus optical element. Thus three dimensional images can be reconstructed by the two dimensional imaged obtained from lateral scan and depth information from the axial scan. The present invention of the confocal microscopy system improves slow speed of the confocal system with considerable amount by use of fast varying vari-focus optical element and fast scanning aperture array element.
摘要:
Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.
摘要:
The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.
摘要:
The present invention provides a Micromirror Array Lens (MMAL) with fixed focal length to reproduce a designed surface having optical focusing power. The micro mechanical structures with surface profile shape memory are fabricated and released after fabrication. Each micromirror in the MMAL has its own motion by stiction force and/or electrostatic force while and/or after the releasing process. Once the designed surface is formed, the MMAL has an optical power as a lens.
摘要:
A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.
摘要:
The binoculars of the present invention comprise two optical units; one optical unit for each eye. Each optical unit comprises a first reflector element and a second reflector element, wherein at least one of the reflector elements is a micromirror array reflector. The binoculars of the present invention provide focusing and/or zoom functions without or with minimal macroscopic mechanical lens movement.
摘要:
A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.
摘要:
The present invention provides a micromirror array with iris function that comprises a plurality of micromirrors and is configured to provide an adjustable aperture having a plurality of aperture sizes by controlling motions of the micromirrors. The adjustable aperture controls the amount of incident light admitted to an image sensor by changing the aperture size. Also, the micromirrors comprised in the aperture forms a Micromirror Array Lens having variable focusing function.
摘要:
A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.