Abstract:
A method comprising identifying a set of target features for a plurality of data instances of an input data collection; determining feature values for the set of target features for the plurality of data instances; identifying a plurality of outlier data instances based on the determined feature values; identifying a plurality of noisy data instances from the outlier data instances based on feature values of the plurality of noisy data instances, wherein a noisy data instance is identified based on a determination that noise is present in noisy data instance; and providing an indication of the plurality of noisy data instances.
Abstract:
Defective artifact removal is described in photolithography masks corrected for optical proximity. In one example a method is described in which partitions are identified in a mask design for independent optimization. The partitions are grouped and ordering into stages. The first stage is processed. Geometries are extracted from the periphery of the first stage partitions. The extracted geometries are added to the peripheries of second stage partitions. Then the second stage partitions are processed.
Abstract:
A mower has a frame that supports a rotary cutting deck. The frame includes a pair of side rails that each extend from a front end in advance of the cutting deck to a rear end substantially behind the cutting deck. The front ends of the side rails support a pair of front caster wheels. The rear ends of the side rails have a raised, upwardly extending arch at which a hydraulic pump/motor assembly is mounted. The pump/motor assembly has an L-shaped configuration with the motor being located towards the bottom of the arch and outboard of the side rail and with the pump extending upwardly and inwardly from the motor to be located inboard of the side rail and within the vertical profile of the arch. The hydraulic motors drive a pair of rear drive wheels to propel the frame over the ground. A cross frame extends between the motors in the pump/motor assemblies to join the assemblies together. The deck is propelled from the frame by a plurality of struts extending between the cross frame and the deck.
Abstract:
A thermal cracking process that employs (1) a sinusoidal conduit in the convection section of a thermal cracking furnace, (2) a cross-over conduit, and/or (3) a transfer conduit that contains at least one bend fitting, at least one bend fitting carrying a protective layer comprising a steel carrier and carbide pellets composed of submicron hard particles cemented with a metal binder.
Abstract:
Reinforcement learning methods are applied to the multi-domain problem of developing photoresist models for advanced semiconductor technologies. In an iterative process, candidate photoresist models are selected or generated, with each model comprising an optical imaging model, one or more analytical chemistry or deformation kernels, and one or more photoresist development model terms. Model parameters to be calibrated in an iteration are selected. The candidate photoresist models are calibrated to best fit photoresist contours extracted from SEM images. Values for the calibration model parameters are determined and the most useful analytical kernels are kept in each model while the others are dropped. A genetic algorithm uses the best calibrated photoresist models from the prior iteration to develop candidate models for the next iteration. The process iterates until no further accuracies can be gained. A residual minimization model can be trained to correct for residual errors in the final model.
Abstract:
A machine readable storage medium, a method and an apparatus. The method comprises selecting a candidate set of parameters from a plurality of available parameters comprising variables that affect an outcome of a lithography process; performing a set of optimizations wherein each optimization of the set of optimizations is subject to a plurality of objectives and tolerances and a set of constraints, wherein performance of said each optimization comprises: modifying values of at least a portion of the candidate set of parameters to derive a predicted outcome for said each optimization; and determining whether a difference between the predicted outcome and an intended outcome is within an error threshold; and if the difference exceeds the error threshold, perform a subsequent optimization, and otherwise generate an input file including modified values, corresponding to a last one of the set of optimizations, for the at least a portion of the candidate set of parameters.
Abstract:
A thermal cracking process that employs (1) a sinusoidal conduit in the convection section of a thermal cracking furnace, (2) a cross-over conduit, and/or (3) a transfer conduit that contains at least one bend fitting, at least one bend fitting carrying a protective layer comprising a steel carrier and carbide pellets composed of submicron hard particles cemented with a metal binder.
Abstract:
An improved random forest model is provided, which has been trained based on silicon data generated from tests of previously fabricated chips. An input is provided to the random forest model, the input including a feature set of a pattern within a particular chip layout, the feature set identifying geometric attributes of polygonal elements within the pattern. A result is generated by the random forest model based on the input, where the result identifies a predicted attribute of the pattern based on the silicon data, and the result is generated based at least in part on determining, within the random forest model, that geometric attributes of the pattern were included in the previously fabricated chips, where the previously fabricated chips have chip layouts are different from the particular chip layout.
Abstract:
A search engine receives data describing reference geometry and generates a hash based on the reference geometry. A reference bloom filter is generated for the reference geometry based on the hash. The search engine performs a search to determine whether instances of the reference geometry are present in an integrated circuit (IC) layout. The search includes comparing the reference bloom filter with each one of a plurality of bloom filters corresponding to a plurality of subdomains of the IC layout. Based on results of the comparison, one or more subdomains of interest are identified and searched to determine whether the particular reference geometry is present in the subdomain.