公开(公告)号：US4883968A

公开(公告)日：1989-11-28

申请号：US202141

申请日：1988-06-03

申请人： James E. Hipple ,  Gerald L. Dionne ,  Yasuhiro Torii ,  Masaru Shimada ,  Iwao Watanabe

发明人： James E. Hipple ,  Gerald L. Dionne ,  Yasuhiro Torii ,  Masaru Shimada ,  Iwao Watanabe

IPC分类号： C23C14/48 ,  H01J27/16 ,  H01J27/18 ,  H01J37/08 ,  H01J37/317 ,  H01L21/265

CPC分类号： H01J27/18

摘要： An electron cyclotron resonance ion source for an ion implanter. The source includes an ionization chamber surrounded along its length by an electromagnet. A number of extraction electrodes at an output end of the ionization chamber allow positively charged oxygen ions to pass through apertures in the electrodes. The uniformity of the axially aligned magnetic field in the ionization chamber is extended through the extraction electrode by a magnetically permeable electrode and through use of non-magnetically permeable material to mount others of said electrodes.